CN104428884B - 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法 - Google Patents

吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法 Download PDF

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Publication number
CN104428884B
CN104428884B CN201380035639.7A CN201380035639A CN104428884B CN 104428884 B CN104428884 B CN 104428884B CN 201380035639 A CN201380035639 A CN 201380035639A CN 104428884 B CN104428884 B CN 104428884B
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web
suspension rod
drive
arm
driven
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CN104428884A (zh
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杰弗里·C·赫金斯
伊贾·克雷默曼
杰弗里·A·布罗丁
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Program-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y10T74/20335—Wrist

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201380035639.7A 2012-07-05 2013-06-21 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法 Active CN104428884B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261668118P 2012-07-05 2012-07-05
US61/668,118 2012-07-05
PCT/US2013/047034 WO2014008009A1 (en) 2012-07-05 2013-06-21 Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems

Publications (2)

Publication Number Publication Date
CN104428884A CN104428884A (zh) 2015-03-18
CN104428884B true CN104428884B (zh) 2017-10-24

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Family Applications (1)

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CN201380035639.7A Active CN104428884B (zh) 2012-07-05 2013-06-21 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法

Country Status (6)

Country Link
US (1) US9033644B2 (https=)
JP (1) JP6285926B2 (https=)
KR (1) KR102153608B1 (https=)
CN (1) CN104428884B (https=)
TW (1) TWI577510B (https=)
WO (1) WO2014008009A1 (https=)

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Also Published As

Publication number Publication date
KR102153608B1 (ko) 2020-09-08
JP2015526896A (ja) 2015-09-10
US20140010625A1 (en) 2014-01-09
JP6285926B2 (ja) 2018-02-28
TWI577510B (zh) 2017-04-11
US9033644B2 (en) 2015-05-19
WO2014008009A1 (en) 2014-01-09
TW201410414A (zh) 2014-03-16
KR20150038000A (ko) 2015-04-08
CN104428884A (zh) 2015-03-18

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