JP5717527B2 - 液体吐出ヘッド - Google Patents
液体吐出ヘッド Download PDFInfo
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- JP5717527B2 JP5717527B2 JP2011099580A JP2011099580A JP5717527B2 JP 5717527 B2 JP5717527 B2 JP 5717527B2 JP 2011099580 A JP2011099580 A JP 2011099580A JP 2011099580 A JP2011099580 A JP 2011099580A JP 5717527 B2 JP5717527 B2 JP 5717527B2
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Images
Classifications
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
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- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/1408—Structure dealing with thermal variations, e.g. cooling device, thermal coefficients of materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
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- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
以下、図面を参照して、本発明の実施形態について説明する。
さらに、より効率的に温度を制御することができる液体吐出ヘッドを以下に説明する。
本実施形態では、実施形態2において温度制御用流路(第二の流路)が冷却用流路である形態について図7を参照して説明する。
本発明では、前記ヘッド基板の上に、吐出エネルギー発生素子の上方の発泡部から第二の液流路に亘って熱拡散層を配置することができる。つまり、吐出エネルギー発生素子の上に金属からなる熱拡散層が形成されており、該熱拡散層が前記第二の液流路まで展開する構成とすることができる。このような構成とすることにより、吐出エネルギー発生素子で発生した熱をより有効に第二の液流路に伝えることができる。また、前記熱拡散層は耐キャビテーション膜を兼ねることができる。
図8の平面図は一実施形態を示す図であって、冷却用流路10のレイアウトや供給用通路11及び排出用通路13の配置位置はかかる機能を満足すれば良い。例えば、図11(a)又は(b)に示すように冷却用流路10、供給用通路11および排出用通路13を配置することができる。
図12(a)〜(g)は本実施形態のインクジェット記録ヘッドの製造方法を説明するための工程断面図である。
以下に、インクジェット記録ヘッドの製造方法の具体例について図4及び5を参照して説明する。なお、本発明は以下の実施例に限定されるものではない。
2、112 支持部材
3、104 流路形成部材
4、116 接着剤
5、110、112 インク流路(第一の液流路)
6、105 インク吐出口(吐出口)
7、102 吐出エネルギー発生素子
8、108、111 インク供給口(供給口)
9、107 インク導入口(導入口)
10、111 温度制御用流路(第二の液流路)
11、108 供給用通路(第一の液通路)
12、114 供給用経路(第一の液経路)
13、109 排出用通路(第二の液通路)
14、115 排出用経路(第二の液経路)
41 絶縁膜
42 パッシベーション膜
43 耐キャビテーション膜
103 流路型材
109 接合面
120 エッチングストップ層
Claims (9)
- 第一の液体を吐出するための吐出口と該吐出口に連通する第一の液流路とを構成し、空間的にそれぞれ連通する前記吐出口及び前記第一の液流路からなるノズル列を有する流路形成部材と、
前記第一の液体を吐出するためのエネルギーを発生する吐出エネルギー発生素子を有し、前記第一の液流路に前記第一の液体を供給するための供給口が形成されたヘッド用基板と、
前記供給口に前記第一の液体を供給するための導入口を有する支持部材と、
を含む液体吐出ヘッドであって、
前記ヘッド用基板は前記流路形成部材が配置されている面と反対側に凹部を有し、
該凹部の底部に前記供給口が前記ヘッド用基板を貫通するように形成されており、
前記ヘッド用基板と前記支持部材は、前記供給口と前記導入口とが連通するように、前記凹部の底部において接合され、
前記流路形成部材は、さらに、第二の液体が流れる第二の液流路を有し、
前記ヘッド用基板は、さらに、前記第二の液流路に前記第二の液体を供給するための第一の液通路と、前記第二の液流路から前記第二の液体を排出するための第二の液通路と、
を有し、
前記流路形成部材と前記ヘッド用基板は、前記第二の液流路と前記第一の液通路、前記第二の液流路と前記第二の液通路、及び前記第一の液流路と前記供給口が、それぞれ連通するように形成されていることを特徴とする液体吐出ヘッド。 - 前記供給口は前記ノズル列に沿って形成されている請求項1に記載の液体吐出ヘッド。
- 前記凹部は、異方性エッチングにより形成される請求項1又は2に記載の液体吐出ヘッド。
- 前記凹部は、結晶異方性エッチングにより形成される請求項1〜3のいずれかに記載の液体吐出ヘッド。
- 前記ヘッド用基板は、<100>面の結晶方位を有するシリコン基板を用いて構成されている請求項4に記載の液体吐出ヘッド。
- 前記凹部の底部は前記シリコン基板の前記結晶異方性エッチングより形成された<100>面であり、該<100>面を前記ヘッド用基板と前記支持部材との接合面とする請求項5に記載の液体吐出ヘッド。
- 前記ノズル列は複数設けられており、前記供給口は前記ノズル列毎に設けられている請求項1〜6のいずれかに記載の液体吐出ヘッド。
- 前記第二の液流路は、前記第二の液体が該第二の液流路に供給される流入口と、前記第二の液体が該第二の液流路から排出される排出口と、を有し、
前記流入口は前記第一の液通路に接続し、前記排出口は前記第二の液通路に接続する請求項1〜7のいずれかに記載の液体吐出ヘッド。 - 前記吐出エネルギー発生素子の上に金属からなる熱拡散層が形成されており、該熱拡散
層は前記第二の液流路まで展開している請求項8に記載の液体吐出ヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011099580A JP5717527B2 (ja) | 2010-05-19 | 2011-04-27 | 液体吐出ヘッド |
US13/107,328 US8408681B2 (en) | 2010-05-19 | 2011-05-13 | Liquid discharge head having an increased rigidity |
CN201110130120.XA CN102248794B (zh) | 2010-05-19 | 2011-05-19 | 液体排出头 |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010115232 | 2010-05-19 | ||
JP2010115233 | 2010-05-19 | ||
JP2010115233 | 2010-05-19 | ||
JP2010115232 | 2010-05-19 | ||
JP2011099580A JP5717527B2 (ja) | 2010-05-19 | 2011-04-27 | 液体吐出ヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012000978A JP2012000978A (ja) | 2012-01-05 |
JP5717527B2 true JP5717527B2 (ja) | 2015-05-13 |
Family
ID=45533490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011099580A Active JP5717527B2 (ja) | 2010-05-19 | 2011-04-27 | 液体吐出ヘッド |
Country Status (2)
Country | Link |
---|---|
US (1) | US8408681B2 (ja) |
JP (1) | JP5717527B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5302259B2 (ja) * | 2010-04-28 | 2013-10-02 | パナソニック株式会社 | インクジェットヘッドおよびインクジェット装置 |
US11426900B2 (en) | 2013-02-28 | 2022-08-30 | Hewlett-Packard Development Company, L.P. | Molding a fluid flow structure |
RU2633224C2 (ru) | 2013-02-28 | 2017-10-11 | Хьюлетт-Паккард Дивелопмент Компани, Л.П. | Формованная печатающая штанга |
US10821729B2 (en) | 2013-02-28 | 2020-11-03 | Hewlett-Packard Development Company, L.P. | Transfer molded fluid flow structure |
US9724920B2 (en) | 2013-03-20 | 2017-08-08 | Hewlett-Packard Development Company, L.P. | Molded die slivers with exposed front and back surfaces |
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