JP2016162879A - 半導体装置の製造方法および半導体装置 - Google Patents
半導体装置の製造方法および半導体装置 Download PDFInfo
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- JP2016162879A JP2016162879A JP2015040075A JP2015040075A JP2016162879A JP 2016162879 A JP2016162879 A JP 2016162879A JP 2015040075 A JP2015040075 A JP 2015040075A JP 2015040075 A JP2015040075 A JP 2015040075A JP 2016162879 A JP2016162879 A JP 2016162879A
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Abstract
【解決手段】基板SUBの上方のゲート電極GEの上方に層間絶縁膜IL1を介して導電性膜を形成し、導電性膜をエッチングすることにより、ゲート電極GEの一方の側の障壁層BAに接続されるソース電極SEと、ゲート電極GEの他方の側の障壁層BAに接続されるドレイン電極DEと、を形成する。この際、ソース電極SEを、ゲート電極GEの上方を超えてドレイン電極DE側まで延在し、ゲート電極GEの上方に、隙間(開口部)Sを有する形状にエッチングする。そして、この後、基板SUBに水素アニールを施す。このように、ソース電極SEのソースフィールドプレート部に隙間Sを設けることにより、水素アニール工程において、チャネルの形成領域に水素の供給を効率的に行うことができる。
【選択図】図2
Description
以下、図面を参照しながら本実施の形態の半導体装置について詳細に説明する。
図1および図2は、本実施の形態の半導体装置の構成を示す断面図である。図3および図4は、本実施の形態の半導体装置の構成を示す平面図である。図1は、例えば、図3のA−A部の断面に対応し、図2は、例えば、図3のB−B部の断面に対応する。
次いで、図5〜図25を参照しながら、本実施の形態の半導体装置の製造方法を説明するとともに、当該半導体装置の構成をより明確にする。図5〜図25は、本実施の形態の半導体装置の製造工程を示す断面図である。
本実施の形態においては、ソース電極SEの隙間(開口部)Sの形成例について説明する。
図27は、本実施の形態の半導体装置の第1例の構成を示す平面図である。なお、本例において、ソース電極SEの隙間(開口部)Sの形状以外の構成は、実施の形態1の半導体装置と同様である。よって、実施の形態1の場合と同様の構造および製造工程については、その説明を省略する。
図28は、本実施の形態の半導体装置の第2例の構成を示す平面図である。なお、本例において、ソース電極SEの隙間(開口部)Sの形状以外の構成は、実施の形態1の半導体装置と同様である。よって、実施の形態1の場合と同様の構造および製造工程については、その説明を省略する。
図29および図30は、本実施の形態の半導体装置の他の例の構成を示す平面図である。
AC 活性領域
BA 障壁層
BU バッファ層
C1D コンタクトホール
C1S コンタクトホール
CH チャネル層
CL 導電性膜
DE ドレイン電極
DP ドレインパッド
GE ゲート電極
GI ゲート絶縁膜
GL ゲート線
GP ゲートパッド
IF 絶縁膜
IFM 絶縁膜
IL1 層間絶縁膜
ISO 素子分離領域
Ld 距離
Ls 距離
OA1 開口領域
OA2 開口領域
PR1 フォトレジスト膜
PR2 フォトレジスト膜
PR3 フォトレジスト膜
PR4 フォトレジスト膜
PR7 フォトレジスト膜
PRO 保護絶縁膜
S 隙間(開口部)
SUB 基板
SE ソース電極
SP ソースパッド
T 溝
Claims (15)
- (a)基板の上方に、第1窒化物半導体層を形成する工程、
(b)前記第1窒化物半導体層上に、前記第1窒化物半導体層より電子親和力が小さい第2窒化物半導体層を形成する工程、
(c)前記第2窒化物半導体層および前記第1窒化物半導体層をエッチングすることにより、前記第2窒化物半導体層を貫通し、前記第1窒化物半導体層の途中まで到達する溝を形成する工程、
(d)前記溝上にゲート絶縁膜を介して形成され、第1方向に延在するゲート電極を形成する工程、
(e)前記ゲート電極上に第1絶縁膜を介して導電性膜を形成する工程、
(f)前記導電性膜をエッチングすることにより、前記ゲート電極の一方の側の前記第2窒化物半導体層に接続される第1電極と、前記ゲート電極の他方の側の前記第2窒化物半導体層に接続される第2電極と、を形成する工程、
(g)前記(f)工程の後、前記基板を水素雰囲気下で熱処理する工程、
を有し、
前記(f)工程で形成される前記第1電極は、前記第1方向と交差する第2方向において、前記ゲート電極の上方を超えて前記第2電極側まで延在し、開口部を有する、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
(h)前記第1電極および前記第2電極の上方に第2絶縁膜を形成する工程を有し、
前記(g)工程は、前記(h)工程の前に行われる、半導体装置の製造方法。 - 請求項2記載の半導体装置の製造方法において、
前記(h)工程は、
(h1)前記第1電極および前記第2電極上に第1膜を形成する工程、
(h2)前記第1膜上に第2膜を形成する工程、
を有し、
前記(g)工程は、前記(h1)工程と前記(h2)工程の間に行われる、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(e)工程は、
(e1)前記ゲート電極の両側の前記第1絶縁膜をエッチングすることによりコンタクトホールを形成する工程、
(e2)前記コンタクトホールおよび前記第1絶縁膜上に、前記導電性膜を形成する工程、
を有する、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記開口部は、前記ゲート電極の上方に配置される、半導体装置の製造方法。 - 請求項5記載の半導体装置の製造方法において、
前記開口部が複数設けられる、半導体装置の製造方法。 - 請求項6記載の半導体装置の製造方法において、
前記複数の開口部のそれぞれの前記第2方向の幅は、前記ゲート電極の前記第2方向の幅より大きい、半導体装置の製造方法。 - 請求項6記載の半導体装置の製造方法において、
前記複数の開口部のそれぞれの前記第2方向の幅は、前記溝の前記第2方向の幅より大きく、前記ゲート電極の前記第2方向の幅より小さい、半導体装置の製造方法。 - 請求項5記載の半導体装置の製造方法において、
前記開口部の前記第2方向の幅は、前記溝の前記第2方向の幅より大きく、前記ゲート電極の前記第2方向の幅より小さく、
前記開口部の前記第1方向の長さは、前記溝の前記第1方向の長さより長い、半導体装置の製造方法。 - 基板の上方に形成された第1窒化物半導体層と、
前記第1窒化物半導体層上に形成され、前記第1窒化物半導体層より電子親和力が小さい第2窒化物半導体層と、
前記第2窒化物半導体層を貫通し、前記第1窒化物半導体層の途中まで到達する溝と、
前記第2窒化物半導体層上に、ゲート絶縁膜を介して形成され、第1方向に延在するゲート電極と、
前記ゲート電極の一方の側の前記第2窒化物半導体層に接続される第1電極と、
前記ゲート電極の他方の側の前記第2窒化物半導体層に接続される第2電極と、
を有し、
前記第1電極は、前記ゲート電極の上方に第1絶縁膜を介して形成され、前記第1方向と交差する第2方向において、前記ゲート電極の上方を超えて前記第2電極側まで延在し、開口部を有する、半導体装置。 - 請求項10記載の半導体装置において、
前記開口部は、前記ゲート電極の上方に配置される、半導体装置。 - 請求項11記載の半導体装置において、
前記開口部が複数設けられる、半導体装置。 - 請求項12記載の半導体装置において、
前記複数の開口部のそれぞれの前記第2方向の幅は、前記ゲート電極の前記第2方向の幅より大きい、半導体装置。 - 請求項12記載の半導体装置において、
前記複数の開口部のそれぞれの前記第2方向の幅は、前記溝の前記第2方向の幅より大きく、前記ゲート電極の前記第2方向の幅より小さい、半導体装置。 - 請求項11記載の半導体装置において、
前記開口部の前記第2方向の幅は、前記溝の前記第2方向の幅より大きく、前記ゲート電極の前記第2方向の幅より小さく、
前記開口部の前記第1方向の長さは、前記溝の前記第1方向の長さより長い、半導体装置。
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US10256100B2 (en) | 2019-04-09 |
JP6468886B2 (ja) | 2019-02-13 |
CN105938799B (zh) | 2021-04-06 |
CN105938799A (zh) | 2016-09-14 |
US20160260615A1 (en) | 2016-09-08 |
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