JP2020150114A - 配線基板及びその製造方法 - Google Patents
配線基板及びその製造方法 Download PDFInfo
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Abstract
Description
まず、本実施形態に係る配線基板の構造について説明する。図1は、本実施形態に係る配線基板を例示する図であり、図1(a)は断面図、図1(b)は図1(a)のパッド12近傍の部分拡大斜視図である。
次に、配線基板の製造方法について説明する。図2〜図5は、本実施形態に係る配線基板の製造工程を例示する図である。なお、ここでは、1つの配線基板を作製する工程の例を示すが、配線基板となる複数の部分を作製し、その後個片化して各配線基板とする工程としてもよい。なお、図2(a)〜図4(b)は図1とは上下が反転して描かれているため、図2(a)〜図4(b)の説明では図1の説明と上下の表記が反対となる。
11、13、15、17、19、21 絶縁層
11a 上面
11b、21b 下面
11x 凹部
12 パッド
13x、15x、17x、19x、21x ビアホール
14、16、18、20、22 配線層
100 支持体
101 基体
102 剥離層
103 金属層
110 犠牲層
121 柱状部
122 テーパ部
Claims (10)
- 半導体チップ搭載面、及び前記半導体チップ搭載面の反対面である外部接続面、を有する配線基板であって、
前記半導体チップ搭載面の側に半導体チップと接続されるパッドが突出し、
前記パッドは、
柱状部と、
前記柱状部の一端に連続に形成され、前記柱状部から離れるに従って横断面積が小さくなるテーパ部と、を有し、
前記パッドは、前記テーパ部が形成された側が前記半導体チップ搭載面から突出している配線基板。 - 前記柱状部は円柱状である請求項1に記載の配線基板。
- 前記テーパ部は円錐台状である請求項1又は2に記載の配線基板。
- 前記配線基板は、一方の面が前記半導体チップ搭載面となる第1絶縁層を有し、
前記パッドは、前記テーパ部が形成されていない側が前記第1絶縁層に埋設されている請求項1乃至3の何れか一項に記載の配線基板。 - 前記第1絶縁層の他方の面と接する第2絶縁層と、
前記第2絶縁層の他方の面に形成された配線パターン、及び前記配線パターンと一体に形成され、前記第2絶縁層を貫通して前記柱状部の他端と接するビア配線、を含む配線層と、を有し、
前記ビア配線は、前記配線パターンの側から前記柱状部の他端の側に近づくに従って横断面積が小さくなるテーパ状である請求項4に記載の配線基板。 - 前記第1絶縁層は、他方の面から内方に窪み、前記柱状部の他端を底面とする凹部を備え、
前記凹部の内部には、前記第2絶縁層が充填されている請求項5に記載の配線基板。 - 前記ビア配線は、前記凹部の内部に充填された前記第2絶縁層を貫通して前記柱状部の他端と接する請求項6に記載の配線基板。
- 前記第1絶縁層及び前記第2絶縁層は、感光性樹脂を主成分とする請求項5乃至7の何れか一項に記載の配線基板。
- 前記第2絶縁層の他方の面側に、前記外部接続面を備えた第3絶縁層を有し、
前記第3絶縁層は、非感光性の熱硬化性樹脂を主成分とする請求項5乃至8の何れか一項に記載の配線基板。 - 半導体チップ搭載面、及び前記半導体チップ搭載面の反対面である外部接続面、を有し、前記半導体チップ搭載面の側に半導体チップと接続されるパッドが突出した配線基板の製造方法であって、
基体上に金属層が形成された支持体を準備し、前記金属層の上面に犠牲層を形成する工程と、
前記犠牲層を貫通し前記金属層の上面を露出する開口部を形成する工程と、
前記開口部内に露出する前記金属層の上面にパッドを形成する工程と、
前記パッドよりも前記外部接続面側の層となる絶縁層及び配線層を形成する工程と、
前記基体を除去する工程と、
前記金属層をウェットエッチングで除去する工程と、
前記犠牲層を除去する工程と、を有し、
前記ウェットエッチングで除去する工程では、前記パッドの前記金属層と接していた側にサイドエッチが生じ、前記パッドは、柱状部と、前記柱状部の一端側に連続に形成され、前記柱状部から離れるに従って横断面積が小さくなるテーパ部と、を有する形状となる配線基板の製造方法。
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JP2019045783A JP7240909B2 (ja) | 2019-03-13 | 2019-03-13 | 配線基板及びその製造方法 |
US16/814,180 US11145585B2 (en) | 2019-03-13 | 2020-03-10 | Wiring board having each pad with tapered section continuously formed on columnar section |
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Citations (7)
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