TWI593528B - 具有獨立可旋轉機身中段的機器人系統、設備及方法 - Google Patents

具有獨立可旋轉機身中段的機器人系統、設備及方法 Download PDF

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Publication number
TWI593528B
TWI593528B TW102112536A TW102112536A TWI593528B TW I593528 B TWI593528 B TW I593528B TW 102112536 A TW102112536 A TW 102112536A TW 102112536 A TW102112536 A TW 102112536A TW I593528 B TWI593528 B TW I593528B
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TW
Taiwan
Prior art keywords
upper arm
cantilever
forearm
coupled
rotation
Prior art date
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TW102112536A
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English (en)
Chinese (zh)
Other versions
TW201406511A (zh
Inventor
哈德俊傑佛利Ｃ
克瑞摩曼易茲亞
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應用材料股份有限公司
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Publication of TW201406511A publication Critical patent/TW201406511A/zh
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Publication of TWI593528B publication Critical patent/TWI593528B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/27—Arm part
    • Y10S901/28—Joint
    • Y10S901/29—Wrist
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y10T74/20335—Wrist

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
TW102112536A 2012-04-12 2013-04-09 具有獨立可旋轉機身中段的機器人系統、設備及方法 TWI593528B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261623128P 2012-04-12 2012-04-12

Publications (2)

Publication Number Publication Date
TW201406511A TW201406511A (zh) 2014-02-16
TWI593528B true TWI593528B (zh) 2017-08-01

Family

ID=49325246

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102112536A TWI593528B (zh) 2012-04-12 2013-04-09 具有獨立可旋轉機身中段的機器人系統、設備及方法

Country Status (6)

Country Link
US (1) US9117865B2 (https=)
JP (2) JP2015514019A (https=)
KR (1) KR20150003803A (https=)
CN (1) CN104380452B (https=)
TW (1) TWI593528B (https=)
WO (1) WO2013154863A1 (https=)

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Also Published As

Publication number Publication date
US20130272823A1 (en) 2013-10-17
JP2015514019A (ja) 2015-05-18
WO2013154863A1 (en) 2013-10-17
CN104380452B (zh) 2016-10-19
TW201406511A (zh) 2014-02-16
KR20150003803A (ko) 2015-01-09
CN104380452A (zh) 2015-02-25
JP2019036738A (ja) 2019-03-07
US9117865B2 (en) 2015-08-25

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