JP2020507922A5 - - Google Patents

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JP2020507922A5
JP2020507922A5 JP2019541270A JP2019541270A JP2020507922A5 JP 2020507922 A5 JP2020507922 A5 JP 2020507922A5 JP 2019541270 A JP2019541270 A JP 2019541270A JP 2019541270 A JP2019541270 A JP 2019541270A JP 2020507922 A5 JP2020507922 A5 JP 2020507922A5
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based precursor
precursor gas
layer
gas
boron
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JP2019541270A
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JP7229929B2 (ja
JP2020507922A (ja
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Priority claimed from PCT/US2018/013099 external-priority patent/WO2018144198A1/en
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JP2019541270A 2017-02-01 2018-01-10 ハードマスク応用向けのホウ素がドープされた炭化タングステン Active JP7229929B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762453288P 2017-02-01 2017-02-01
US62/453,288 2017-02-01
PCT/US2018/013099 WO2018144198A1 (en) 2017-02-01 2018-01-10 Boron doped tungsten carbide for hardmask applications

Publications (3)

Publication Number Publication Date
JP2020507922A JP2020507922A (ja) 2020-03-12
JP2020507922A5 true JP2020507922A5 (enExample) 2021-02-25
JP7229929B2 JP7229929B2 (ja) 2023-02-28

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JP2019541270A Active JP7229929B2 (ja) 2017-02-01 2018-01-10 ハードマスク応用向けのホウ素がドープされた炭化タングステン

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US (1) US10403502B2 (enExample)
JP (1) JP7229929B2 (enExample)
KR (1) KR102557334B1 (enExample)
CN (1) CN110249410B (enExample)
TW (1) TWI749165B (enExample)
WO (1) WO2018144198A1 (enExample)

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