JP6550391B2 - 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法 - Google Patents

電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法 Download PDF

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Publication number
JP6550391B2
JP6550391B2 JP2016544532A JP2016544532A JP6550391B2 JP 6550391 B2 JP6550391 B2 JP 6550391B2 JP 2016544532 A JP2016544532 A JP 2016544532A JP 2016544532 A JP2016544532 A JP 2016544532A JP 6550391 B2 JP6550391 B2 JP 6550391B2
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Prior art keywords
pilot
upper arm
forearm
drive
drive pulley
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Japanese (ja)
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JP2017503666A5 (https=
JP2017503666A (ja
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イズヤ クレマーマン，
イズヤ クレマーマン，
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Program-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3306—Horizontal transfer of a single workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20323—Robotic arm including flaccid drive element

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2016544532A 2014-01-05 2014-12-26 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法 Active JP6550391B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461923701P 2014-01-05 2014-01-05
US61/923,701 2014-01-05
PCT/US2014/072438 WO2015103089A1 (en) 2014-01-05 2014-12-26 Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing

Publications (3)

Publication Number Publication Date
JP2017503666A JP2017503666A (ja) 2017-02-02
JP2017503666A5 JP2017503666A5 (https=) 2018-02-22
JP6550391B2 true JP6550391B2 (ja) 2019-07-24

Family

ID=53493938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016544532A Active JP6550391B2 (ja) 2014-01-05 2014-12-26 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法

Country Status (6)

Country Link
US (1) US9724834B2 (https=)
JP (1) JP6550391B2 (https=)
KR (1) KR102323370B1 (https=)
CN (1) CN105848836B (https=)
TW (1) TWI641458B (https=)
WO (1) WO2015103089A1 (https=)

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US9799544B2 (en) 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
EP4699745A3 (en) * 2016-08-30 2026-04-29 Board of Regents of the University of Nebraska Robotic device with compact joint design and an additional degree of freedom
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US11574830B2 (en) * 2018-03-16 2023-02-07 Brooks Automation Us, Llc Substrate transport apparatus
US10943805B2 (en) * 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
TWI797461B (zh) * 2019-07-26 2023-04-01 日商新川股份有限公司 封裝裝置
TWI851868B (zh) * 2020-01-23 2024-08-11 美商布魯克斯自動機械美國公司 基板運送設備
JP7542960B2 (ja) * 2020-02-07 2024-09-02 川崎重工業株式会社 水平多関節ロボット及びそれを備えた基板搬送システム
GR20200100357A (el) 2020-06-23 2022-01-13 Παναγιωτης Βασιλειου Ζαραφωνιτης Μηχανισμος μεταδοσεως ατερμονης περιστροφης μεταξυ ακινητου πλαισιου και περιστρεφομενου φορεα αναξαρτητως της ατερμονης περιστροφης του φορεα
CN112754663B (zh) * 2021-01-06 2025-12-05 深圳康诺思腾科技有限公司 机械臂及具有其的机器人
CN114227663B (zh) * 2021-12-30 2024-10-01 航天科工智能机器人有限责任公司 一种机械臂
USD1089348S1 (en) * 2022-11-11 2025-08-19 Dimitrije Stojanovski Robotic arm assembly
TWI881640B (zh) * 2022-12-28 2025-04-21 日商川崎重工業股份有限公司 基板搬送機器人
JP2025152928A (ja) * 2024-03-28 2025-10-10 セイコーエプソン株式会社 ロボットおよびロボットシステム

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Also Published As

Publication number Publication date
TW201536494A (zh) 2015-10-01
KR102323370B1 (ko) 2021-11-05
TWI641458B (zh) 2018-11-21
US9724834B2 (en) 2017-08-08
WO2015103089A1 (en) 2015-07-09
CN105848836A (zh) 2016-08-10
JP2017503666A (ja) 2017-02-02
CN105848836B (zh) 2018-03-30
US20150190933A1 (en) 2015-07-09
KR20160106140A (ko) 2016-09-09

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