JP2020155582A - 半導体装置及び半導体回路 - Google Patents
半導体装置及び半導体回路 Download PDFInfo
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Abstract
Description
第1の実施形態の半導体装置は、第1の面と、第1の面と対向する第2の面を有する半導体層であって、第1導電形の第1の半導体領域と、第1の半導体領域と第1の面との間に設けられた第2導電形の第2の半導体領域と、第2の半導体領域と第1の面との間に設けられ、第2の半導体領域よりも第2導電形不純物濃度の高い第2導電形の第3の半導体領域と、第3の半導体領域と第1の面との間に設けられた第1導電形の第4の半導体領域と、第4の半導体領域と第1の面との間に設けられた第2導電形の第5の半導体領域と、第1の面の側に設けられ、第2の面からの第1の距離が、第2の面から第4の半導体領域までの距離よりも小さい第1のトレンチと、第1の面の側に設けられ、第2の面からの第2の距離が、第2の面から第4の半導体領域までの距離よりも小さい第2のトレンチと、を有する半導体層と、第1のトレンチの中に設けられた第1のゲート電極と、第1のゲート電極と第4の半導体領域との間、第1のゲート電極と第5の半導体領域との間に設けられ、第5の半導体領域に接する第1のゲート絶縁膜と、第2のトレンチの中に設けられた第2のゲート電極と、第2のゲート電極と第3の半導体領域との間、第2のゲート電極と第4の半導体領域との間に設けられた第2のゲート絶縁膜と、半導体層の第1の面の側に設けられ、第5の半導体領域に電気的に接続された第1の電極と、半導体層の第2の面の側に設けられ、第1の半導体領域に電気的に接続された第2の電極と、半導体層の第1の面の側に設けられ、第1のゲート電極と電気的に接続され、第1のゲート電圧が印加される第1のゲート電極パッドと、半導体層の第1の面の側に設けられ、第2のゲート電極と電気的に接続され、第2のゲート電圧が印加される第2のゲート電極パッドと、を備える。
第1の絶縁層61は、第1のゲート電極51とエミッタ電極12との間を電気的に分離する。第1の絶縁層61は、例えば、酸化シリコンである。
第2の実施形態の半導体装置は、第1のゲート電極と第3の半導体領域との間の第1のゲート絶縁膜の厚さが、第2のゲート電極と第3の半導体領域との間の第2のゲート絶縁膜の厚さよりも厚い点で、第1の実施形態と異なっている。以下、第1の実施形態と重複する内容については、記述を一部省略する。
第3の実施形態の半導体装置は、第1のトレンチとの間に第2のトレンチを挟み、第1の面の側に設けられ、第2の面からの第3の距離が、第2の面から第4の半導体領域までの距離よりも小さい第3のトレンチを有し、第3のトレンチの中に設けられ、第2のゲート電極パッドと電気的に接続された第3のゲート電極を有し、第2のトレンチと第3のトレンチに挟まれる第3の半導体領域は、第1の面に接する点で、第2の実施形態と異なっている。以下、第1の実施形態及び第2の実施形態と重複する内容については、記述を一部省略する。
第4の実施形態の半導体装置は、第1の距離が第2の距離よりも大きい点で、第1の実施形態と異なっている。以下、第1の実施形態と重複する内容については、記述を一部省略する。
第5の実施形態の半導体装置は、第2のゲート電極から第1の電極までの距離が、第1のゲート電極から第1の電極までの距離より大きい点で、第1の実施形態と異なっている。以下、第1の実施形態と重複する内容については、記述を一部省略する。
第6の実施形態の半導体装置は、第2のゲート電極と第4の半導体領域との間の第2のゲート絶縁膜の厚さは、第1のゲート電極と第4の半導体領域との間の第1のゲート絶縁膜の厚さより厚い点で、第1の実施形態及び第5の実施形態と異なっている。以下、第1の実施形態及び第5の実施形態と重複する内容については、記述を一部省略する。
第7の実施形態の半導体装置は、第2のトレンチの中に、第2のゲート電極と第1の電極との間に設けられ、第2のゲート電極と離間し、第1の電極に電気的に接続される第1の導電層を、備える点で、第1の実施形態及び第5の実施形態と異なっている。以下、第1の実施形態及び第5の実施形態と重複する内容については、記述を一部省略する。
第8の実施形態の半導体装置は、第1のトレンチの中に、第1のゲート電極と第2の面との間に設けられ、第1のゲート電極と離間し、第1の電極に電気的に接続される第2の導電層を、更に備える点で、第1の実施形態及び第7の実施形態と異なっている。以下、第1の実施形態及び第7の実施形態と重複する内容については、記述を一部省略する。
12 エミッタ電極(第1の電極)
14 コレクタ電極(第2の電極)
21 第1のゲートトレンチ(第1のトレンチ)
22 第2のゲートトレンチ(第2のトレンチ、第3のトレンチ)
28 コレクタ領域(第1の半導体領域)
32 ドリフト領域(第2の半導体領域)
33 バリア領域(第3の半導体領域)
34 ベース領域(第4の半導体領域)
36 エミッタ領域(第5の半導体領域)
41 第1のゲート絶縁膜
42 第2のゲート絶縁膜
51 第1のゲート電極
52 第2のゲート電極、第3のゲート電極
61 第1の絶縁層
62 第2の絶縁層
71 上部導電層(第1の導電層)
72 下部導電層(第2の導電層)
100 IGBT(半導体装置)
101 第1のゲート電極パッド
102 第2のゲート電極パッド
150 ゲートドライバ回路(制御回路)
200 IGBT(半導体装置)
300 IGBT(半導体装置)
400 IGBT(半導体装置)
500 IGBT(半導体装置)
600 IGBT(半導体装置)
700 IGBT(半導体装置)
800 IGBT(半導体装置)
P1 第1の面
P2 第2の面
d1 第1の距離
d2 第2の距離
d7 第3の距離
Claims (21)
- 第1の面と、前記第1の面と対向する第2の面を有する半導体層であって、
第1導電形の第1の半導体領域と、
前記第1の半導体領域と前記第1の面との間に設けられた第2導電形の第2の半導体領域と、
前記第2の半導体領域と前記第1の面との間に設けられ、前記第2の半導体領域よりも第2導電形不純物濃度の高い第2導電形の第3の半導体領域と、
前記第3の半導体領域と前記第1の面との間に設けられた第1導電形の第4の半導体領域と、
前記第4の半導体領域と前記第1の面との間に設けられた第2導電形の第5の半導体領域と、
前記第1の面の側に設けられ、前記第2の面からの第1の距離が、前記第2の面から前記第4の半導体領域までの距離よりも小さい第1のトレンチと、
前記第1の面の側に設けられ、前記第2の面からの第2の距離が、前記第2の面から前記第4の半導体領域までの距離よりも小さい第2のトレンチと、
を有する半導体層と、
前記第1のトレンチの中に設けられた第1のゲート電極と、
前記第1のゲート電極と前記第4の半導体領域との間、前記第1のゲート電極と前記第5の半導体領域との間に設けられ、前記第5の半導体領域に接する第1のゲート絶縁膜と、
前記第2のトレンチの中に設けられた第2のゲート電極と、
前記第2のゲート電極と前記第3の半導体領域との間、前記第2のゲート電極と前記第4の半導体領域との間に設けられた第2のゲート絶縁膜と、
前記半導体層の前記第1の面の側に設けられ、前記第5の半導体領域に電気的に接続された第1の電極と、
前記半導体層の前記第2の面の側に設けられ、前記第1の半導体領域に電気的に接続された第2の電極と、
前記半導体層の前記第1の面の側に設けられ、前記第1のゲート電極と電気的に接続され、第1のゲート電圧が印加される第1のゲート電極パッドと、
前記半導体層の前記第1の面の側に設けられ、前記第2のゲート電極と電気的に接続され、第2のゲート電圧が印加される第2のゲート電極パッドと、
を備えた半導体装置。 - 前記第2のゲート絶縁膜は、前記第5の半導体領域と離間する請求項1記載の半導体装置。
- 前記第2の距離が、前記第2の面から前記第3の半導体領域の中の第2導電形不純物の最大濃度位置までの距離よりも小さい請求項1又は請求項2記載の半導体装置。
- 前記第2の面と前記第1のゲート電極との間の前記第1のゲート絶縁膜の厚さが、前記第2の面と前記第2のゲート電極との間の前記第2のゲート絶縁膜の厚さよりも厚い請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記第2の面と前記第1のゲート電極との間の前記第1のゲート絶縁膜の厚さが、前記第2の面と前記第2のゲート電極との間の前記第2のゲート絶縁膜の厚さの3倍以上である請求項4記載の半導体装置。
- 前記第2の面から前記第1のゲート電極までの距離が、前記第2の面から前記第3の半導体領域の中の第2導電形不純物の最大濃度位置までの距離よりも大きく、前記第2の面から前記第2のゲート電極までの距離が、前記第2の面から前記第3の半導体領域の中の第2導電形不純物の最大濃度位置までの距離よりも小さい請求項4又は請求項5記載の半導体装置。
- 前記第1のゲート電極と前記第3の半導体領域との間の前記第1のゲート絶縁膜の厚さが、前記第2のゲート電極と前記第3の半導体領域との間の前記第2のゲート絶縁膜の厚さよりも厚い請求項4又は請求項5記載の半導体装置。
- 前記半導体層は、前記第1のトレンチとの間に前記第2のトレンチを挟み、前記第1の面の側に設けられ、前記第2の面からの第3の距離が、前記第2の面から前記第4の半導体領域までの距離よりも小さい第3のトレンチを有し、
前記第3のトレンチの中に設けられ、前記第2のゲート電極パッドと電気的に接続された第3のゲート電極を有し、
前記第2のトレンチと前記第3のトレンチに挟まれる前記第3の半導体領域は、前記第1の面に接する請求項4ないし請求項7いずれか一項記載の半導体装置。 - 前記第1の距離が前記第2の距離よりも大きい請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記第1の距離が、前記第2の面から前記第3の半導体領域の中の第2導電形不純物の最大濃度位置までの距離よりも大きい請求項9記載の半導体装置。
- 前記第1のトレンチと前記第2のトレンチに挟まれる前記第4の半導体領域は、前記第2の半導体領域と接する請求項9又は請求項10記載の半導体装置。
- 前記第2のゲート電極から前記第1の電極までの距離が、前記第1のゲート電極から前記第1の電極までの距離より大きい請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記第1のゲート電極と前記第1の電極との間の第1の絶縁層と、
前記第2のゲート電極と前記第1の電極との間の第2の絶縁層と、を備え、
前記第2の絶縁層の前記第1の面の法線方向の厚さが、前記第1の絶縁層の前記第1の面の法線方向の厚さよりも厚い請求項12記載の半導体装置。 - 前記第2の面から前記第2の絶縁層までの距離は、前記第2の面から前記第5の半導体領域までの距離よりも小さい請求項13記載の半導体装置。
- 前記第2のゲート電極と前記第4の半導体領域との間の前記第2のゲート絶縁膜の厚さは、前記第1のゲート電極と前記第4の半導体領域との間の前記第1のゲート絶縁膜の厚さよりも厚い請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記第2のゲート電極と前記第4の半導体領域との間の前記第2のゲート絶縁膜の厚さは、前記第2のゲート電極と前記第3の半導体領域との間の前記第2のゲート絶縁膜の厚さよりも厚い請求項15記載の半導体装置。
- 前記第2のゲート電極と前記第4の半導体領域との間の前記第2のゲート絶縁膜の厚さは、前記第2のゲート電極と前記第3の半導体領域との間の前記第2のゲート絶縁膜の厚さの3倍以上である請求項16記載の半導体装置。
- 前記第2のトレンチの中に、前記第2のゲート電極と前記第1の電極との間に設けられ、前記第2のゲート電極と離間し、前記第1の電極に電気的に接続された第1の導電層を、更に備える請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記第1のトレンチの中に、前記第1のゲート電極と前記第2の面との間に設けられ、前記第1のゲート電極と離間し、前記第1の電極に電気的に接続された第2の導電層を、更に備える請求項18記載の半導体装置。
- 前記第1のゲート電圧をターンオン電圧からターンオフ電圧に変化させる前に、前記第2のゲート電圧を第1の電圧から第2の電圧に変化させ、前記第2の電圧は、第1導電形がp形の場合には負電圧であり、第1導電形がn形の場合には正電圧である請求項1ないし請求項19いずれか一項記載の半導体装置。
- 請求項1ないし請求項19いずれか一項記載の半導体装置と、
前記半導体装置を駆動し、前記第1のゲート電圧をターンオン電圧からターンオフ電圧に変化させる前に、前記第2のゲート電圧を第1の電圧から第2の電圧に変化させ、前記第2の電圧は、第1導電形がp形の場合には負電圧であり、第1導電形がn形の場合には正電圧である制御回路と、
を備えた半導体回路。
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