JP2015526896A5 - - Google Patents
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- JP2015526896A5 JP2015526896A5 JP2015520329A JP2015520329A JP2015526896A5 JP 2015526896 A5 JP2015526896 A5 JP 2015526896A5 JP 2015520329 A JP2015520329 A JP 2015520329A JP 2015520329 A JP2015520329 A JP 2015520329A JP 2015526896 A5 JP2015526896 A5 JP 2015526896A5
- Authority
- JP
- Japan
- Prior art keywords
- boom
- arm
- robots
- drive
- web
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261668118P | 2012-07-05 | 2012-07-05 | |
| US61/668,118 | 2012-07-05 | ||
| PCT/US2013/047034 WO2014008009A1 (en) | 2012-07-05 | 2013-06-21 | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015526896A JP2015526896A (ja) | 2015-09-10 |
| JP2015526896A5 true JP2015526896A5 (https=) | 2016-08-04 |
| JP6285926B2 JP6285926B2 (ja) | 2018-02-28 |
Family
ID=49878649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015520329A Active JP6285926B2 (ja) | 2012-07-05 | 2013-06-21 | ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9033644B2 (https=) |
| JP (1) | JP6285926B2 (https=) |
| KR (1) | KR102153608B1 (https=) |
| CN (1) | CN104428884B (https=) |
| TW (1) | TWI577510B (https=) |
| WO (1) | WO2014008009A1 (https=) |
Families Citing this family (31)
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| KR101778519B1 (ko) | 2009-01-11 | 2017-09-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법 |
| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
| CN111489987A (zh) | 2013-03-15 | 2020-08-04 | 应用材料公司 | 基板沉积系统、机械手移送设备及用于电子装置制造的方法 |
| US9548231B2 (en) * | 2013-06-05 | 2017-01-17 | Persimmon Technologies, Corp. | Robot and adaptive placement system and method |
| US10328580B2 (en) * | 2013-08-09 | 2019-06-25 | Persimmon Technologies Corporation | Reduced footprint substrate transport vacuum platform |
| US10233033B2 (en) * | 2013-11-27 | 2019-03-19 | Diebotics Ip, Llc | Multiple axis work-piece tranfser apparatus |
| US9724834B2 (en) | 2014-01-05 | 2017-08-08 | Applied Materials, Inc. | Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing |
| WO2016172003A1 (en) * | 2015-04-20 | 2016-10-27 | Applied Materials, Inc. | Buffer chamber wafer heating mechanism and supporting robot |
| US9799544B2 (en) | 2015-10-23 | 2017-10-24 | Applied Materials, Inc. | Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing |
| TWI724971B (zh) | 2016-06-28 | 2021-04-11 | 美商應用材料股份有限公司 | 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法 |
| US11270904B2 (en) * | 2016-07-12 | 2022-03-08 | Brooks Automation Us, Llc | Substrate processing apparatus |
| US10453725B2 (en) | 2017-09-19 | 2019-10-22 | Applied Materials, Inc. | Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same |
| US10943805B2 (en) | 2018-05-18 | 2021-03-09 | Applied Materials, Inc. | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
| JP7183635B2 (ja) * | 2018-08-31 | 2022-12-06 | 東京エレクトロン株式会社 | 基板搬送機構、基板処理装置及び基板搬送方法 |
| US11850742B2 (en) | 2019-06-07 | 2023-12-26 | Applied Materials, Inc. | Dual robot including splayed end effectors and systems and methods including same |
| US11574826B2 (en) * | 2019-07-12 | 2023-02-07 | Applied Materials, Inc. | High-density substrate processing systems and methods |
| KR102696424B1 (ko) * | 2019-07-12 | 2024-08-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 동시 기판 이송을 위한 로봇 |
| WO2021011229A1 (en) | 2019-07-12 | 2021-01-21 | Applied Materials, Inc. | Robot for simultaneous substrate transfer |
| US11117265B2 (en) | 2019-07-12 | 2021-09-14 | Applied Materials, Inc. | Robot for simultaneous substrate transfer |
| US11443973B2 (en) | 2019-07-12 | 2022-09-13 | Applied Materials, Inc. | Robot for simultaneous substrate transfer |
| US11569111B2 (en) | 2019-12-02 | 2023-01-31 | Brooks Automation Us, Llc | Substrate processing apparatus |
| TWI851868B (zh) * | 2020-01-23 | 2024-08-11 | 美商布魯克斯自動機械美國公司 | 基板運送設備 |
| US12046499B2 (en) * | 2020-02-05 | 2024-07-23 | Brooks Automation Us, Llc | Substrate processing apparatus |
| KR20230002355A (ko) * | 2020-03-02 | 2023-01-05 | 퍼시몬 테크놀로지스 코포레이션 | 소형 횡단 로봇 |
| CN114305708A (zh) * | 2020-09-30 | 2022-04-12 | 上海微创医疗机器人（集团）股份有限公司 | 悬吊盘摆位机构及手术机器人 |
| CN114305709A (zh) * | 2020-09-30 | 2022-04-12 | 上海微创医疗机器人（集团）股份有限公司 | 悬吊盘摆位机构及手术机器人 |
| WO2022197996A1 (en) * | 2021-03-18 | 2022-09-22 | Persimmon Technologies Corporation | Distributed-architecture robot with multiple linkages |
| KR102348261B1 (ko) * | 2021-05-31 | 2022-01-10 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
| US20250259872A1 (en) * | 2024-02-12 | 2025-08-14 | Applied Materials, Inc. | Swapper for a cluster tool |
| KR102729360B1 (ko) * | 2024-08-16 | 2024-11-13 | (주) 티로보틱스 | 진공 챔버 내에서 기판을 이송하는 기판 이송 장치 |
| WO2026074618A1 (ja) * | 2024-10-01 | 2026-04-09 | 株式会社安川電機 | ロボット、ロボットシステム、及び半導体製造装置 |
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| US9076830B2 (en) | 2011-11-03 | 2015-07-07 | Applied Materials, Inc. | Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm |
| US20130149076A1 (en) | 2011-12-12 | 2013-06-13 | Applied Materials, Inc. | Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
| US9117865B2 (en) * | 2012-04-12 | 2015-08-25 | Applied Materials, Inc. | Robot systems, apparatus, and methods having independently rotatable waists |
| CN111489987A (zh) * | 2013-03-15 | 2020-08-04 | 应用材料公司 | 基板沉积系统、机械手移送设备及用于电子装置制造的方法 |
-
2013
- 2013-06-21 WO PCT/US2013/047034 patent/WO2014008009A1/en not_active Ceased
- 2013-06-21 KR KR1020157003085A patent/KR102153608B1/ko active Active
- 2013-06-21 US US13/923,741 patent/US9033644B2/en active Active
- 2013-06-21 CN CN201380035639.7A patent/CN104428884B/zh active Active
- 2013-06-21 JP JP2015520329A patent/JP6285926B2/ja active Active
- 2013-06-26 TW TW102122742A patent/TWI577510B/zh active
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