JP2018139287A5 - - Google Patents

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JP2018139287A5
JP2018139287A5 JP2018006824A JP2018006824A JP2018139287A5 JP 2018139287 A5 JP2018139287 A5 JP 2018139287A5 JP 2018006824 A JP2018006824 A JP 2018006824A JP 2018006824 A JP2018006824 A JP 2018006824A JP 2018139287 A5 JP2018139287 A5 JP 2018139287A5
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Japan
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processing
arm
end effector
station
substrate processing
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JP2018006824A
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Japanese (ja)
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JP2018139287A (ja
JP7394520B2 (ja
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Priority to JP2022165116A priority Critical patent/JP7440592B2/ja
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Publication of JP7394520B2 publication Critical patent/JP7394520B2/ja
Priority to JP2024020731A priority patent/JP7727030B2/ja
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JP2018006824A 2017-01-23 2018-01-19 最適化された低エネルギ／高生産性の蒸着システム Active JP7394520B2 (ja)

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Application Number Priority Date Filing Date Title
JP2022165116A JP7440592B2 (ja) 2017-01-23 2022-10-14 最適化された低エネルギ／高生産性の蒸着システム
JP2024020731A JP7727030B2 (ja) 2017-01-23 2024-02-15 最適化された低エネルギ／高生産性の蒸着システム

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Application Number Priority Date Filing Date Title
US201762449325P 2017-01-23 2017-01-23
US62/449,325 2017-01-23
US15/868,347 US11024531B2 (en) 2017-01-23 2018-01-11 Optimized low energy / high productivity deposition system
US15/868,347 2018-01-11

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JP2022165116A Division JP7440592B2 (ja) 2017-01-23 2022-10-14 最適化された低エネルギ／高生産性の蒸着システム

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JP2018139287A JP2018139287A (ja) 2018-09-06
JP2018139287A5 true JP2018139287A5 (https=) 2021-03-18
JP7394520B2 JP7394520B2 (ja) 2023-12-08

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JP2018006824A Active JP7394520B2 (ja) 2017-01-23 2018-01-19 最適化された低エネルギ／高生産性の蒸着システム
JP2022165116A Active JP7440592B2 (ja) 2017-01-23 2022-10-14 最適化された低エネルギ／高生産性の蒸着システム
JP2024020731A Active JP7727030B2 (ja) 2017-01-23 2024-02-15 最適化された低エネルギ／高生産性の蒸着システム

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JP2022165116A Active JP7440592B2 (ja) 2017-01-23 2022-10-14 最適化された低エネルギ／高生産性の蒸着システム
JP2024020731A Active JP7727030B2 (ja) 2017-01-23 2024-02-15 最適化された低エネルギ／高生産性の蒸着システム

Country Status (7)

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US (2) US11024531B2 (https=)
EP (1) EP3352205B1 (https=)
JP (3) JP7394520B2 (https=)
KR (2) KR102533126B1 (https=)
CN (2) CN108374157B (https=)
SG (1) SG10201800524XA (https=)
TW (3) TWI792531B (https=)

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