JP2016511717A - 成形式プリントバー - Google Patents
成形式プリントバー Download PDFInfo
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- JP2016511717A JP2016511717A JP2015560146A JP2015560146A JP2016511717A JP 2016511717 A JP2016511717 A JP 2016511717A JP 2015560146 A JP2015560146 A JP 2015560146A JP 2015560146 A JP2015560146 A JP 2015560146A JP 2016511717 A JP2016511717 A JP 2016511717A
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- 239000012530 fluid Substances 0.000 claims abstract description 112
- 238000007639 printing Methods 0.000 claims description 42
- 239000004020 conductor Substances 0.000 claims description 9
- 241000446313 Lamella Species 0.000 claims 1
- 238000000034 method Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
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Abstract
Description
プリンティング流体は、2行の噴出チャンバ50間で各ダイ12に沿って長手方向に延びるマニホールド54から各噴出チャンバ50内へと流入する。プリンティング流体は、ダイ表面20でプリンティング流体供給チャネル16に接続された複数のポート56を介してマニホールド54内に供給される。プリンティング流体供給チャネル16は、図示のようにプリンティング流体ポート56よりも大幅に広いものであり、プリントバー36内にプリンティング流体を伝搬する流量調整手段又はその他の部分における一層大きな緩く隔置された流路から、プリントヘッドダイ12内の一層小さな密に隔置されたプリンティング流体ポート56へと、プリンティング流体を伝搬するものである。このため、プリンティング流体供給チャネル16は、従来のプリントヘッドにおける別個の「ファンアウト(fan-out)」及びその他の流体経路指定構造の必要性を低減させ又はなくすことに資すことが可能なものである。更に、図示のようにプリントヘッドダイ表面20の大きな面積をチャネル16に対して直接露出させることにより、プリンティング中にチャネル16内のプリンティング流体がダイ12を冷却することが可能となる。
図24は、図23における一組の4行のプリントヘッド37の24-24断面を示す拡大断面図である。明瞭化のためクロスハッチングは省略されている。図23及び図24は、図23のステップ102-112が完了した後の製造過程のウェハ構造を示している。図25は、チャネル16を有する本体14がプリントヘッドダイ12の周辺に成形される成形ステップ114が図23で実施された後の図24の断面を示している。個々のプリントバーストライプ78が分割され(図26)、及びキャリア68から取り外されて(図27)、5つの別個のプリントバー36が形成される(図23のステップ116)。あらゆる適当な成形技術を使用することが可能であるが、テストを行った結果として、半導体デバイスのパッケージングに現在使用されているウェハレベル成形ツール及び技術は、図21及び図27に示したようなプリントヘッドダイの流体構造10の作製にコスト的に有効に適用し得るものであることが示唆されている。
Claims (15)
- 細長い一体型の本体内に成形された複数のプリントヘッドダイを備えたプリントバーであって、該複数のプリントヘッドダイが、前記本体の全長に渡ってほぼ端から端まで配置されており、該本体がその内部にチャネルを有しており、該チャネルを介して流体が前記ダイへ直接通過することが可能である、プリントバー。
- 前記複数のプリントヘッドダイの各々が薄いダイからなる、請求項1に記載のプリントバー。
- 複数の前記薄いダイの各々が細長い薄片からなる、請求項2に記載のプリントバー。
- 複数の前記細長い薄片からなるダイの各々が、
前記チャネルに接続された複数の穴であって、該チャネルから該複数の穴へとプリンティング流体が直接流れることが可能となっている、複数の穴と、
該複数の穴に接続されたマニホールドであって、該複数の穴から該マニホールドへと前記プリンティング流体が直接流れることが可能となっている、マニホールドと、
該マニホールドに接続された複数の噴出チャンバであって、該マニホールドから該複数の噴出チャンバへと前記プリンティング流体が流れることが可能となっている、複数の噴出チャンバと
を含む、請求項3に記載のプリントバー。 - 前記複数の穴の各々が、前記チャネルにおける幅の広い部分から前記マニホールドにおける幅の狭い部分へとテーパーがつけられており、
前記チャネルが、前記本体内に成形されたものであり、及び前記複数の穴から離れた幅の広い部分から該複数の穴における幅の狭い部分へとテーパーがつけられている、
請求項4に記載のプリントバー。 - 前記複数の細長い薄片からなるダイが、前記本体の全長に渡って互い違いの構成で複数の行内に配置され、その各行における該複数の細長い薄片からなるダイが、該行内の他の細長い薄片からなるダイと重なっており、
前記チャネルが複数のチャネルを含み、その各チャネルが、前記複数の細長い薄片からなるダイのうちの1つ以上へと流体が直接通過することを可能にするものである、
請求項3に記載のプリントバー。 - 前記複数の細長い薄片からなるダイの各々が、
オリフィスを有する正面であって、該オリフィスを介して該細長い薄片からなるダイから流体を分配することが可能である、正面と、
該正面の反対側の背面と、
該正面と該背面との間の側面と
を含み、
前記複数の細長い薄片からなるダイの各々の少なくとも1つの前記側面に沿ってチャネルが配設されている、
請求項6に記載のプリントバー。 - 前記複数の細長い薄片からなるダイの各々が、
オリフィスを有する正面であって、該オリフィスを介して該細長い薄片からなるダイから流体を分配することが可能である、正面と、
該正面の反対側の背面と、
該正面と該背面との間の側面と
を含み、
前記複数の細長い薄片からなるダイの各々の前記背面に沿ってチャネルが配設されている、
請求項6に記載のプリントバー。 - 前記一体型の本体が、前記複数の細長い薄片からなるダイを単一の平面内で支持する、請求項6に記載のプリントバー。
- 複数の薄いプリントヘッドダイの周囲に成形された本体を備えたプリントバーであって、該成形された本体が、複数のチャネルを有しており、該複数のチャネルを介して該複数のプリントヘッドダイ内へと流体が直接通過することが可能となっており、及び該複数のプリントヘッドダイが、複数の行内にほぼ端から端まで互い違いの構成で配置されており、その各行における該複数のプリントヘッドダイが該行内の他のプリントヘッドダイと重なっている、プリントバー。
- 前記本体が、一体型の本体からなり、及び単一の平面内で該本体内に前記複数のプリントヘッドダイを支持している、請求項10に記載のプリントバー。
- 前記複数のプリントヘッドダイの各々が電気的な端子を含み、前記プリントバーが更に、複数の該端子に接続された複数の導体を備えており、前記本体が該導体及び該端子の周囲に成形されている、請求項10に記載のプリントバー。
- 複数の細長い薄片からなるプリントヘッドダイであって、該複数の細長い薄片からなるプリントヘッドダイの各々が、複数の噴出チャンバと、該複数の噴出チャンバへと流体が通過することを可能にする複数の通路と、前記噴出チャンバからの流体を噴出させることが可能なオリフィスを有する正面と、該正面と反対側の背面とを含む、複数の細長い薄片からなるプリントヘッドダイと、
該複数の細長い薄片からなるプリントヘッドダイを部分的に密閉する成形体であって、該成形体内の複数のチャネルが前記複数の細長い薄片からなるプリントヘッドダイに直接接続されている、成形体と
を備えている、プリントバー。 - 前記複数のチャネルが前記成形体内に成形されたものである、請求項14に記載のプリントバー。
- 一体型の成形体内に埋設された複数の薄いプリントヘッドダイを備えたプリントバーであって、該成形体が、該複数の薄いプリントヘッドダイへ流体が直接通過することを可能にする複数のチャネルを含む、プリントバー。
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JP2015560166A Expired - Fee Related JP6085694B2 (ja) | 2013-02-28 | 2013-09-27 | モールド成形されたプリントヘッド |
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