TWI577510B - 吊桿驅動裝置、多重手臂機器人裝置、電子設備處理系統及在電子設備製造系統中用於運送基板的方法 - Google Patents

吊桿驅動裝置、多重手臂機器人裝置、電子設備處理系統及在電子設備製造系統中用於運送基板的方法 Download PDF

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Publication number
TWI577510B
TWI577510B TW102122742A TW102122742A TWI577510B TW I577510 B TWI577510 B TW I577510B TW 102122742 A TW102122742 A TW 102122742A TW 102122742 A TW102122742 A TW 102122742A TW I577510 B TWI577510 B TW I577510B
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TW
Taiwan
Prior art keywords
boom
driving
connecting plate
component
driven
Prior art date
Application number
TW102122742A
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English (en)
Chinese (zh)
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TW201410414A (zh
Inventor
哈德俊傑佛利Ｃ
克瑞摩曼易茲亞
布羅汀傑佛瑞Ａ
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應用材料股份有限公司
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Publication of TW201410414A publication Critical patent/TW201410414A/zh
Application granted granted Critical
Publication of TWI577510B publication Critical patent/TWI577510B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Program-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements
    • Y10T74/20335—Wrist

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW102122742A 2012-07-05 2013-06-26 吊桿驅動裝置、多重手臂機器人裝置、電子設備處理系統及在電子設備製造系統中用於運送基板的方法 TWI577510B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261668118P 2012-07-05 2012-07-05

Publications (2)

Publication Number Publication Date
TW201410414A TW201410414A (zh) 2014-03-16
TWI577510B true TWI577510B (zh) 2017-04-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW102122742A TWI577510B (zh) 2012-07-05 2013-06-26 吊桿驅動裝置、多重手臂機器人裝置、電子設備處理系統及在電子設備製造系統中用於運送基板的方法

Country Status (6)

Country Link
US (1) US9033644B2 (https=)
JP (1) JP6285926B2 (https=)
KR (1) KR102153608B1 (https=)
CN (1) CN104428884B (https=)
TW (1) TWI577510B (https=)
WO (1) WO2014008009A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI851868B (zh) * 2020-01-23 2024-08-11 美商布魯克斯自動機械美國公司 基板運送設備

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101778519B1 (ko) 2009-01-11 2017-09-15 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
US9190306B2 (en) * 2012-11-30 2015-11-17 Lam Research Corporation Dual arm vacuum robot
CN111489987A (zh) 2013-03-15 2020-08-04 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法
US9548231B2 (en) * 2013-06-05 2017-01-17 Persimmon Technologies, Corp. Robot and adaptive placement system and method
US10328580B2 (en) * 2013-08-09 2019-06-25 Persimmon Technologies Corporation Reduced footprint substrate transport vacuum platform
US10233033B2 (en) * 2013-11-27 2019-03-19 Diebotics Ip, Llc Multiple axis work-piece tranfser apparatus
US9724834B2 (en) 2014-01-05 2017-08-08 Applied Materials, Inc. Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing
WO2016172003A1 (en) * 2015-04-20 2016-10-27 Applied Materials, Inc. Buffer chamber wafer heating mechanism and supporting robot
US9799544B2 (en) 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US11270904B2 (en) * 2016-07-12 2022-03-08 Brooks Automation Us, Llc Substrate processing apparatus
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
US11574826B2 (en) * 2019-07-12 2023-02-07 Applied Materials, Inc. High-density substrate processing systems and methods
KR102696424B1 (ko) * 2019-07-12 2024-08-16 어플라이드 머티어리얼스, 인코포레이티드 동시 기판 이송을 위한 로봇
WO2021011229A1 (en) 2019-07-12 2021-01-21 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11117265B2 (en) 2019-07-12 2021-09-14 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11443973B2 (en) 2019-07-12 2022-09-13 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11569111B2 (en) 2019-12-02 2023-01-31 Brooks Automation Us, Llc Substrate processing apparatus
US12046499B2 (en) * 2020-02-05 2024-07-23 Brooks Automation Us, Llc Substrate processing apparatus
KR20230002355A (ko) * 2020-03-02 2023-01-05 퍼시몬 테크놀로지스 코포레이션 소형 횡단 로봇
CN114305708A (zh) * 2020-09-30 2022-04-12 上海微创医疗机器人（集团）股份有限公司 悬吊盘摆位机构及手术机器人
CN114305709A (zh) * 2020-09-30 2022-04-12 上海微创医疗机器人（集团）股份有限公司 悬吊盘摆位机构及手术机器人
WO2022197996A1 (en) * 2021-03-18 2022-09-22 Persimmon Technologies Corporation Distributed-architecture robot with multiple linkages
KR102348261B1 (ko) * 2021-05-31 2022-01-10 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
US20250259872A1 (en) * 2024-02-12 2025-08-14 Applied Materials, Inc. Swapper for a cluster tool
KR102729360B1 (ko) * 2024-08-16 2024-11-13 (주) 티로보틱스 진공 챔버 내에서 기판을 이송하는 기판 이송 장치
WO2026074618A1 (ja) * 2024-10-01 2026-04-09 株式会社安川電機 ロボット、ロボットシステム、及び半導体製造装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010036398A1 (en) * 1998-12-30 2001-11-01 Christopher A. Hofmeister Substrate transport apparatus with multiple arms on a common axis of rotation
TW200720054A (en) * 2005-09-12 2007-06-01 Husky Injection Molding Molded article handling device
US8016542B2 (en) * 2007-05-31 2011-09-13 Applied Materials, Inc. Methods and apparatus for extending the reach of a dual scara robot linkage
US20120141235A1 (en) * 2010-11-10 2012-06-07 Brooks Automation, Inc. Dual arm robot

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4597708A (en) 1984-06-04 1986-07-01 Tencor Instruments Wafer handling apparatus
JPH0825151B2 (ja) 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
JPH07142551A (ja) 1993-11-20 1995-06-02 Tokyo Electron Ltd 搬送アーム装置及びこれを用いた処理室集合装置
US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
US5954472A (en) 1996-07-15 1999-09-21 Brooks Automation, Inc. Batch loader arm
JP3757016B2 (ja) * 1997-02-20 2006-03-22 ローツェ株式会社 ハンドリング用ロボット
JP3735175B2 (ja) 1997-03-04 2006-01-18 大日本スクリーン製造株式会社 基板処理装置
JPH1116981A (ja) 1997-06-20 1999-01-22 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH11277467A (ja) 1998-03-25 1999-10-12 Mecs Corp 薄型基板搬送ロボット
US6547510B1 (en) * 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
JP2000072248A (ja) 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
US6543306B1 (en) * 1998-12-04 2003-04-08 Daihen Corporation Conveying device
US6601468B2 (en) 2000-10-24 2003-08-05 Innovative Robotic Solutions Drive system for multiple axis robot arm
JP2002158272A (ja) 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
JP2002166376A (ja) 2000-11-30 2002-06-11 Hirata Corp 基板搬送用ロボット
JP4682378B2 (ja) 2000-12-05 2011-05-11 川崎重工業株式会社 ダブルアームおよびそれを備えたロボット
JP4435443B2 (ja) 2001-04-17 2010-03-17 大日本スクリーン製造株式会社 基板搬送装置および基板搬送方法
US7891935B2 (en) * 2002-05-09 2011-02-22 Brooks Automation, Inc. Dual arm robot
JP4245387B2 (ja) 2003-03-19 2009-03-25 東京エレクトロン株式会社 基板搬送装置及び基板処理装置
KR100582697B1 (ko) 2003-07-16 2006-05-23 동경 엘렉트론 주식회사 피처리 기판의 반송 장치 및 회전 위치를 검출하는 기능을갖는 구동 기구
KR100583724B1 (ko) 2003-10-29 2006-05-25 삼성전자주식회사 기판 이송 장치
JP4276534B2 (ja) 2003-12-26 2009-06-10 株式会社ダイヘン 搬送ロボット
US8376685B2 (en) 2004-06-09 2013-02-19 Brooks Automation, Inc. Dual scara arm
US20060216137A1 (en) 2004-07-02 2006-09-28 Katsunori Sakata Carrying apparatus and carrying control method for sheet-like substrate
CN1942288B (zh) 2005-02-12 2010-12-22 应用材料公司 一种多轴真空电机组件
WO2006109791A1 (ja) 2005-04-11 2006-10-19 Nidec Sankyo Corporation 多関節型ロボット
JP4648161B2 (ja) 2005-11-14 2011-03-09 平田機工株式会社 ダブルアーム列式基板搬送用ロボット
WO2007061603A2 (en) 2005-11-21 2007-05-31 Applied Materials, Inc. Methods and apparatus for transferring substrates during electronic device manufacturing
KR101341241B1 (ko) * 2006-01-13 2013-12-12 나부테스코 가부시키가이샤 냉각순환통로를 구비한 기판반송용 로봇의 구동장치
KR100758298B1 (ko) 2006-03-03 2007-09-12 삼성전자주식회사 기판 처리 장치 및 방법
JP4930949B2 (ja) 2006-05-29 2012-05-16 株式会社アルバック 基板搬送装置
US7695232B2 (en) 2006-06-15 2010-04-13 Applied Materials, Inc. Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
CN101535010B (zh) 2006-08-11 2013-02-27 应用材料公司 用于机械手肘关节组件的方法和装置
JP4973267B2 (ja) 2007-03-23 2012-07-11 東京エレクトロン株式会社 基板搬送装置、基板搬送モジュール、基板搬送方法及び記憶媒体
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
JP4970128B2 (ja) 2007-04-27 2012-07-04 日本電産サンキョー株式会社 産業用ロボット及び集合処理装置
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
WO2008140728A2 (en) * 2007-05-08 2008-11-20 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
WO2010081009A2 (en) 2009-01-11 2010-07-15 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof
KR101778519B1 (ko) * 2009-01-11 2017-09-15 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
JP5480562B2 (ja) * 2009-08-26 2014-04-23 日本電産サンキョー株式会社 産業用ロボット
CN102686367B (zh) * 2009-12-28 2015-05-20 株式会社爱发科 驱动装置及输送装置
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
US9076829B2 (en) 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
US20130149076A1 (en) 2011-12-12 2013-06-13 Applied Materials, Inc. Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US9117865B2 (en) * 2012-04-12 2015-08-25 Applied Materials, Inc. Robot systems, apparatus, and methods having independently rotatable waists
CN111489987A (zh) * 2013-03-15 2020-08-04 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010036398A1 (en) * 1998-12-30 2001-11-01 Christopher A. Hofmeister Substrate transport apparatus with multiple arms on a common axis of rotation
TW200720054A (en) * 2005-09-12 2007-06-01 Husky Injection Molding Molded article handling device
US8016542B2 (en) * 2007-05-31 2011-09-13 Applied Materials, Inc. Methods and apparatus for extending the reach of a dual scara robot linkage
US20120141235A1 (en) * 2010-11-10 2012-06-07 Brooks Automation, Inc. Dual arm robot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI851868B (zh) * 2020-01-23 2024-08-11 美商布魯克斯自動機械美國公司 基板運送設備

Also Published As

Publication number Publication date
KR102153608B1 (ko) 2020-09-08
JP2015526896A (ja) 2015-09-10
US20140010625A1 (en) 2014-01-09
JP6285926B2 (ja) 2018-02-28
US9033644B2 (en) 2015-05-19
WO2014008009A1 (en) 2014-01-09
TW201410414A (zh) 2014-03-16
KR20150038000A (ko) 2015-04-08
CN104428884B (zh) 2017-10-24
CN104428884A (zh) 2015-03-18

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