JP2019087657A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2019087657A JP2019087657A JP2017215465A JP2017215465A JP2019087657A JP 2019087657 A JP2019087657 A JP 2019087657A JP 2017215465 A JP2017215465 A JP 2017215465A JP 2017215465 A JP2017215465 A JP 2017215465A JP 2019087657 A JP2019087657 A JP 2019087657A
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- Prior art keywords
- semiconductor device
- distance
- recess
- conductive member
- connection member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 188
- 229920005989 resin Polymers 0.000 claims abstract description 51
- 239000011347 resin Substances 0.000 claims abstract description 51
- 239000000945 filler Substances 0.000 claims description 18
- 239000002245 particle Substances 0.000 claims description 7
- 229910000679 solder Inorganic materials 0.000 description 51
- 238000011156 evaluation Methods 0.000 description 43
- 239000003822 epoxy resin Substances 0.000 description 16
- 229920000647 polyepoxide Polymers 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- 238000002474 experimental method Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000012360 testing method Methods 0.000 description 11
- 230000009477 glass transition Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000010949 copper Substances 0.000 description 6
- 239000002923 metal particle Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000005382 thermal cycling Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Classifications
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Abstract
Description
図面は模式的または概念的なものであり、各部分の厚さと幅との関係、部分間の大きさの比率などは、必ずしも現実のものと同一とは限らない。同じ部分を表す場合であっても、図面により互いの寸法や比率が異なって表される場合もある。
本願明細書と各図において、既出の図に関して前述したものと同様の要素には同一の符号を付して詳細な説明は適宜省略する。
図1(a)〜図1(c)は、第1実施形態に係る半導体装置を例示する模式図である。 図2は、第1実施形態に係る半導体装置を例示する模式図である。
図1(c)は、斜視図である。図1(b)は、図1(c)のA1−A2線断面図である。図1(a)及び図2は、図1(b)に示す一部PAを拡大した断面図である。図1(c)のB1−B2線断面における構成の例については、後述する。
図3は、上記の第1実験及び第2実験の結果を合わせて示している。図3の横軸は、はんだの厚さtc(μm)である。縦軸は、オン抵抗の変動ΔRon(相対値)である。オン抵抗の変動ΔRonは、熱サイクル試験の前のオン抵抗R1と、熱サイクル試験の後のオン抵抗R2と、の差のオン抵抗R1に対する比((R2−R1)/R1))である。
図4(a)は、実施形態に係る半導体装置110に対応する。半導体装置110においては、第1部分p1に凹凸形状(第1凹部21d及び第1凸部21p)が設けられる。図4(b)は、参考例の半導体装置109に対応する。半導体装置109においては、第1導電部材21の第1部分p1に上記の凹凸形状が設けられない。
図5は、第1実施形態に係る半導体装置を例示する模式的断面図である。
図5は、図1(c)のB1−B2線断面の一部を拡大して示す。
図6(a)に示すように、半導体装置111においては、第1部分p1の裏面(第1面21fと反対側の面)に凹凸形状が設けられている。第1部分p1の裏面の凹凸形状は、第1部分p1の第1面21fの凹凸形状に沿っている。半導体装置111におけるこれ以外の構成は、半導体装置110の構成と同様である。
図7は、図1(c)のA1−A2線に対応する断面の拡大図である。
図8(a)に示すように、半導体装置121においては、第3部分p2の裏面(第2面22fと反対側の面)に凹凸形状が設けられている。裏面の凹凸形状は、第2面22fの凹凸形状に沿っている。半導体装置121におけるこれ以外の構成は、半導体装置120の構成と同様である。
第2実施形態は、製造方法に係る。以下、第1導電部材21の製造方法、及び、半導体装置の製造方法の例について説明する。
これらの図は、第1導電部材21(半導体装置110の一部の部品)の製造方法を例示している。
図10(a)〜図10(e)は、第2実施形態に係る半導体装置の製造方法を例示する模式的断面図である。
図10(a)に示すように、リードフレーム28を準備する。リードフレーム28は、第2導電部材22となる部分、及び、第3導電部材23となる部分を含む。
図11は、第3実施形態に係る半導体装置を例示する模式的断面図である。
図11は、図1(a)に対応する部分の断面図である。
図11に示すように、本実施形態に係る半導体装置130においては、第1接続部材41は、粒41pを含む。粒41pは、例えば、金属ボールである。粒41pは、例えばNiを含むボールである。半導体装置130におけるこれ以外の構成は、例えば、第1実施形態に係る半導体装置(例えば半導体装置110など)と同様である。
図12は、図1(a)に対応する部分の断面図である。
図12に示すように、本実施形態に係る半導体装置131においても、第1接続部材41は、粒41pを含む。半導体装置131においては、第1部分p1に凹凸形状が設けられていない。半導体装置131におけるこれ以外の構成は、半導体装置130と同様である。
図13は、半導体装置131に対応する。図13に示すように、粒41pにより、第1部分p1及び第3部分p3の間の距離が制御される。この例では、第1部分p1と第3部分p3との間の距離は、約20μm〜約30mである。
図14には、第1〜第7試料SP01〜SP07の評価結果が示されている。
第1試料SP01においては、エポキシ樹脂M04が用いられ、フィラー濃度Cfは、88.0wt%(重量%)である。第2試料SP02においては、エポキシ樹脂M02が用いられ、フィラー濃度Cfは、87.5wt%である。第3試料SP03においては、エポキシ樹脂M01が用いられ、フィラー濃度Cfは、85.0wt%である。第4試料SP04においては、エポキシ樹脂M03が用いられ、フィラー濃度Cfは、84.0wt%である。第5試料SP05においては、エポキシ樹脂M05が用いられ、フィラー濃度Cfは、84.0wt%である。第6試料SP06においては、エポキシ樹脂M06が用いられ、フィラー濃度Cfは、80.0wt%である。第7試料SP07においては、エポキシ樹脂M07が用いられ、フィラー濃度Cfは、77.0wt%である。
図15は、第2実験の結果を示す。第2実験においては、樹脂部30のエポキシ樹脂の材料が変更される。エポキシ樹脂の材料の変更により、ガラス転移温度Tgが変更される。第2実験において、フィラー濃度Cfは、80.0wt%で一定である。第2実験においても、半導体装置において、第1部分p1及び第3部分p3に凹凸形状は設けられていない。
Claims (12)
- 半導体チップと、
第1部分及び第2部分を含む第1導電部材であって、前記第2部分は前記半導体チップと電気的に接続され、前記半導体チップから前記第2部分に向かう方向は第1方向に沿い、前記第2部分から前記第1部分に向かう方向は、前記第1方向と交差する第2方向に沿う、前記第1導電部材と、
第3部分を含む第2導電部材と、
前記第1部分と前記第3部分との間に設けられた導電性の第1接続部材と、
前記第1部分、前記第3部分及び前記第1接続部材の周りに設けられた第1部分領域を含む樹脂部と、
を備え、
前記第1部分は、前記第1接続部材に対向する第1面を有し、
前記第1面は、凹部及び凸部を含み、
前記凹部は、第1底部、第1距離、及び、第2距離の少なくともいずれかを有し、
前記第1底部の少なくとも一部は前記第1方向に対して垂直であり、
前記第1距離は、前記凹部と前記第2部分との間の距離であり、前記第1距離は、前記凸部と前記第2部分との間の距離よりも長く、
前記第2距離は、前記凹部と前記第3部分との間の前記第1方向に沿った距離であり、前記第2距離は、前記第2部分から前記第1部分への向きにおいて増大する、半導体装置。 - 前記凸部は、前記第1部分の両端部から内側に離れて設けられている、請求項1記載の半導体装置。
- 半導体チップと、
第1部分及び第2部分を含む第1導電部材であって、前記第2部分は前記半導体チップと電気的に接続され、前記半導体チップから前記第2部分に向かう方向は第1方向に沿い、前記第2部分から前記第1部分に向かう方向は、前記第1方向と交差する第2方向に沿い、前記第1導電部材と、
第3部分及び第4部分を含む第2導電部材と、
前記第1部分と前記第3部分との間に設けられた導電性の第1接続部材と、
前記第1部分、前記第3部分及び前記第1接続部材の周りに設けられた第1部分領域を含む樹脂部と、
を備え、
前記第4部分の少なくとも一部は、前記樹脂部に覆われず、
前記第3部分から前記第4部分に向かう方向は、前記第1方向と交差する第3方向に沿い、
前記第3部分は、前記第1接続部材に対向する第2面を有し、
前記第2面は、凹部及び凸部を含み、
前記凹部は、第2底部、第3距離、及び、第4距離の少なくともいずれかを有し、
前記第2底部の少なくとも一部は前記第1方向に対して垂直であり、
前記第3距離は、前記凹部と前記第4部分との間の距離であり、前記第3距離は、前記凸部と前記第4部分との間の距離よりも長く、
前記第4距離は、前記凹部と前記第1部分との間の前記第1方向に沿った距離であり、前記第4距離は、前記第4部分から前記第3部分への向きにおいて増大する、半導体装置。 - 前記凸部は、前記第3部分の両端部から内側に離れて設けられている、請求項3記載の半導体装置。
- 前記凸部は、複数設けられ、前記凹部は、前記複数の凸部の間に位置した、請求項1〜4のいずれか1つに記載の半導体装置。
- 前記凹部の深さは、10μmを超える、請求項1〜5のいずれか1つに記載の半導体装置。
- 前記凹部の深さは、60μm以下である、請求項6記載の半導体装置。
- 導電性の第2接続部材をさらに備え、
前記第2接続部材は、前記半導体チップと前記第2部分との間に位置し、前記半導体チップと前記第2部分とを電気的に接続し、
前記樹脂部は、前記第2部分及び前記第2接続部材の周りに設けられた第2部分領域をさらに含む、請求項1〜7のいずれか1つに記載の半導体装置。 - 第5部分を含む第3導電部材と、
前記第5部分と前記半導体チップとの間に設けられた導電性の第3接続部材と、
をさらに備え、
前記樹脂部は、前記第5部分及び前記第3接続部材の周りに設けられた第3部分領域をさらに含む、請求項1〜8のいずれか1つに記載の半導体装置。 - 前記第3導電部材は、第6部分をさらに含み、
前記第6部分の少なくとも一部は、前記樹脂部に覆われない、請求項9記載の半導体装置。 - 前記第1接続部は、粒を含み、前記粒のサイズは、10μmを超え20μm以下である、請求項1〜10のいずれか1つに記載の半導体装置。
- 前記樹脂部は、複数のフィラーを含み、前記複数のフィラーの前記樹脂部における濃度は、76重量%以上84重量%以下である、請求項1〜11のいずれか1つに記載の半導体装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017215465A JP7043225B2 (ja) | 2017-11-08 | 2017-11-08 | 半導体装置 |
CN202310692264.7A CN116705746A (zh) | 2017-11-08 | 2018-02-28 | 半导体装置 |
CN201810165539.0A CN109755205B (zh) | 2017-11-08 | 2018-02-28 | 半导体装置 |
US15/914,628 US11037863B2 (en) | 2017-11-08 | 2018-03-07 | Semiconductor device |
EP18160683.1A EP3483931A1 (en) | 2017-11-08 | 2018-03-08 | Semiconductor device |
US17/316,157 US11735505B2 (en) | 2017-11-08 | 2021-05-10 | Semiconductor device |
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WO2023181957A1 (ja) * | 2022-03-24 | 2023-09-28 | ローム株式会社 | 半導体装置 |
US11776884B2 (en) | 2020-09-08 | 2023-10-03 | Kabushiki Kaisha Toshiba | Porous body on the side surface of a connector mounted to semiconductor device |
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JP6364556B1 (ja) * | 2017-02-20 | 2018-07-25 | 新電元工業株式会社 | 電子装置 |
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EP3483931A1 (en) | 2019-05-15 |
CN109755205B (zh) | 2023-07-04 |
JP7043225B2 (ja) | 2022-03-29 |
CN116705746A (zh) | 2023-09-05 |
CN109755205A (zh) | 2019-05-14 |
JP7340056B2 (ja) | 2023-09-06 |
JP2022066555A (ja) | 2022-04-28 |
US20210265243A1 (en) | 2021-08-26 |
US11037863B2 (en) | 2021-06-15 |
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US20190139866A1 (en) | 2019-05-09 |
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