JP2017103376A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2017103376A JP2017103376A JP2015236287A JP2015236287A JP2017103376A JP 2017103376 A JP2017103376 A JP 2017103376A JP 2015236287 A JP2015236287 A JP 2015236287A JP 2015236287 A JP2015236287 A JP 2015236287A JP 2017103376 A JP2017103376 A JP 2017103376A
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- conductive layer
- protective film
- semiconductor device
- bonding pad
- semiconductor element
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Abstract
【解決手段】半導体装置A1は、厚さ方向において互いに反対側を向く第1主面10aおよび第2主面を有する半導体素子1と、半導体素子1の第1主面10a側にボンディングされたワイヤと、を備える。半導体素子1は、第1主面10aに形成された金属下地層11と、金属下地層11上に設けられたボンディングパッド13と、半第1主面10aに形成された絶縁性の保護層14と、を含む。ボンディングパッド13は、金属下地層11を覆い、金属下地層11よりもイオン化傾向が小さい金属からなる第1導電層131と、第1導電層131を覆い、第1導電層131よりもイオン化傾向が小さい金属からなる第2導電層132と、を有し、第1導電層131及び第2導電層132それぞれの周縁部は、保護層14の表面に密着して当該保護層14の一部を覆う。
【選択図】図4
Description
1 半導体素子
10a 第1主面
10b 第2主面
11 金属下地層
12 絶縁膜
13 ボンディングパッド
131 第1導電層
132 第2導電層
133 第3導電層
14 保護層
141 第1保護膜
141a 上面
141b 第1側面
142 第2保護膜
142a 上面
142b 第2側面
143 積層部
144 ひさし部
144b ひさし部側面
144c ひさし部下面
144d 先端縁
15 空隙部
2 ワイヤ
21,22 ボンディング部
23 橋絡部
3 リードフレーム
31 主電極
32 副電極
5 封止樹脂
Claims (24)
- 厚さ方向において互いに反対側を向く第1主面および第2主面を有する半導体素子と、
上記半導体素子の上記第1主面側にボンディングされたワイヤと、を備え、
上記半導体素子は、上記第1主面に形成された金属下地層と、上記金属下地層上に設けられ、上記ワイヤがボンディングされたボンディングパッドと、上記半導体素子の厚さ方向視において上記ボンディングパッドを囲んでおり、上記第1主面に形成された絶縁性の保護層と、を含み、
上記ボンディングパッドは、上記金属下地層を覆い、上記金属下地層よりもイオン化傾向が小さい金属からなる第1導電層と、当該第1導電層を覆い、上記第1導電層よりもイオン化傾向が小さい金属からなる第2導電層と、を有し、
上記第1導電層および上記第2導電層それぞれの周縁部は、上記保護層の表面に密着して当該保護層の一部を覆う、半導体装置。 - 上記保護層と上記金属下地層との間に介在する絶縁膜を備える、請求項1に記載の半導体装置。
- 上記保護層は、第1保護膜と、上記第1保護膜上に積層された第2保護膜と、を有する、請求項1または2に記載の半導体装置。
- 上記第1保護膜および上記第2保護膜は、上記半導体素子の厚さ方向に対して直角である方向において上記ボンディングパッドに向いた第1側面および第2側面を有し、
上記第2保護膜の上記第2側面は、上記第1保護膜の上記第1側面に比べて上記ボンディングパッドとは反対側に後退した位置にある、請求項3に記載の半導体装置。 - 上記第1導電層は、上記第1保護膜の上記第1側面の全部、上記第1保護膜の上面の一部および上記第2保護膜の上記第2側面の一部を覆っており、
上記第2導電層は、上記第2保護膜の上記第2側面の一部を覆うとともに、上記第2保護膜の上面を露出させている、請求項4に記載の半導体装置。 - 上記第1導電層および上記第2導電層は、上記第1保護膜の上記第1側面の一部を覆うとともに、上記第2保護膜を露出させている、請求項4に記載の半導体装置。
- 上記第1保護膜の上記第1側面および上記第2保護膜の上記第2側面は、それぞれ、上記半導体素子の厚さ方向において上記半導体素子から離れるにつれて上記ボンディングパッドから遠ざかるように傾斜している、請求項4ないし6のいずれかに記載の半導体装置。
- 上記第2保護膜は、積層部およびひさし部を含み、
上記積層部は、上記第1保護膜上に重なる部分であり、
上記ひさし部は、上記半導体素子の厚さ方向に対して直角である方向に、上記積層部から上記ボンディングパッド側に向けて突出している、請求項3に記載の半導体装置。 - 上記第1保護膜は、上記半導体素子の厚さ方向に対して直角である方向において上記ボンディングパッドに向いた第1側面を有し、
上記ひさし部は、上記半導体素子の厚さ方向に対して直角である方向において上記ボンディングパッドに向いたひさし部側面と、上記半導体素子の厚さ方向において上記半導体素子に向いたひさし部下面と、を有し、
上記第1側面は、上記半導体素子の上記厚さ方向において上記半導体素子から離れるにつれて上記ボンディングパッドから遠ざかるように傾斜している、請求項8に記載の半導体装置。 - 上記第1導電層および上記第2導電層は、上記第1保護膜の上記第1側面の一部を覆うとともに、上記第2保護膜を露出させている、請求項9に記載の半導体装置。
- 上記ひさし部下面は、上記半導体素子の厚さ方向において上記ボンディングパッドの上面よりも上記半導体素子から離れた位置にある、請求項10に記載の半導体装置。
- 上記第1導電層は、上記第1保護膜の上記第1側面の一部および上記ひさし部側面の全部を覆っており、
上記第2導電層は、上記ひさし部側面につながる上記第2保護膜の上面の一部を覆う、請求項9に記載の半導体装置。 - 上記第1導電層は、上記第2保護膜の上記上面の一部を覆う、請求項12に記載の半導体装置。
- 上記第1導電層は、上記第1保護膜の上記第1側面の一部および上記ひさし部側面の一部を覆い、
上記第2導電層は、上記ひさし部側面の一部を覆うとともに、上記第2保護膜の上面を露出させている、請求項9に記載の半導体装置。 - 上記ひさし部下面が露出しており、
上記ひさし部下面と、上記第1保護膜の上記第1側面と、上記第1導電層とによって囲まれた空隙部が形成される、請求項12ないし14のいずれかに記載の半導体装置。 - 上記ひさし部側面は、上記半導体素子の上記厚さ方向において上記半導体素子から離れるにつれて上記ボンディングパッドから遠ざかるように傾斜している、請求項9ないし15のいずれかに記載の半導体装置。
- 上記第1保護膜は、SiNからなる、請求項3ないし16のいずれかに記載の半導体装置。
- 上記第1導電層は、Niを含む、請求項1ないし17のいずれかに記載の半導体装置。
- 上記第2導電層は、Pdを含む、請求項1ないし18のいずれかに記載の半導体装置。
- 上記第1導電層および上記第2導電層は、上記金属下地層よりも硬度が高い、請求項1ないし19のいずれかに記載の半導体装置。
- 上記第1導電層の厚さは、上記第2導電層の厚さよりも大きい、請求項1ないし20のいずれかに記載の半導体装置。
- 上記第1導電層および上記第2導電層は、金属メッキよりなる、請求項1ないし21のいずれかに記載の半導体装置。
- 上記ボンディングパッドは、上記第2導電層を覆っており、上記第2導電層よりも厚さが小さい第3導電層を有し、
上記第3導電層は、上記第2導電層よりもイオン化傾向が小さい金属からなる、請求項1ないし22のいずれかに記載の半導体装置。 - 上記ワイヤは、Cuを主成分とする金属からなる、請求項1ないし23のいずれかに記載の半導体装置。
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