JP6837274B2 - 半導体製造装置及び基板搬送方法 - Google Patents
半導体製造装置及び基板搬送方法 Download PDFInfo
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Description
まず、本発明の一実施形態に係る半導体製造装置10の全体構成の一例について、図1を参照しながら説明する。図1に示す半導体製造装置10は、クラスタ構造(マルチチャンバタイプ)のシステムである。
次に、ウェハWの搬送とガスの拡散について説明する。まず、ウェハWは、ロードポートLP1〜3のいずれかから搬出され、処理室PM1〜4のいずれかに搬入される。具体的には、ウェハWは、ロードポートLP1〜3のいずれかから搬出され、ローダーモジュールLMを介してロードロック室LLM1、2のいずれかへ搬送される。ウェハWが搬入されたロードロック室LLM1、2のいずれかでは、排気処理(真空引き)が行われ、室内が大気雰囲気から真空雰囲気へと切り替えられる。この状態でウェハWは搬送装置ARMによりロードロック室LLM1、2のいずれかから搬出され、処理室PM1〜4のいずれかに搬入され、処理室PM1〜4のいずれかにてウェハWの処理が開始される。ウェハWが搬出されたロードロック室LLM1、2のいずれかの内部は真空雰囲気から大気雰囲気へと切り替えられる。
・ガス CF4(四フッ化炭素)、C4F8(パーフルオロシクロブタン)、Ar(アルゴン)、N2(窒素)、H2(水素)、O2(酸素)、CO2(二酸化窒素)
・圧力 10mT(1.333Pa)〜50mT(6.666Pa)
・処理時間 一枚のウェハを処理する毎に約5分
処理室PM1にてガスからプラズマが生成され、そのプラズマの作用により処理室PM1の載置台20に載置されたウェハWがプラズマ処理される。処理後、図1の(1)に示すように、処理室PM1内部はN2ガスによりパージされる。N2ガスは、排気口30から排気される。
次に、搬送室VTMの内部に配置された汚染モニタについて、図2を参照しながら説明する。搬送室VTMの内部にはQCM(Quartz Crystal Microbalance)50が設けられている。QCM50は、搬送室VTMの汚染状態を検出する汚染モニタの一例である。
f=1/2t(√C/ρ) t:水晶板の厚み C:弾性定数 ρ:密度
この現象を利用し、共振周波数fの変化量により微量な付着物を定量的に測定することができる。共振周波数fの変化は、水晶振動子に付着した物質による弾性定数の変化と物質の付着厚みを水晶密度に換算したときの厚み寸法で決まる。これにより、共振周波数fの変化を付着物の重量に換算することができる。
次に、一実施形態にかかる基板搬送処理の一例について、図3のフローチャートを用いて説明する。本処理は、制御部100により制御される。本処理が開始されると、制御部100は、搬送室VTMに配置されたQCM50(水晶振動子)によるモニタリングを開始する(ステップS10)。搬送室VTMに複数のQCM50が配置されている場合、複数のQCM50のそれぞれによりモニタリングが開始される。
制御部100は、搬送室VTMの圧力、搬送室VTMの不活性ガスの流量、処理室PM1〜4の圧力及び処理室PM1〜4の不活性ガスの流量の少なくともいずれかの搬送条件のレシピの設定値を変更する。
(1)搬送室VTMの圧力 100mT(13.33Pa)
(2)自動圧力調整バルブAPCの開度 20°(固定)
(3)処理室PMへの不活性ガス(Ar)の供給 1200sccm
(4)搬送室VTMへの不活性ガス(N2)の供給 なし
図6(b)には、搬送条件の一つである(4)の搬送室VTMの不活性ガス(N2)の供給を制御したとき、つまり、搬送室VTMのN2パージを開始したときの反応生成物の量を示す。
(1)搬送室VTMの圧力 100mT(13.33Pa)
(2)自動圧力調整バルブAPCの開度 20°(固定)
(3)処理室PMへの不活性ガス(Ar)の供給 1200sccm
(4)搬送室VTMへの不活性ガス(N2)の供給 あり
搬送室VTMへの不活性ガス(N2)の供給を開始するように搬送条件が変更されたことで、搬送室VTMへ不活性ガス(N2)を供給しない搬送条件と比べて、搬送室VTM内の反応生成物の蓄積量を図6(a)の状態から−25.5%減らすことができる。
(1)搬送室VTMの圧力 200mT(26.66Pa)
(2)自動圧力調整バルブAPCの開度 全開(40°に固定)
(3)処理室PMへの不活性ガス(Ar)の供給 500sccm
(4)搬送室VTMへの不活性ガス(N2)の供給 あり
このように、搬送条件(1)〜(4)のすべてが変更されたことで、搬送室VTM内の反応生成物の蓄積量を図6(a)の状態から−68.6%減らすことができる。
図3のステップS16にて、QCM50の周波数の変化量が第2の閾値よりも大きい場合、制御部100はステップS22のクリーニング処理を実行する。
20:載置台
30:排気口
40:排気ポート
50:QCM
100:制御部
PM:処理室
VTM:搬送室
LLM:ロードロック室
LM:ローダーモジュール
LP:ロードポート
GV:ゲートバルブ
ARM:搬送装置
Claims (9)
- 基板に処理を施す処理室と、
前記処理室に隣接し接続する真空搬送室と、
前記真空搬送室に設けられた複数の汚染モニタと、を有し、
前記複数の汚染モニタは、前記真空搬送室の内部において前記処理室での基板処理に用いられるガスにより生じた反応生成物の前記複数の汚染モニタへの付着量を検出し、
前記複数の汚染モニタの少なくとも1つは、前記真空搬送室の内部に設けられたゲートバルブ、該真空搬送室の天井、又は該真空搬送室に設けられた搬送装置の可動部のいずれかに配置される、
半導体製造装置。 - 前記複数の汚染モニタの少なくとも1つは、水晶振動子である、
請求項1に記載の半導体製造装置。 - 前記処理室に隣接し接続する前記真空搬送室は、排気ポート及び該真空搬送室のコーナー部のいずれかに前記汚染モニタをさらに有する、
請求項1又は2に記載の半導体製造装置。 - 前記処理室に隣接し接続する前記真空搬送室を第1の真空搬送室とし、前記第1の真空搬送室に隣接し接続する第2の真空搬送室を有し、
前記第2の真空搬送室は、内部に、前記汚染モニタを少なくとも1つ有する、
請求項1〜3のいずれか一項に記載の半導体製造装置。 - 前記複数の汚染モニタの少なくとも1つが検出した前記処理室に隣接し接続する前記真空搬送室の内部における前記付着量を示す情報に基づき、前記処理室に隣接し接続する真空搬送室における基板の搬送条件を制御し、該搬送条件に基づき前記基板を搬送させる制御部を有する、
請求項1〜4のいずれか一項に記載の半導体製造装置。 - 前記制御部は、前記処理室に隣接し接続する前記真空搬送室の圧力、前記真空搬送室の不活性ガスの流量、前記処理室の圧力、及び前記処理室の不活性ガスの流量の少なくともいずれかについての前記搬送条件を制御する、
請求項5に記載の半導体製造装置。 - 前記制御部は、前記複数の汚染モニタの少なくとも1つが検出した前記処理室に隣接し接続する前記真空搬送室の内部における前記付着量を示す情報に基づき、該真空搬送室内のクリーニングを制御する、
請求項5又は6に記載の半導体製造装置。 - 前記処理室に隣接し接続する前記真空搬送室内をクリーニングする間に前記複数の汚染モニタの少なくとも1つが検出した前記処理室に隣接し接続する前記真空搬送室における前記付着量を示す情報に基づき、該処理室に隣接し接続する真空搬送室内のクリーニングの終点を制御する、
請求項7に記載の半導体製造装置。 - 処理室にて処理された基板を、前記処理室に隣接し接続する真空搬送室を通って搬送する基板搬送方法であって、
前記真空搬送室に複数の汚染モニタを設け、該複数の汚染モニタの少なくとも1つにより該真空搬送室の内部において前記処理室での基板処理に用いられるガスにより生じた反応生成物の前記複数の汚染モニタへの付着量を検出し、
前記汚染モニタが検出した前記真空搬送室の内部における前記付着量を示す情報に基づき、前記真空搬送室における基板の搬送条件を制御し、
前記搬送条件に基づき基板を搬送する、
基板搬送方法であり、
前記複数の汚染モニタの少なくとも1つを、前記真空搬送室の内部に設けられたゲートバルブ、該真空搬送室の天井、又は該真空搬送室に設けられた搬送装置の可動部のいずれかに配置する、
基板搬送方法。
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US15/185,254 US20170004984A1 (en) | 2015-06-30 | 2016-06-17 | Substrate transfer apparatus and substrate transfer method |
TW105120106A TWI728981B (zh) | 2015-06-30 | 2016-06-27 | 半導體製造裝置及基板運送方法 |
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