JP2017103423A - 電子部品および電子部品の製造方法 - Google Patents
電子部品および電子部品の製造方法 Download PDFInfo
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- JP2017103423A JP2017103423A JP2015237751A JP2015237751A JP2017103423A JP 2017103423 A JP2017103423 A JP 2017103423A JP 2015237751 A JP2015237751 A JP 2015237751A JP 2015237751 A JP2015237751 A JP 2015237751A JP 2017103423 A JP2017103423 A JP 2017103423A
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- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 239000002184 metal Substances 0.000 claims abstract description 445
- 229910052751 metal Inorganic materials 0.000 claims abstract description 445
- 239000000843 powder Substances 0.000 claims abstract description 144
- 239000011347 resin Substances 0.000 claims abstract description 141
- 229920005989 resin Polymers 0.000 claims abstract description 141
- 239000000463 material Substances 0.000 claims abstract description 111
- 239000002131 composite material Substances 0.000 claims abstract description 109
- 239000013078 crystal Substances 0.000 claims abstract description 32
- 239000002245 particle Substances 0.000 claims description 47
- 238000007772 electroless plating Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 33
- 239000000956 alloy Substances 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 24
- 238000000227 grinding Methods 0.000 claims description 16
- 239000003054 catalyst Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 9
- 238000006467 substitution reaction Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 304
- 239000004020 conductor Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 18
- 238000007747 plating Methods 0.000 description 12
- 239000012212 insulator Substances 0.000 description 9
- 238000000605 extraction Methods 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 5
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- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
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- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
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- 229910052737 gold Inorganic materials 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
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- 238000000790 scattering method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
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- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
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- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
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- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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Abstract
【解決手段】電子部品は、樹脂材料および金属粉のコンポジット材料からなるコンポジット体と、コンポジット体の外面上に配置された金属膜とを有する。金属膜が、コンポジット体の樹脂材料および金属粉に接触しており、樹脂材料と接する金属膜の結晶における平均粒径は、金属粉と接する金属膜の結晶における平均粒径に対し、60%以上120%以下である。
【選択図】図2
Description
樹脂材料および金属粉のコンポジット材料からなるコンポジット体と、
前記コンポジット体の外面上に配置された金属膜と
を備え、
前記金属膜が、前記コンポジット体の前記樹脂材料および前記金属粉に接触しており、
前記樹脂材料と接する前記金属膜の結晶における平均粒径は、前記金属粉と接する前記金属膜の結晶における平均粒径に対し、60%以上120%以下である。
前記コンポジット体に埋め込まれた内部電極を備え、
前記金属膜が、前記内部電極と接触している。
前記コンポジット体の外面は、主面を有し、
前記主面において、前記樹脂材料から前記金属粉が露出するとともに、前記金属膜が配置されている。
前記金属膜が配置されていない前記主面上に配置された樹脂膜を有し、
前記樹脂膜は、前記樹脂材料から露出する前記金属粉を覆う。
前記樹脂材料と前記金属膜との界面においては、Pdが存在しないが、
前記金属粉と前記金属膜との界面においては、Pdが存在する。
樹脂材料および金属粉のコンポジット材料からなるコンポジット体の一部を研削して、前記コンポジット体の研削面から金属粉を露出させる研削工程と、
前記コンポジット体の研削面に無電解めっきを用いて金属膜を形成する金属膜形成工程と
を備える。
前記金属粉は、Feを含む金属又は合金からなり、
前記金属膜は、Cuを含む金属又は合金からなる。
前記研削工程後、前記コンポジット体の研削面の一部の領域上に樹脂膜を形成する樹脂膜形成工程を有し、
前記金属膜形成工程では、前記樹脂膜をマスクとして、金属膜を形成する。
10 基板
21 第1コイル導体
22 第2コイル導体
26a,26b 内部電極
30 絶縁体
40 コンポジット体
41 樹脂材料
42 金属粉
45 主面
45a 凹部
51 第1外部電極(金属膜)
52 第2外部電極(金属膜)
60 樹脂膜
Claims (21)
- 樹脂材料および金属粉のコンポジット材料からなるコンポジット体と、
前記コンポジット体の外面上に配置された金属膜と
を備え、
前記金属膜が、前記コンポジット体の前記樹脂材料および前記金属粉に接触しており、
前記樹脂材料と接する前記金属膜の結晶における平均粒径は、前記金属粉と接する前記金属膜の結晶における平均粒径に対し、60%以上120%以下である、電子部品。 - 前記金属粉上の前記金属膜の膜厚の一部は、前記樹脂材料上の前記金属膜の膜厚以下となる、請求項1に記載の電子部品。
- 前記コンポジット体に埋め込まれた内部電極を備え、
前記金属膜が、前記内部電極と接触している、請求項1に記載の電子部品。 - 前記金属膜と前記内部電極とが同一材料からなる、請求項3に記載の電子部品。
- 前記コンポジット体の外面は、主面を有し、
前記主面において、前記樹脂材料から前記金属粉が露出するとともに、前記金属膜が配置されている、請求項1に記載の電子部品。 - 前記樹脂材料から露出する前記金属粉の形状は、楕円体の一部を切断した形状を含む、請求項5に記載の電子部品。
- 前記金属膜が配置されていない前記主面上に配置された樹脂膜を有し、
前記樹脂膜は、前記樹脂材料から露出する前記金属粉を覆う、請求項5に記載の電子部品。 - 前記金属膜の一部は、前記樹脂膜上に配置されている、請求項7に記載の電子部品。
- 前記金属粉は、Feを含む金属又は合金からなり、
前記金属膜は、Cuを含む金属又は合金からなる、請求項1に記載の電子部品。 - 前記金属粉上の前記金属膜の膜厚が、前記樹脂材料上の前記金属膜の膜厚の60%以上120%以下である、請求項1に記載の電子部品。
- 前記金属粉と前記金属膜との界面及び前記樹脂材料と前記金属膜との界面のいずれにおいても、Pdが存在しない、請求項1に記載の電子部品。
- 前記樹脂材料と前記金属膜との界面においては、Pdが存在しないが、
前記金属粉と前記金属膜との界面においては、Pdが存在する、請求項1に記載の電子部品。 - 前記金属膜の一部は、前記金属粉の外面に沿って前記コンポジット体の内部側に回り込んでいる、請求項1に記載の電子部品。
- 前記コンポジット体の外面が一部に凹部を有し、前記金属膜が前記凹部内に充填されている、請求項1に記載の電子部品。
- 前記金属膜の結晶粒径は、前記コンポジット体と接触する側からその反対側にかけて、大きくなっている、請求項1に記載の電子部品。
- 樹脂材料および金属粉のコンポジット材料からなるコンポジット体の一部を研削して、前記コンポジット体の研削面から金属粉を露出させる研削工程と、
前記コンポジット体の研削面に無電解めっきを用いて金属膜を形成する金属膜形成工程と
を備える、電子部品の製造方法。 - 前記金属膜形成工程において、無電解めっきを用いて前記金属膜を前記樹脂材料上および前記金属粉上に形成する、請求項16に記載の電子部品の製造方法。
- 前記金属膜形成工程では、置換析出反応を用いて前記研削面から露出させた前記金属粉上に前記金属膜を析出させ、無電解めっきを用いて前記析出させた前記金属膜を成長させることにより、前記金属膜を形成する、請求項16に記載の電子部品の製造方法。
- 前記金属膜形成工程では、触媒付与を行わないで無電解めっきを行う、請求項16の電子部品の製造方法。
- 前記金属粉は、Feを含む金属又は合金からなり、
前記金属膜は、Cuを含む金属又は合金からなる、請求項16の電子部品の製造方法。 - 前記研削工程後、前記コンポジット体の研削面の一部の領域上に樹脂膜を形成する樹脂膜形成工程を有し、
前記金属膜形成工程では、前記樹脂膜をマスクとして、金属膜を形成する、請求項16の電子部品の製造方法。
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