WO2017099112A1 - 基材とｄｌｃ層との間に形成される中間層およびその成膜方法 - Google Patents

基材とｄｌｃ層との間に形成される中間層およびその成膜方法 Download PDF

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WO2017099112A1
WO2017099112A1 PCT/JP2016/086338 JP2016086338W WO2017099112A1 WO 2017099112 A1 WO2017099112 A1 WO 2017099112A1 JP 2016086338 W JP2016086338 W JP 2016086338W WO 2017099112 A1 WO2017099112 A1 WO 2017099112A1
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layer
tic
dlc
film
intermediate layer
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French (fr)
Japanese (ja)
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裕樹 田代
松岡　宏之
渉 榊原
惣一朗 野上
智 羽深
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Dowa Thermotech Co Ltd
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Dowa Thermotech Co Ltd
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    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
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    • C23C14/0021—Reactive sputtering or evaporation
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    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties

Definitions

  • the present invention relates to an intermediate layer formed between a base material and a DLC (Diamond-Like Carbon) layer.
  • the “DLC film” refers to a film comprising an intermediate layer formed on the surface of a substrate and a DLC layer formed on the surface of the intermediate layer.
  • the DLC film is increasingly applied to machine parts such as automobile parts because of its high hardness, low friction, and low aggressiveness to the mating material.
  • the DLC film since the DLC film has a large internal stress, it is easily peeled off from the substrate. For this reason, conventionally, interface control such as forming an intermediate layer between the base material and the DLC layer is performed to ensure adhesion between the base material and the DLC film.
  • Patent Document 1 describes a method of forming an intermediate layer composed of a Ti layer and a TiC layer between a base material and a DLC layer.
  • middle layer is formed in the base-material surface using the PVD method which can be formed into a film at low temperature.
  • the DLC film covering member obtained by the manufacturing method of Patent Document 1 can be expected to improve the adhesion of the DLC layer as seen in the Rockwell indentation test, when the DLC film covering member is slid at a high load, the DLC film covering member Peeling occurred at the interface with the DLC layer, and there was a risk of seizure between the member from which the DLC film was peeled off and the counterpart member. For this reason, improvement in the seizure resistance of the DLC film-coated member during high-load sliding has been desired.
  • the present invention has been made in view of the above circumstances, and an object thereof is to suppress peeling at the interface between the intermediate layer and the DLC layer during high-load sliding and to improve the seizure resistance of the DLC film-coated member. To do.
  • the present invention for solving the above problems is an intermediate layer formed between a base material and a DLC layer, comprising a Ti layer and a TiC layer formed on the surface of the Ti layer, wherein the Ti layer
  • the carbon content of the entire layer including the TiC layer is 53 at% or more and 77 at% or less.
  • Another aspect of the present invention is a method for forming an intermediate layer formed between a base material and a DLC layer using a sputtering method, wherein the Ti layer forms a Ti layer on the surface of the base material.
  • a film forming process and a TiC layer film forming process for forming a TiC layer on the surface of the Ti layer, and in the TiC layer film forming process, argon gas and acetylene gas are supplied into the chamber into which the substrate is carried.
  • the TiC layer is formed by setting the flow rate ratio of the argon gas and the acetylene gas within a range of 93.5: 6.5 to 83:17.
  • peeling at the interface between the intermediate layer and the DLC layer during high-load sliding can be suppressed, and the seizure resistance of the DLC film-coated member can be improved.
  • the DLC film covering member 1 has a DLC film 3 formed on the surface of a base material 2.
  • the DLC film 3 includes an intermediate layer 4 formed on the surface of the substrate and a DLC layer 5 formed on the surface of the intermediate layer 4.
  • the intermediate layer 4 in this embodiment includes a Ti layer 4a formed on the surface of the substrate 2 and a TiC layer 4b formed on the surface of the Ti layer 4a.
  • middle layer containing Ti layer 4a and TiC layer 4b is 53 at% or more and 77 at% or less.
  • the intermediate layer 4 has such a carbon content, it becomes possible to improve the seizure resistance of the DLC film-covered member 1 during high-load sliding.
  • the carbon content of the intermediate layer 4 is less than 53 at%, the peak of the Raman spectrum by the spectroscopic analysis described later is not seen in the layer of the TiC layer 4b, and thus does not have carbon having a structure like DLC. it is conceivable that. For this reason, it is considered that the adhesiveness is lowered due to the structural difference between the TiC layer 4b and the DLC layer 5.
  • the carbon content of the intermediate layer 4 exceeds 77 at%, the layer structure of the TiC layer 4b becomes granular, the strength of the TiC layer becomes low, or the adhesion when the Ti layer and the TiC layer slide at high loads.
  • the seizure resistance decreases due to the lowering of.
  • a more preferable lower limit of the carbon content of the intermediate layer 4 is 55 at%.
  • the upper limit of the more preferable carbon content of the intermediate layer 4 is 75 at%.
  • the TiC layer 4b is a layer containing titanium and carbon
  • elements other than titanium and carbon may be inevitably included as the balance.
  • the Ti layer 4a may inevitably contain a trace amount of carbon or the like, but this inevitably mixed element may be ignored in terms of seizure resistance during high-load sliding. .
  • the intermediate layer 4 is formed using an unbalanced magnetron sputtering (so-called UBM sputtering) method which is a kind of sputtering method.
  • UBM sputtering unbalanced magnetron sputtering
  • a UBM sputtering apparatus capable of performing the film forming process for the intermediate layer 4 and the DLC layer 5 in the same chamber is used. Since the UBM sputtering apparatus is well known, description of the apparatus structure and the like is omitted in this specification.
  • the film-forming method of the DLC layer 5 is not specifically limited, In this embodiment, plasma CVD method is used.
  • the base material 2 made of an iron-based material such as SCM415, SUS310, SKD11 is carried into the chamber of the UBM sputtering apparatus. Subsequently, the inside of the chamber is evacuated and the pressure is reduced to about 2.6 ⁇ 10 ⁇ 3 Pa, for example. Thereafter, the heater temperature is set to 700 ° C., the base material 2 is heated to about 180 ° C., and argon (Ar) gas is introduced. Then, the substrate 2 is heated by the tungsten filament, and the output of the bias pulse power supply is adjusted, and a bias voltage of ⁇ 300 V or more and ⁇ 400 V or less is applied to the substrate 2. Thereby, the argon bombardment process of the base material 2 is performed, and the base material surface is cleaned.
  • the heater temperature is set to 700 ° C.
  • the base material 2 is heated to about 180 ° C.
  • argon (Ar) gas is introduced.
  • the substrate 2 is heated by the tungsten filament, and the output of
  • the flow rate of the argon gas supplied into the chamber is adjusted, and the pressure in the chamber (hereinafter referred to as “film formation pressure”) is adjusted within a range of 0.1 Pa to 1.0 Pa, for example.
  • the output of the bias pulse power supply is adjusted, and a bias voltage of ⁇ 100 V or more and ⁇ 500 V or less is applied to the substrate 2.
  • the argon gas converted into plasma collides with the Ti target disposed in the chamber, and Ti ejected from the surface of the Ti target travels toward the substrate 2.
  • the Ti layer 4a is formed on the substrate surface.
  • Such a film forming process is performed for a predetermined time, and the Ti layer forming process is completed.
  • the deposition pressure and bias voltage in the Ti layer deposition step are constant during the deposition process.
  • the thickness of the Ti layer 4a is preferably 0.1 ⁇ m or more and 0.3 ⁇ m or less.
  • the film thickness of the Ti layer 4a is less than 0.1 ⁇ m, the soft Ti layer 4a becomes too thin, so that the DLC film 3 becomes difficult to follow the deformation of the substrate, and the adhesion between the substrate 2 and the DLC film 3 is improved. May decrease.
  • the thickness of the Ti layer 4a exceeds 0.3 ⁇ m, the proportion of the soft Ti layer 4a in the entire intermediate layer increases, and the Ti layer may be broken to reduce the seizure resistance.
  • the upper limit of the more preferable film thickness of the Ti layer 4a is 0.2 ⁇ m.
  • TiC layer deposition process After the Ti layer forming step is completed, the TiC layer 4b is formed so that the carbon content of the intermediate layer is 53 at% or more and 77 at% or less.
  • acetylene (C 2 H 2 ) gas is further supplied into the chamber to which argon gas is supplied. At this time, the supply amount of each gas is adjusted so that the flow rate ratio between the argon gas and the acetylene gas is within the range of 93.5: 6.5 to 83:17.
  • the flow rate ratio of acetylene gas is smaller than 6.5, the carbon content of the intermediate layer 4 is reduced and the adhesion is lowered.
  • the flow rate ratio of the acetylene gas is larger than 17, the TiC layer 4b grows in a granular shape because the carbon content is excessively increased. Thereby, the seizure resistance decreases.
  • the lower limit of the flow rate ratio of the acetylene gas is more preferably 9. Thereby, the adhesiveness of the base material 2 and the DLC film 3 can be improved.
  • the upper limit of the flow ratio of the acetylene gas is more preferably 12.5. Thereby, the adhesiveness of the base material 2 and the DLC film 3 can be improved.
  • the supply amount of each gas is set so that the film formation pressure in the TiC layer film formation process is within a range of, for example, 0.1 Pa or more and 1.0 Pa or less. If the film formation pressure in the TiC layer film formation step is less than 0.1 Pa, it is difficult to control the gas flow rate ratio, and the film formation rate may be slowed, resulting in a decrease in productivity. On the other hand, when the deposition pressure in the TiC layer deposition step is greater than 1.0 Pa, the mean free step is shortened and the energy of Ti particles is reduced. For this reason, the TiC layer 4b does not crystallize well, and there is a possibility that the adhesion and seizure resistance may be reduced.
  • the minimum of the preferable film-forming pressure of a TiC layer film-forming process is 0.2 Pa.
  • the upper limit of the preferable film-forming pressure of a TiC layer film-forming process is 0.5 Pa.
  • the bias voltage in the TiC layer deposition process is set to, for example, ⁇ 50 V or more and ⁇ 500 V or less. If the bias voltage in the TiC layer film forming step is smaller than ⁇ 50 V, the force for pulling ions becomes weak, and the TiC layer 4b does not crystallize well, so that the adhesion and seizure resistance may be lowered. On the other hand, if the bias voltage in the TiC layer film forming step is greater than ⁇ 500 V, arc discharge may occur during film formation and stable discharge may not be possible.
  • the deposition pressure and bias voltage in the TiC layer deposition step are constant during the deposition process. In this specification, the bias voltage having a smaller absolute value is expressed as “the bias voltage is small” as a magnitude expression when comparing the bias voltages.
  • the lower limit of the bias voltage in the TiC layer forming step is -100V.
  • the upper limit of the bias voltage in the TiC layer forming step is more preferably ⁇ 200V. Further, it is preferable that the bias voltage in the TiC layer film forming step be smaller than the bias voltage in the Ti layer film forming step.
  • the TiC layer 4b is formed on the surface of the Ti layer 4a by performing the film forming process under the above conditions. Such a film forming process is performed for a predetermined time, and the TiC layer forming process is completed.
  • the film thickness of the TiC layer 4b is preferably 0.2 ⁇ m or more and 0.4 ⁇ m or less. Since it is not preferable that the thickness of the intermediate layer 4 is too thick, the thickness of the entire intermediate layer is limited to some extent. For this reason, when the film thickness of the TiC layer 4b is less than 0.2 ⁇ m, the proportion of the relatively soft Ti layer 4a increases, and the Ti layer may be broken to reduce the seizure resistance.
  • the thickness of the TiC layer 4b exceeds 0.4 ⁇ m, the Ti layer 4a becomes relatively thin and the DLC film 3 becomes difficult to follow the deformation of the base material. Adhesion may be reduced.
  • a more preferable lower limit of the thickness of the TiC layer 4b is 0.3 ⁇ m.
  • the intermediate layer 4 including the Ti layer 4a and the TiC layer 4b is formed on the surface of the substrate 2 through the Ti layer forming step and the TiC layer forming step. Subsequently, a DLC layer 5 is formed on the surface of the intermediate layer 4.
  • the supply of the argon gas supplied into the chamber is stopped, and only the acetylene gas is supplied into the chamber.
  • the acetylene gas is adjusted so that the film forming pressure is within a range of, for example, 0.1 Pa or more and 1 Pa or less.
  • the output of the power source and the like are set as appropriate, and the DLC layer 5 is formed on the surface of the intermediate layer 4 by a plasma CVD method that is conventionally performed. Thereby, the DLC film 3 is formed on the surface of the base material 2, and the DLC film covering member 1 according to the present embodiment is obtained.
  • the DLC film-coated member 1 thus obtained has improved seizure resistance during high-load sliding because the carbon content of the intermediate layer 4 is 53 at% or more and 77 at% or less. It has become.
  • the film thickness of the DLC layer 5 is preferably 0.5 ⁇ m or more and 2.5 ⁇ m or less.
  • the thickness of the DLC layer 5 is less than 0.5 ⁇ m, the DLC layer 5 is quickly extinguished due to wear, and the seizure resistance may be reduced.
  • the film thickness of the DLC layer 5 exceeds 2.5 ⁇ m, the film stress of the DLC layer 5 increases and the adhesion may be lowered.
  • a more preferable lower limit of the film thickness of the DLC layer 5 is 1 ⁇ m. Further, the upper limit of the more preferable film thickness of the DLC layer 5 is 1.5 ⁇ m.
  • indentation hardness H IT for the DLC film 3 as measured by nano-indentation method or 10 GPa, preferably not more than 25 GPa.
  • indentation hardness H IT for the DLC film 3 is less than 10 GPa, it DLC layer 5 is likely to wear, galling resistance may be deteriorated.
  • indentation hardness H IT for the DLC film 3 is more than 25 GPa, the film stress of the DLC layer 5 is increased, the adhesion may decrease.
  • Further preferred indentation hardness H IT for the lower limit of the DLC film 3 is 20 GPa.
  • a TiC gradient layer 4c whose composition continuously changes may be formed between the Ti layer 4a and the TiC layer 4b constituting the intermediate layer 4.
  • the TiC gradient layer 4c is a layer in which the amount of titanium gradually decreases with respect to the amount of carbon from the interface with the Ti layer 4a toward the interface with the TiC layer 4b. That is, the amount of titanium is relatively larger than the amount of carbon in the vicinity of the Ti layer 4a, and the amount of titanium is relatively smaller than the amount of carbon in the vicinity of the TiC layer 4b.
  • a TiC gradient layer film formation step is provided between the Ti layer film formation step and the TiC layer film formation step. What is necessary is just to change at least any one of a voltage etc. continuously during the film-forming process.
  • the intermediate layer and the DLC layer were formed on the prepared specimen under different processing conditions, and the characteristics of each specimen were evaluated.
  • SCM415 was used as a test piece
  • UBMS707 manufactured by Kobe Steel, Ltd. was used as a UBM sputtering apparatus.
  • the test piece was carburized and quenched and tempered at 200 ° C. for 1 hour. Thereafter, the test piece was polished until the maximum surface roughness Rz was 0.4 ⁇ m or less, immersed in Solmic AP-1 manufactured by Nippon Alcohol Sales Co., Ltd., and subjected to ultrasonic cleaning for 3 minutes. After the ultrasonic cleaning, the test piece was blown with nitrogen, the test piece was dried, and the test piece was carried into the chamber of the UBM sputtering apparatus. Thereafter, the chamber was evacuated and the pressure in the chamber was reduced to 2.6 ⁇ 10 ⁇ 3 Pa.
  • the substrate was subjected to heat treatment and argon bombardment treatment under predetermined conditions. Specifically, first, the set temperature of the heater is set to 700 ° C., and the base material is heated for 30 minutes (step (a)). Thereafter, the heater is stopped and left for 5 minutes (step (b)). Thereafter, the flow rate of argon gas is set to 960 ml / min, a current of 10 A is passed through the tungsten filament, a bias voltage of ⁇ 300 V is applied to the substrate, and this state is maintained for 1 minute (step (c)). Next, the application of the current to the tungsten filament and the bias voltage to the substrate is stopped and left for 1 minute (step (d)). Thereafter, the step (c) is performed again.
  • steps (c) to (d) are repeated five times.
  • a current of 10 A is passed through the tungsten filament and a bias voltage of ⁇ 400 V is applied to the substrate, and this state is maintained for 1 minute (step (e)).
  • step (e) the application of the current to the tungsten filament and the bias voltage to the substrate is stopped and left for 1 minute (step (f)).
  • step (e) is performed again. In this way, the steps (e) to (f) were repeated 10 times to clean the surface of the substrate.
  • Ti layer deposition process After the completion of the argon bombardment treatment, the pressure in the chamber was adjusted to 0.4 Pa by adjusting the flow rate of the argon gas. Thereafter, the bias voltage applied to the substrate was changed to ⁇ 200 V, and the output of the pulse power supply for sputtering was set to 6 kW. Thereby, argon gas is turned into plasma and sputtering of the Ti target is started. This state was maintained for 15 minutes, and a 0.1 ⁇ m Ti layer was formed on the surface of the substrate.
  • TiC layer deposition process (TiC layer deposition process) Subsequently, acetylene gas was introduced into the chamber, and the bias voltage applied to the substrate was changed to ⁇ 100V. At this time, the flow rate of argon gas was also adjusted so that the pressure in the chamber was maintained at 0.4 Pa. By introducing acetylene gas, a carbon source is supplied to the base material, and deposition of the TiC layer is started. This state was maintained for 105 minutes to form a 0.45 ⁇ m TiC layer on the surface of the Ti layer. In this embodiment, a TiC layer is formed on each test piece by changing the flow rate ratio of argon gas and acetylene gas constituting the film forming gas in the TiC layer forming process. The conditions of the flow rate ratio are as shown in Table 2 below.
  • a Falex test and a Rockwell indentation test were performed on each test piece obtained through the above steps, and the seizure resistance of each test piece and the adhesion of the DLC film were evaluated.
  • each test piece is indented with an initial test force of 98.07 N and a total test force of 1471 N. Formed. Then, the state of peeling of the DLC film around the indentation was observed with a metal microscope, and the adhesion was evaluated by the HF value.
  • Table 3 shows the results of the seizure load of each test piece measured in the Falex test and the adhesion evaluation result of each test piece by the Rockwell indentation test.
  • the percentage notation of the acetylene flow rate ratio indicates the ratio of the flow rate of the acetylene gas to the total flow rate of the film forming gas when the total flow rate of the film forming gas composed of argon gas and acetylene gas is 100%. ing.
  • the seizure load when the acetylene flow ratio in the TiC layer film forming process is 7.5% or more and 15% or less is greater than the seizure load when the acetylene flow ratio is 5% or 20%.
  • the seizure resistance of the DLC film-coated member can be improved by setting the acetylene flow rate ratio to about 6.5% to 17% in the TiC film forming step.
  • the seizure resistance can be further improved as compared with the case where the acetylene flow ratio is 7.5%.
  • XRD measurement Using RiNT2000 manufactured by Rigaku Corporation, XRD measurement was performed using a Cu tube on the surface of the test piece at the stage where the TiC layer was formed. The conditions for XRD measurement were as follows, and the full width at half maximum (FWHM) and strength of the TiC peak on the (111) plane (hereinafter referred to as TiC (111) peak) were evaluated. The results are shown in Table 4 below.
  • X-ray output 40 kV, 20 mA Scan speed: 1.0 sec
  • Step width 0.05 ° Scan axis: 2 ⁇ / ⁇ Scan range: 20 ° -80 °
  • the TiC (111) peak had the narrowest half width and the highest peak intensity when the acetylene flow ratio was 10%.
  • the TiC (111) peak suddenly broadened, and the TiC (111) peak intensity when the acetylene flow rate ratio was 20% was extremely small compared to the other cases.
  • the reason for such a result is considered to be that when the acetylene flow ratio becomes too large, the TiC layer does not grow in a columnar shape and the crystallinity deteriorates.
  • Raman spectroscopic analysis was performed on the test piece at the stage where the TiC layer was formed using a microscopic Raman spectroscopic analyzer.
  • the analysis conditions are as follows. Exposure time: 30 sec Excitation wavelength: 532.22 nm Grating: 600 l / mm Slit width: ⁇ 50 ⁇ m Aperture: ⁇ 40 ⁇ m Laser intensity: 3.8 mW
  • Peak separation was performed on the D peak and G peak of the Raman spectrum obtained by spectroscopic analysis, and the intensity ratio (ID / IG ratio) between the peak intensity ID of the D band and the peak intensity IG of the G band was determined.
  • the results are shown in Table 5 below.
  • the ID / IG ratio of the Raman spectrum was maximized when the acetylene flow ratio was 15%.
  • no Raman spectrum peak was observed when the acetylene flow rate ratio was 5%.
  • the reason why the seizure resistance and the adhesion are low is that the TiC layer has less carbon having a structure like DLC, and the structure of the TiC layer and the DLC layer. This is thought to be due to the large change in
  • a test piece is introduced into an EPMA sample chamber, an acceleration voltage is set to 15 kV, an irradiation current is set to 1.0 ⁇ 10 ⁇ 7 A, and an electron beam is irradiated onto the surface of the test piece on which the TiC layer is formed. .
  • the wavelength and intensity of characteristic X-rays generated from the test piece are measured with an X-ray spectrometer. Based on the peak position of the wavelength, the element included in the measurement range is examined, and the component composition is calculated from the peak intensity using the ZAF correction method.
  • the component composition measured by the above method is a component composition affected by the base material, not the component composition of the intermediate layer alone. For this reason, in order to calculate the carbon content of the intermediate layer, it is necessary to subtract the carbon content derived from the base material.
  • the elemental analysis of the test piece before forming the intermediate layer was performed by the same method as the elemental analysis of the TiC layer described above.
  • the component composition of the test piece before forming the intermediate layer is as shown in Table 6 below.
  • the carbon content [at%] of the intermediate layer calculated based on the component composition shown in Table 6 is as shown in Table 7 below.
  • “Base-derived C” in Table 7 is ⁇ (C [at%] in Table 6 / Fe [at%] in Table 6) ⁇ Fe [at%] in the EPMA analysis results in Table 7 ⁇ . Calculated.
  • the carbon content of the intermediate layer should be 53 at% or more and 77 at% or less in order to obtain sufficient seizure resistance and adhesion.
  • the film forming gas used in the TiC layer film forming process was changed from acetylene gas to methane gas, and the film forming process of the TiC layer was performed, and the component composition of the intermediate layer at this time was analyzed. Further, the surface of the TiC layer formed by using the methane gas to form a DLC layer was measured indentation hardness H IT for DLC film-coated member. The results are shown in Table 8 below.
  • the processing conditions other than the film forming gas in the TiC layer forming process are the same as those in the third embodiment.
  • the indentation hardness H IT for DLC film-coated member of the case of forming a TiC layer in methane was comparable to the hardness of the case of forming a TiC layer with acetylene gas. For this reason, the hardness as the DLC film covering member can be sufficiently ensured even when methane gas is used.
  • the carbon content of the intermediate layer was about 35%.
  • the seizure resistance decreases as can be seen from the results of Tables 3 and 7. Therefore, it is preferable to use acetylene gas as the film forming gas in the TiC layer forming process.
  • the present invention can be applied to manufacture of a DLC film-coated member.

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