KR102323370B1 - 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들 - Google Patents

전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들 Download PDF

Info

Publication number
KR102323370B1
KR102323370B1 KR1020167021436A KR20167021436A KR102323370B1 KR 102323370 B1 KR102323370 B1 KR 102323370B1 KR 1020167021436 A KR1020167021436 A KR 1020167021436A KR 20167021436 A KR20167021436 A KR 20167021436A KR 102323370 B1 KR102323370 B1 KR 102323370B1
Authority
KR
South Korea
Prior art keywords
rotation
forearm
coupled
pilot
upper arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020167021436A
Other languages
English (en)
Korean (ko)
Other versions
KR20160106140A (ko
Inventor
엘지아 크레메르만
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20160106140A publication Critical patent/KR20160106140A/ko
Application granted granted Critical
Publication of KR102323370B1 publication Critical patent/KR102323370B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Program-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • H01L21/67706—
    • H01L21/67742—
    • H01L21/67748—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3306—Horizontal transfer of a single workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20323—Robotic arm including flaccid drive element

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020167021436A 2014-01-05 2014-12-26 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들 Active KR102323370B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461923701P 2014-01-05 2014-01-05
US61/923,701 2014-01-05
PCT/US2014/072438 WO2015103089A1 (en) 2014-01-05 2014-12-26 Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing

Publications (2)

Publication Number Publication Date
KR20160106140A KR20160106140A (ko) 2016-09-09
KR102323370B1 true KR102323370B1 (ko) 2021-11-05

Family

ID=53493938

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167021436A Active KR102323370B1 (ko) 2014-01-05 2014-12-26 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들

Country Status (6)

Country Link
US (1) US9724834B2 (https=)
JP (1) JP6550391B2 (https=)
KR (1) KR102323370B1 (https=)
CN (1) CN105848836B (https=)
TW (1) TWI641458B (https=)
WO (1) WO2015103089A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6053757B2 (ja) * 2012-03-29 2016-12-27 株式会社アルバック 多関節ロボット、搬送装置
US9799544B2 (en) 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
EP4699745A3 (en) * 2016-08-30 2026-04-29 Board of Regents of the University of Nebraska Robotic device with compact joint design and an additional degree of freedom
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US11574830B2 (en) * 2018-03-16 2023-02-07 Brooks Automation Us, Llc Substrate transport apparatus
US10943805B2 (en) * 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
TWI797461B (zh) * 2019-07-26 2023-04-01 日商新川股份有限公司 封裝裝置
TWI851868B (zh) * 2020-01-23 2024-08-11 美商布魯克斯自動機械美國公司 基板運送設備
JP7542960B2 (ja) * 2020-02-07 2024-09-02 川崎重工業株式会社 水平多関節ロボット及びそれを備えた基板搬送システム
GR20200100357A (el) 2020-06-23 2022-01-13 Παναγιωτης Βασιλειου Ζαραφωνιτης Μηχανισμος μεταδοσεως ατερμονης περιστροφης μεταξυ ακινητου πλαισιου και περιστρεφομενου φορεα αναξαρτητως της ατερμονης περιστροφης του φορεα
CN112754663B (zh) * 2021-01-06 2025-12-05 深圳康诺思腾科技有限公司 机械臂及具有其的机器人
CN114227663B (zh) * 2021-12-30 2024-10-01 航天科工智能机器人有限责任公司 一种机械臂
USD1089348S1 (en) * 2022-11-11 2025-08-19 Dimitrije Stojanovski Robotic arm assembly
TWI881640B (zh) * 2022-12-28 2025-04-21 日商川崎重工業股份有限公司 基板搬送機器人
JP2025152928A (ja) * 2024-03-28 2025-10-10 セイコーエプソン株式会社 ロボットおよびロボットシステム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004528995A (ja) * 2000-10-24 2004-09-24 イノベイティブ・ロボティック・ソリューションズ 多軸ロボットアームのための駆動システム

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316184A (ja) * 1988-06-14 1989-12-21 Mitsubishi Electric Corp 産業用ロボット
JPH05193741A (ja) * 1992-01-17 1993-08-03 Toshiba Corp 真空チャンバ用搬送装置
US5765444A (en) 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
US6121743A (en) 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
JP2002158272A (ja) 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
US6737826B2 (en) 2001-07-13 2004-05-18 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
US7891935B2 (en) 2002-05-09 2011-02-22 Brooks Automation, Inc. Dual arm robot
CN1902031A (zh) 2003-11-10 2007-01-24 布卢希弗特科技公司 用于处理基于真空的半导体处理系统中的工件的方法和系统
US8376685B2 (en) 2004-06-09 2013-02-19 Brooks Automation, Inc. Dual scara arm
CN1942288B (zh) 2005-02-12 2010-12-22 应用材料公司 一种多轴真空电机组件
WO2007061603A2 (en) 2005-11-21 2007-05-31 Applied Materials, Inc. Methods and apparatus for transferring substrates during electronic device manufacturing
CN101535010B (zh) 2006-08-11 2013-02-27 应用材料公司 用于机械手肘关节组件的方法和装置
WO2008111410A1 (ja) * 2007-03-14 2008-09-18 Kabushiki Kaisha Yaskawa Denki 基板搬送ロボット
CN103862463B (zh) 2007-05-31 2017-08-15 应用材料公司 延伸双scara机械手连接装置的伸出距离的方法及设备
US7972097B2 (en) * 2007-07-12 2011-07-05 Dwayne S. Elrod Rigid tapping feedback assembly for a milling machine
WO2010081009A2 (en) 2009-01-11 2010-07-15 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof
US8777547B2 (en) * 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
KR101778519B1 (ko) * 2009-01-11 2017-09-15 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
JP2011119556A (ja) 2009-12-07 2011-06-16 Yaskawa Electric Corp 水平多関節ロボットおよびそれを備えた搬送装置
CN102452080A (zh) 2010-10-27 2012-05-16 鸿富锦精密工业（深圳）有限公司 机器人臂部件
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
US20130149076A1 (en) 2011-12-12 2013-06-13 Applied Materials, Inc. Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
JP5472283B2 (ja) 2011-12-21 2014-04-16 株式会社安川電機 ロボットのアーム構造およびロボット
JP5729319B2 (ja) 2012-02-01 2015-06-03 株式会社安川電機 ロボット
US9117865B2 (en) * 2012-04-12 2015-08-25 Applied Materials, Inc. Robot systems, apparatus, and methods having independently rotatable waists
WO2014008009A1 (en) 2012-07-05 2014-01-09 Applied Materials, Inc Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems
US9742250B2 (en) 2012-11-30 2017-08-22 Applied Materials, Inc. Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
CN111489987A (zh) 2013-03-15 2020-08-04 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004528995A (ja) * 2000-10-24 2004-09-24 イノベイティブ・ロボティック・ソリューションズ 多軸ロボットアームのための駆動システム

Also Published As

Publication number Publication date
TW201536494A (zh) 2015-10-01
TWI641458B (zh) 2018-11-21
US9724834B2 (en) 2017-08-08
WO2015103089A1 (en) 2015-07-09
CN105848836A (zh) 2016-08-10
JP2017503666A (ja) 2017-02-02
CN105848836B (zh) 2018-03-30
US20150190933A1 (en) 2015-07-09
JP6550391B2 (ja) 2019-07-24
KR20160106140A (ko) 2016-09-09

Similar Documents

Publication Publication Date Title
KR102323370B1 (ko) 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들
US9325228B2 (en) Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
US9033644B2 (en) Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
US8777547B2 (en) Systems, apparatus and methods for transporting substrates
US10814475B2 (en) Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
US8784033B2 (en) Robot systems, apparatus and methods for transporting substrates
US9076830B2 (en) Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
US9076829B2 (en) Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
CN108028215B (zh) 机械手组件、基板处理装置和用于在电子设备制造中传送基板的方法
US20130272823A1 (en) Robot systems, apparatus, and methods having independently rotatable waists

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

X091 Application refused [patent]
AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PX0901 Re-examination

St.27 status event code: A-2-3-E10-E12-rex-PX0901

PX0701 Decision of registration after re-examination

St.27 status event code: A-3-4-F10-F13-rex-PX0701

X701 Decision to grant (after re-examination)
GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

R17 Change to representative recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R17-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R17-X000 Change to representative recorded

St.27 status event code: A-5-5-R10-R17-oth-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000