JP2016184723A - マイクロナノ化チップおよびその製造方法 - Google Patents
マイクロナノ化チップおよびその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 239000002086 nanomaterial Substances 0.000 claims abstract description 40
- 238000000407 epitaxy Methods 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000010410 layer Substances 0.000 claims description 69
- 239000002073 nanorod Substances 0.000 claims description 25
- 239000011241 protective layer Substances 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 2
- 238000005452 bending Methods 0.000 abstract description 17
- 238000005336 cracking Methods 0.000 abstract description 2
- 238000013467 fragmentation Methods 0.000 abstract description 2
- 238000006062 fragmentation reaction Methods 0.000 abstract description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
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- 238000004140 cleaning Methods 0.000 description 1
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- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
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- H01L29/2003—Nitride compounds
Abstract
【解決手段】 発明の提供するマイクロナノ化チップは、一つの基板と一つのナノ構造層から構成される一つのエピタキシ層を配置するために用いられる。このうち、基板は互いに向かい合う一つの第1面と一つの第2面とを備え、第1面はエピタキシ層が配置される面で、ナノ構造層は第2面上に形成されている。本発明の提供するマイクロナノ化チップの製造方法では、A.互いに向かい合う一つの第1面と一つの第2面とを備える一枚の基板を提供する。B.第2面に一つのナノ構造層を配置してマイクロナノ化チップを形成する二つのプロセスがあり、これにより基板の第1面にエピタキシ層が配置される。
【選択図】図1
Description
10 … 基板
12 … 第1面
14 … 第2面
142 … ナノ構造層 142a … ナノロッド
16 … 緩衝層
18 … エピタキシ層
2 … マイクロナノ化チップ
20 … 基板
22 … 第1面
24 … 第2面
242 … ナノ構造層
26 … 側表面
262 … ナノ構造層
Claims (13)
- 互いに向かい合う一つの第1面と一つの第2面とを備える基板を含み、一つのエピタキシ層を配置するために用いられる一つのマイクロナノ化チップであって、
前記第1面にエピタキシ層が配置され、
前記第2面上にナノ構造層が形成されている、マイクロナノ化チップ。 - 前記ナノ構造層は複数のナノロッドを含み、前記ナノロッドの長さは10〜10,000nmの間である請求項1に記載のマイクロナノ化チップ。
- 前記ナノロッドのうちの一部のナノロッドの長さは4,000nm以上である請求項2に記載のマイクロナノ化チップ。
- 前記ナノ構造層は複数のナノロッドを含み、これらの前記ナノロッドの幅は10〜10,000nmである請求項1に記載のマイクロナノ化チップ。
- 前記ナノロッドのうちの一部のナノロッドの幅は500nm未満である請求項4に記載のマイクロナノ化チップ。
- 前記ナノ構造層は複数のナノロッドを含み、これらの前記ナノロッドは同じ方向に延伸する請求項1に記載のマイクロナノ化チップ。
- 前記ナノ構造層は複数のナノロッドを含み、これらの前記ナノロッドは第2面の総面積の50%以上を占める請求項1に記載のマイクロナノ化チップ。
- 前記基板はさらに前記第1面、前記第2面の縁と接続する一つの側表面を備え、別のナノ構造層は前記側表面上に形成されている請求項1に記載のマイクロナノ化チップ。
- 一種のマイクロナノ化チップの製造方法であって、一つのエピタキシ層の配置に用いられ、
A.互いに向かい合う一つの第1面と一つの第2面とを備える一つの基板、および
B.前記第2面に配置された前記マイクロナノ化チップを形成する一つのナノ構造層、から構成され、
これにより、前記基板の前記第1面は前記エピタキシ層の配置に用いられる、マイクロナノ化チップの製造方法。 - 作業AとBの間に前記第1面上に一つの保護層を設置するプロセスが含まれていることと、作業Bの前記ナノ構造層はウェットエッチング方式で作られていることと、作業B以降、前記保護層を取り除くプロセスがあることを特徴とする求項9に記載のマイクロナノ化チップの製造方法。
- 前記基板は第1面、前記第2面の縁と接続する一つの側表面を備えることと、作業Bはさらに前記側表面上に別のナノ構造層を配置するプロセスを含む請求項9に記載のマイクロナノ化チップの製造方法。
- 前記基板は第1面、前記第2面の縁と接続する一つの側表面を備えることと、作業B以降、前記基板の側表面に対して丸み処理を行うプロセスがある請求項9に記載のマイクロナノ化チップの製造方法。
- 前記ナノ構造層は複数のナノロッドを含む請求項9に記載のマイクロナノ化チップの製造方法。
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TW104129684A TWI588085B (zh) | 2015-03-26 | 2015-09-08 | 微奈米化晶片及其製造方法 |
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US10586751B2 (en) * | 2017-08-03 | 2020-03-10 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device and method of manufacturing the same |
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JP2015032789A (ja) * | 2013-08-06 | 2015-02-16 | 住友電気工業株式会社 | 炭化珪素半導体基板およびその製造方法、ならびに炭化珪素半導体装置の製造方法 |
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US10103108B2 (en) | 2018-10-16 |
CN106024853A (zh) | 2016-10-12 |
TW201634381A (zh) | 2016-10-01 |
TWI588085B (zh) | 2017-06-21 |
JP6326080B2 (ja) | 2018-05-16 |
US20160284649A1 (en) | 2016-09-29 |
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