JP2015514019A - 独立して回転可能なウェストを有するロボットシステム、装置、および方法 - Google Patents

独立して回転可能なウェストを有するロボットシステム、装置、および方法 Download PDF

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Publication number
JP2015514019A
JP2015514019A JP2015505785A JP2015505785A JP2015514019A JP 2015514019 A JP2015514019 A JP 2015514019A JP 2015505785 A JP2015505785 A JP 2015505785A JP 2015505785 A JP2015505785 A JP 2015505785A JP 2015514019 A JP2015514019 A JP 2015514019A
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upper arm
boom
forearm
coupled
rotation
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JP2015505785A
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Japanese (ja)
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JP2015514019A5 (https=
Inventor
ジェフリー シー． ハジェンズ，
ジェフリー シー． ハジェンズ，
イズヤ クレマーマン，
イズヤ クレマーマン，
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2015514019A publication Critical patent/JP2015514019A/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/27—Arm part
    • Y10S901/28—Joint
    • Y10S901/29—Wrist
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y10T74/20335—Wrist

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
JP2015505785A 2012-04-12 2013-04-02 独立して回転可能なウェストを有するロボットシステム、装置、および方法 Pending JP2015514019A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261623128P 2012-04-12 2012-04-12
US61/623,128 2012-04-12
PCT/US2013/034902 WO2013154863A1 (en) 2012-04-12 2013-04-02 Robot systems, apparatus, and methods having independently rotatable waists

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018186381A Division JP2019036738A (ja) 2012-04-12 2018-10-01 独立して回転可能なウェストを有するロボットシステム、装置、および方法

Publications (2)

Publication Number Publication Date
JP2015514019A true JP2015514019A (ja) 2015-05-18
JP2015514019A5 JP2015514019A5 (https=) 2016-06-09

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ID=49325246

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015505785A Pending JP2015514019A (ja) 2012-04-12 2013-04-02 独立して回転可能なウェストを有するロボットシステム、装置、および方法
JP2018186381A Pending JP2019036738A (ja) 2012-04-12 2018-10-01 独立して回転可能なウェストを有するロボットシステム、装置、および方法

Family Applications After (1)

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JP2018186381A Pending JP2019036738A (ja) 2012-04-12 2018-10-01 独立して回転可能なウェストを有するロボットシステム、装置、および方法

Country Status (6)

Country Link
US (1) US9117865B2 (https=)
JP (2) JP2015514019A (https=)
KR (1) KR20150003803A (https=)
CN (1) CN104380452B (https=)
TW (1) TWI593528B (https=)
WO (1) WO2013154863A1 (https=)

Cited By (2)

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KR20240042673A (ko) * 2021-09-29 2024-04-02 베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디. 반도체 공정 디바이스 및 이의 웨이퍼 지지 구조
WO2024143550A1 (ja) * 2022-12-28 2024-07-04 川崎重工業株式会社 基板搬送ロボットシステム

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KR101866625B1 (ko) * 2014-09-03 2018-06-11 가부시키가이샤 알박 반송 장치 및 진공 장치
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TWI707754B (zh) 2016-06-28 2020-10-21 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之方法
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
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JP7243295B2 (ja) 2018-09-19 2023-03-22 セイコーエプソン株式会社 プリントヘッド制御回路、プリントヘッド及び液体吐出装置
CN112219269B (zh) * 2018-11-19 2024-08-20 玛特森技术公司 用于加工工件的系统和方法
US11883958B2 (en) * 2019-06-07 2024-01-30 Applied Materials, Inc. Robot apparatus including dual end effectors with variable pitch and methods
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US11049740B1 (en) 2019-12-05 2021-06-29 Applied Materials, Inc. Reconfigurable mainframe with replaceable interface plate
US20210407837A1 (en) * 2020-06-30 2021-12-30 Applied Materials, Inc. Robot apparatus and systems, and methods for transporting substrates in electronic device manufacturing
CN114695216B (zh) * 2020-12-31 2025-10-28 拓荆科技股份有限公司 传送晶圆的方法和机械手臂
US11358809B1 (en) * 2021-03-01 2022-06-14 Applied Materials, Inc. Vacuum robot apparatus for variable pitch access
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Cited By (5)

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KR20240042673A (ko) * 2021-09-29 2024-04-02 베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디. 반도체 공정 디바이스 및 이의 웨이퍼 지지 구조
KR102717508B1 (ko) 2021-09-29 2024-10-16 베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디. 반도체 공정 디바이스 및 이의 웨이퍼 지지 구조
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JPWO2024143550A1 (https=) * 2022-12-28 2024-07-04
JP7767652B2 (ja) 2022-12-28 2025-11-11 川崎重工業株式会社 基板搬送ロボットシステム

Also Published As

Publication number Publication date
US20130272823A1 (en) 2013-10-17
WO2013154863A1 (en) 2013-10-17
CN104380452B (zh) 2016-10-19
TW201406511A (zh) 2014-02-16
KR20150003803A (ko) 2015-01-09
CN104380452A (zh) 2015-02-25
JP2019036738A (ja) 2019-03-07
TWI593528B (zh) 2017-08-01
US9117865B2 (en) 2015-08-25

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