JP2016531319A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016531319A5 JP2016531319A5 JP2016532276A JP2016532276A JP2016531319A5 JP 2016531319 A5 JP2016531319 A5 JP 2016531319A5 JP 2016532276 A JP2016532276 A JP 2016532276A JP 2016532276 A JP2016532276 A JP 2016532276A JP 2016531319 A5 JP2016531319 A5 JP 2016531319A5
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- layer
- layers
- nitride
- group iii
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 6
- 150000004767 nitrides Chemical class 0.000 claims 5
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 2
- 229910002601 GaN Inorganic materials 0.000 claims 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 2
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims 2
- 230000005670 electromagnetic radiation Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013215541.7A DE102013215541A1 (de) | 2013-08-07 | 2013-08-07 | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
| DE102013215541.7 | 2013-08-07 | ||
| PCT/EP2014/063349 WO2015018560A2 (de) | 2013-08-07 | 2014-06-25 | Spiegel, insbesondere für eine mikrolithographische projektionsbelichtungsanlage |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016531319A JP2016531319A (ja) | 2016-10-06 |
| JP2016531319A5 true JP2016531319A5 (enExample) | 2017-08-03 |
| JP6560670B2 JP6560670B2 (ja) | 2019-08-14 |
Family
ID=51178880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016532276A Active JP6560670B2 (ja) | 2013-08-07 | 2014-06-25 | 特にマイクロリソグラフィ投影露光装置のミラー |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10310382B2 (enExample) |
| EP (1) | EP3030936B1 (enExample) |
| JP (1) | JP6560670B2 (enExample) |
| KR (1) | KR102265041B1 (enExample) |
| CN (1) | CN105518532B (enExample) |
| DE (1) | DE102013215541A1 (enExample) |
| WO (1) | WO2015018560A2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015213253A1 (de) * | 2015-07-15 | 2017-01-19 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
| CN109070459B (zh) * | 2016-05-12 | 2021-08-20 | 惠普发展公司，有限责任合伙企业 | 经由打印试剂施加的温度修正 |
| DE102016213831A1 (de) * | 2016-07-27 | 2018-02-01 | Carl Zeiss Smt Gmbh | Reflektives optisches Element für die EUV-Lithographie |
| DE102016224113A1 (de) * | 2016-12-05 | 2018-06-07 | Carl Zeiss Smt Gmbh | Intensitätsanpassungsfilter für die euv - mikrolithographie und verfahren zur herstellung desselben sowie beleuchtungssystem mit einem entsprechenden filter |
| DE102018211499A1 (de) | 2018-07-11 | 2020-01-16 | Carl Zeiss Smt Gmbh | Reflektives optisches Element und Verfahren zum Herstellen eines reflektiven optischen Elements |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4870648A (en) * | 1987-08-07 | 1989-09-26 | The United States Department Of Energy | X-ray beamsplitter |
| JPH04164291A (ja) | 1990-10-29 | 1992-06-09 | Toshiba Corp | 原子炉用制御棒 |
| JPH04164297A (ja) * | 1990-10-29 | 1992-06-09 | Seiko Instr Inc | Ｘ線反射鏡 |
| JPH06109907A (ja) * | 1992-09-25 | 1994-04-22 | Asahi Glass Co Ltd | 高精度光学反射鏡 |
| JPH06308294A (ja) * | 1993-04-28 | 1994-11-04 | Kyocera Corp | Ｘ線反射用ミラー |
| JPH0868897A (ja) * | 1994-08-29 | 1996-03-12 | Nikon Corp | 反射鏡およびその製造方法 |
| JPH1073705A (ja) * | 1996-08-30 | 1998-03-17 | Mitsubishi Materials Corp | 反射鏡 |
| JPH11326598A (ja) * | 1998-05-08 | 1999-11-26 | Nikon Corp | 反射鏡およびその製造方法 |
| US6377655B1 (en) | 1998-05-08 | 2002-04-23 | Nikon Corporation | Reflective mirror for soft x-ray exposure apparatus |
| US6778404B1 (en) * | 2000-06-02 | 2004-08-17 | Micron Technology Inc | Stackable ball grid array |
| US7843632B2 (en) * | 2006-08-16 | 2010-11-30 | Cymer, Inc. | EUV optics |
| US6710351B2 (en) * | 2001-09-18 | 2004-03-23 | Euv, Llc | EUV mirror based absolute incident flux detector |
| US20080004332A1 (en) * | 2002-03-07 | 2008-01-03 | Alkon Daniel L | Methods for alzheimer's disease treatment and cognitive enhancement |
| JP3919599B2 (ja) * | 2002-05-17 | 2007-05-30 | キヤノン株式会社 | 光学素子、当該光学素子を有する光源装置及び露光装置 |
| JP2004177587A (ja) * | 2002-11-26 | 2004-06-24 | Taiheiyo Cement Corp | 低熱膨張ミラーおよびその製造方法 |
| DE102004002757A1 (de) * | 2004-01-20 | 2005-08-11 | U-L-M Photonics Gmbh | Aluminiumhaltiger Verbundhalbleiter und Verfahren zur Herstellung eines aluminiumhaltigen Verbundhalbleiters |
| US7193228B2 (en) * | 2004-03-10 | 2007-03-20 | Cymer, Inc. | EUV light source optical elements |
| JP4460325B2 (ja) * | 2004-02-20 | 2010-05-12 | 太平洋セメント株式会社 | 天体望遠鏡用ミラー |
| JP4926523B2 (ja) * | 2006-03-31 | 2012-05-09 | Ｈｏｙａ株式会社 | 反射型マスクブランクス及び反射型マスク並びに半導体装置の製造方法 |
| CN1900745B (zh) * | 2006-07-07 | 2011-02-09 | 南京大学 | 用于紫外探测器的高反射率分布布拉格反射镜结构和生长方法 |
| JP5269079B2 (ja) * | 2007-08-20 | 2013-08-21 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射コーティングを備えたミラー要素を有する投影対物系 |
| JP2010031660A (ja) * | 2008-07-25 | 2010-02-12 | Honda Motor Co Ltd | インバータ発電機 |
| CN102150218B (zh) * | 2008-09-12 | 2014-04-16 | 旭硝子株式会社 | Euvl用光学部件的平滑化方法及光学面平滑化后的euvl用光学部件 |
| DE102009040785A1 (de) | 2009-09-09 | 2011-03-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Substrat aus einer Aluminium-Silizium-Legierung oder kristallinem Silizium, Metallspiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung |
| JP2011108942A (ja) | 2009-11-19 | 2011-06-02 | Renesas Electronics Corp | 反射型露光用マスク、反射型露光用マスクの製造方法、および、半導体装置の製造方法 |
| DE102011079933A1 (de) | 2010-08-19 | 2012-02-23 | Carl Zeiss Smt Gmbh | Optisches Element für die UV- oder EUV-Lithographie |
| EP2606141A2 (en) * | 2010-08-20 | 2013-06-26 | Zuchem, Inc. | Activated sugars |
| DE102010039927A1 (de) * | 2010-08-30 | 2012-03-01 | Carl Zeiss Smt Gmbh | Substrat für Spiegel für die EUV-Lithographie |
| DE102011002953A1 (de) * | 2011-01-21 | 2012-07-26 | Carl Zeiss Smt Gmbh | Substrat für Spiegel für die EUV-Lithographie |
| US9377695B2 (en) * | 2011-02-24 | 2016-06-28 | Asml Netherlands B.V. | Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device |
| EP2689427B1 (en) | 2011-03-23 | 2017-05-03 | Carl Zeiss SMT GmbH | Euv mirror arrangement, optical system comprising euv mirror arrangement and method for operating an optical system comprising an euv mirror arrangement |
| JP2012222349A (ja) * | 2011-04-05 | 2012-11-12 | Asml Netherlands Bv | 多層ミラーおよびリソグラフィ装置 |
| US9488760B2 (en) * | 2013-02-28 | 2016-11-08 | Corning Incorporated | Enhanced, durable silver coating stacks for highly reflective mirrors |
-
2013
- 2013-08-07 DE DE102013215541.7A patent/DE102013215541A1/de not_active Ceased
-
2014
- 2014-06-25 KR KR1020167003166A patent/KR102265041B1/ko active Active
- 2014-06-25 EP EP14739073.6A patent/EP3030936B1/de active Active
- 2014-06-25 WO PCT/EP2014/063349 patent/WO2015018560A2/de not_active Ceased
- 2014-06-25 JP JP2016532276A patent/JP6560670B2/ja active Active
- 2014-06-25 CN CN201480049179.8A patent/CN105518532B/zh active Active
-
2016
- 2016-02-08 US US15/018,316 patent/US10310382B2/en active Active