JP2017503666A5 - - Google Patents

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JP2017503666A5
JP2017503666A5 JP2016544532A JP2016544532A JP2017503666A5 JP 2017503666 A5 JP2017503666 A5 JP 2017503666A5 JP 2016544532 A JP2016544532 A JP 2016544532A JP 2016544532 A JP2016544532 A JP 2016544532A JP 2017503666 A5 JP2017503666 A5 JP 2017503666A5
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Japan
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pilot
upper arm
coupled
pulley
rotation
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JP2016544532A
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Japanese (ja)
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JP2017503666A (ja
JP6550391B2 (ja
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Priority claimed from PCT/US2014/072438 external-priority patent/WO2015103089A1/en
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JP2016544532A 2014-01-05 2014-12-26 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法 Active JP6550391B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461923701P 2014-01-05 2014-01-05
US61/923,701 2014-01-05
PCT/US2014/072438 WO2015103089A1 (en) 2014-01-05 2014-12-26 Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing

Publications (3)

Publication Number Publication Date
JP2017503666A JP2017503666A (ja) 2017-02-02
JP2017503666A5 true JP2017503666A5 (https=) 2018-02-22
JP6550391B2 JP6550391B2 (ja) 2019-07-24

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JP2016544532A Active JP6550391B2 (ja) 2014-01-05 2014-12-26 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法

Country Status (6)

Country Link
US (1) US9724834B2 (https=)
JP (1) JP6550391B2 (https=)
KR (1) KR102323370B1 (https=)
CN (1) CN105848836B (https=)
TW (1) TWI641458B (https=)
WO (1) WO2015103089A1 (https=)

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US9799544B2 (en) 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
EP4699745A3 (en) * 2016-08-30 2026-04-29 Board of Regents of the University of Nebraska Robotic device with compact joint design and an additional degree of freedom
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US11574830B2 (en) * 2018-03-16 2023-02-07 Brooks Automation Us, Llc Substrate transport apparatus
US10943805B2 (en) * 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
TWI797461B (zh) * 2019-07-26 2023-04-01 日商新川股份有限公司 封裝裝置
TWI851868B (zh) * 2020-01-23 2024-08-11 美商布魯克斯自動機械美國公司 基板運送設備
JP7542960B2 (ja) * 2020-02-07 2024-09-02 川崎重工業株式会社 水平多関節ロボット及びそれを備えた基板搬送システム
GR20200100357A (el) 2020-06-23 2022-01-13 Παναγιωτης Βασιλειου Ζαραφωνιτης Μηχανισμος μεταδοσεως ατερμονης περιστροφης μεταξυ ακινητου πλαισιου και περιστρεφομενου φορεα αναξαρτητως της ατερμονης περιστροφης του φορεα
CN112754663B (zh) * 2021-01-06 2025-12-05 深圳康诺思腾科技有限公司 机械臂及具有其的机器人
CN114227663B (zh) * 2021-12-30 2024-10-01 航天科工智能机器人有限责任公司 一种机械臂
USD1089348S1 (en) * 2022-11-11 2025-08-19 Dimitrije Stojanovski Robotic arm assembly
TWI881640B (zh) * 2022-12-28 2025-04-21 日商川崎重工業股份有限公司 基板搬送機器人
JP2025152928A (ja) * 2024-03-28 2025-10-10 セイコーエプソン株式会社 ロボットおよびロボットシステム

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