JP2021514541A5 - - Google Patents

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Publication number
JP2021514541A5
JP2021514541A5 JP2020543528A JP2020543528A JP2021514541A5 JP 2021514541 A5 JP2021514541 A5 JP 2021514541A5 JP 2020543528 A JP2020543528 A JP 2020543528A JP 2020543528 A JP2020543528 A JP 2020543528A JP 2021514541 A5 JP2021514541 A5 JP 2021514541A5
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JP
Japan
Prior art keywords
substrate processing
processing tool
vtm
process modules
tool according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020543528A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021514541A (ja
JP7344887B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2019/018174 external-priority patent/WO2019161169A1/en
Publication of JP2021514541A publication Critical patent/JP2021514541A/ja
Publication of JP2021514541A5 publication Critical patent/JP2021514541A5/ja
Application granted granted Critical
Publication of JP7344887B2 publication Critical patent/JP7344887B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2020543528A 2018-02-15 2019-02-15 移動式基板搬送チャンバ Active JP7344887B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862631057P 2018-02-15 2018-02-15
US62/631,057 2018-02-15
PCT/US2019/018174 WO2019161169A1 (en) 2018-02-15 2019-02-15 Moving substrate transfer chamber

Publications (3)

Publication Number Publication Date
JP2021514541A JP2021514541A (ja) 2021-06-10
JP2021514541A5 true JP2021514541A5 (https=) 2022-03-24
JP7344887B2 JP7344887B2 (ja) 2023-09-14

Family

ID=67619589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020543528A Active JP7344887B2 (ja) 2018-02-15 2019-02-15 移動式基板搬送チャンバ

Country Status (5)

Country Link
US (1) US11282737B2 (https=)
JP (1) JP7344887B2 (https=)
KR (1) KR102706036B1 (https=)
CN (1) CN111742400B (https=)
WO (1) WO2019161169A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6985531B1 (ja) 2020-02-05 2021-12-22 株式会社安川電機 搬送システム、搬送方法および搬送装置
JP7156332B2 (ja) * 2020-05-21 2022-10-19 株式会社安川電機 搬送装置、搬送方法および搬送システム
WO2023205361A1 (en) * 2022-04-22 2023-10-26 Lam Research Corporation Shallow-depth equipment front end module with robot
KR102620088B1 (ko) * 2023-05-12 2024-01-02 에이피티씨 주식회사 기판 이송 장치

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5202716A (en) * 1988-02-12 1993-04-13 Tokyo Electron Limited Resist process system
JPH10144765A (ja) * 1996-11-11 1998-05-29 Canon Sales Co Inc 基板処理システム
US6053687A (en) * 1997-09-05 2000-04-25 Applied Materials, Inc. Cost effective modular-linear wafer processing
AU2003259203A1 (en) * 2002-07-22 2004-02-09 Brooks Automation, Inc. Substrate processing apparatus
US7959395B2 (en) * 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
JP4493955B2 (ja) * 2003-09-01 2010-06-30 東京エレクトロン株式会社 基板処理装置及び搬送ケース
KR20070029032A (ko) * 2005-09-08 2007-03-13 주성엔지니어링(주) 이동식 이송챔버와 이를 포함하는 기판처리장치
US20070051314A1 (en) 2005-09-08 2007-03-08 Jusung Engineering Co., Ltd. Movable transfer chamber and substrate-treating apparatus including the same
JP2009147236A (ja) 2007-12-17 2009-07-02 Mitsubishi Heavy Ind Ltd 真空処理装置
JP5139253B2 (ja) * 2008-12-18 2013-02-06 東京エレクトロン株式会社 真空処理装置及び真空搬送装置
JP5526988B2 (ja) 2010-04-28 2014-06-18 東京エレクトロン株式会社 基板処理装置及び基板処理システム
JP5551625B2 (ja) 2011-01-13 2014-07-16 東京エレクトロン株式会社 基板処理装置及び基板処理方法
KR20250119665A (ko) 2011-09-16 2025-08-07 퍼시몬 테크놀로지스 코포레이션 운송 장치 및 이를 포함하는 처리 장치
TWI629743B (zh) 2012-02-10 2018-07-11 布魯克斯自動機械公司 基材處理設備
US9558978B2 (en) * 2012-05-04 2017-01-31 Kla-Tencor Corporation Material handling with dedicated automated material handling system
US10424498B2 (en) 2013-09-09 2019-09-24 Persimmon Technologies Corporation Substrate transport vacuum platform
US9558975B2 (en) 2013-09-20 2017-01-31 Varian Semiconductor Equipment Associates, Inc. System and method for transferring articles between vacuum and non-vacuum environments
US9818633B2 (en) * 2014-10-17 2017-11-14 Lam Research Corporation Equipment front end module for transferring wafers and method of transferring wafers
JP6837274B2 (ja) 2015-06-30 2021-03-03 東京エレクトロン株式会社 半導体製造装置及び基板搬送方法
US20170115657A1 (en) * 2015-10-22 2017-04-27 Lam Research Corporation Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ

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