JP6285926B2 - ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法 - Google Patents

ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法 Download PDF

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Publication number
JP6285926B2
JP6285926B2 JP2015520329A JP2015520329A JP6285926B2 JP 6285926 B2 JP6285926 B2 JP 6285926B2 JP 2015520329 A JP2015520329 A JP 2015520329A JP 2015520329 A JP2015520329 A JP 2015520329A JP 6285926 B2 JP6285926 B2 JP 6285926B2
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Prior art keywords
boom
web
drive
pilot
extending
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Japanese (ja)
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JP2015526896A5 (https=
JP2015526896A (ja
Inventor
ジェフリー シー． ハジェンズ，
ジェフリー シー． ハジェンズ，
イズヤ クレマーマン，
イズヤ クレマーマン，
ジェフリー エー． ブロダイン，
ジェフリー エー． ブロダイン，
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Program-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y10T74/20335—Wrist

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2015520329A 2012-07-05 2013-06-21 ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法 Active JP6285926B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261668118P 2012-07-05 2012-07-05
US61/668,118 2012-07-05
PCT/US2013/047034 WO2014008009A1 (en) 2012-07-05 2013-06-21 Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems

Publications (3)

Publication Number Publication Date
JP2015526896A JP2015526896A (ja) 2015-09-10
JP2015526896A5 JP2015526896A5 (https=) 2016-08-04
JP6285926B2 true JP6285926B2 (ja) 2018-02-28

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JP2015520329A Active JP6285926B2 (ja) 2012-07-05 2013-06-21 ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法

Country Status (6)

Country Link
US (1) US9033644B2 (https=)
JP (1) JP6285926B2 (https=)
KR (1) KR102153608B1 (https=)
CN (1) CN104428884B (https=)
TW (1) TWI577510B (https=)
WO (1) WO2014008009A1 (https=)

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Also Published As

Publication number Publication date
KR102153608B1 (ko) 2020-09-08
JP2015526896A (ja) 2015-09-10
US20140010625A1 (en) 2014-01-09
TWI577510B (zh) 2017-04-11
US9033644B2 (en) 2015-05-19
WO2014008009A1 (en) 2014-01-09
TW201410414A (zh) 2014-03-16
KR20150038000A (ko) 2015-04-08
CN104428884B (zh) 2017-10-24
CN104428884A (zh) 2015-03-18

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