JP2017106065A5 - - Google Patents

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Publication number
JP2017106065A5
JP2017106065A5 JP2015239782A JP2015239782A JP2017106065A5 JP 2017106065 A5 JP2017106065 A5 JP 2017106065A5 JP 2015239782 A JP2015239782 A JP 2015239782A JP 2015239782 A JP2015239782 A JP 2015239782A JP 2017106065 A5 JP2017106065 A5 JP 2017106065A5
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JP
Japan
Prior art keywords
layer
tic
forming
dlc
substrate
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JP2015239782A
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English (en)
Japanese (ja)
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JP6647847B2 (ja
JP2017106065A (ja
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Priority to JP2015239782A priority Critical patent/JP6647847B2/ja
Priority claimed from JP2015239782A external-priority patent/JP6647847B2/ja
Priority to PCT/JP2016/086338 priority patent/WO2017099112A1/ja
Priority to US15/781,365 priority patent/US10731243B2/en
Publication of JP2017106065A publication Critical patent/JP2017106065A/ja
Publication of JP2017106065A5 publication Critical patent/JP2017106065A5/ja
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Publication of JP6647847B2 publication Critical patent/JP6647847B2/ja
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JP2015239782A 2015-12-08 2015-12-08 基材とｄｌｃ層との間に形成される中間層の成膜方法 Active JP6647847B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015239782A JP6647847B2 (ja) 2015-12-08 2015-12-08 基材とｄｌｃ層との間に形成される中間層の成膜方法
PCT/JP2016/086338 WO2017099112A1 (ja) 2015-12-08 2016-12-07 基材とｄｌｃ層との間に形成される中間層およびその成膜方法
US15/781,365 US10731243B2 (en) 2015-12-08 2016-12-07 Intermediate layer formed between base material and DLC layer and film-forming method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015239782A JP6647847B2 (ja) 2015-12-08 2015-12-08 基材とｄｌｃ層との間に形成される中間層の成膜方法

Publications (3)

Publication Number Publication Date
JP2017106065A JP2017106065A (ja) 2017-06-15
JP2017106065A5 true JP2017106065A5 (enExample) 2018-11-22
JP6647847B2 JP6647847B2 (ja) 2020-02-14

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JP2015239782A Active JP6647847B2 (ja) 2015-12-08 2015-12-08 基材とｄｌｃ層との間に形成される中間層の成膜方法

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US (1) US10731243B2 (enExample)
JP (1) JP6647847B2 (enExample)
WO (1) WO2017099112A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109972089A (zh) * 2017-12-28 2019-07-05 核工业西南物理研究院 一种超厚含氢类金刚石涂层的制备方法
CN109023362B (zh) * 2018-07-09 2020-12-29 中国人民解放军空军勤务学院 一种液压阀杆表面抗冲击耐磨润滑复合涂层及其制备方法
DE102019206420A1 (de) * 2019-05-03 2020-11-05 Robert Bosch Gmbh Verfahren zum Beschichten einer mechanisch hochbelasteten Oberfläche eines Bauteils sowie beschichtetes Bauteil selbst
WO2022073631A1 (en) 2020-10-06 2022-04-14 Oerlikon Surface Solutions Ag, Pfäffikon Hard carbon coatings with improved adhesion strength by means of hipims and method thereof
WO2022255179A1 (ja) * 2021-06-04 2022-12-08 リケンテクノス株式会社 複合膜の製造方法、及び有機無機ハイブリッド膜の製造方法
CN114196914B (zh) * 2021-12-14 2022-09-02 中国科学院兰州化学物理研究所 一种碳化物高熵陶瓷材料、碳化物陶瓷层及其制备方法和应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046265A (ja) * 1990-04-24 1992-01-10 Toyota Central Res & Dev Lab Inc 鉄系合金基体への固体潤滑被膜の形成方法および固体潤滑被膜をもつ摺動部材
JP2004137541A (ja) * 2002-10-17 2004-05-13 Tigold Co Ltd Ｄｌｃ傾斜構造硬質被膜及びその製造方法
JP5720996B2 (ja) * 2010-03-29 2015-05-20 日立金属株式会社 皮膜密着性に優れた被覆部材およびその製造方法
EP2924142B1 (en) * 2012-05-15 2016-11-16 ZhongAo HuiCheng Technology Co. Ltd. A nano-multilayer film
JP6533374B2 (ja) 2013-11-06 2019-06-19 Ｄｏｗａサーモテック株式会社 Ｄｌｃ皮膜の成膜方法
CN105705675B (zh) * 2013-11-06 2017-12-01 同和热处理技术株式会社 基材与dlc膜之间形成的中间层的形成方法、dlc膜形成方法、以及基材与dlc膜之间形成的中间层

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