JP2015509283A5 - - Google Patents
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- Publication number
- JP2015509283A5 JP2015509283A5 JP2014548204A JP2014548204A JP2015509283A5 JP 2015509283 A5 JP2015509283 A5 JP 2015509283A5 JP 2014548204 A JP2014548204 A JP 2014548204A JP 2014548204 A JP2014548204 A JP 2014548204A JP 2015509283 A5 JP2015509283 A5 JP 2015509283A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- silicon
- etched
- etching
- silicon surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims 36
- 239000002184 metal Substances 0.000 claims 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 33
- 238000000034 method Methods 0.000 claims 32
- 229910052710 silicon Inorganic materials 0.000 claims 31
- 239000010703 silicon Substances 0.000 claims 31
- 238000005530 etching Methods 0.000 claims 12
- 238000000151 deposition Methods 0.000 claims 6
- 239000000203 mixture Substances 0.000 claims 6
- -1 fluoride ions Chemical class 0.000 claims 3
- 229910021645 metal ion Inorganic materials 0.000 claims 3
- 239000007800 oxidant agent Substances 0.000 claims 3
- 238000004070 electrodeposition Methods 0.000 claims 2
- 238000009472 formulation Methods 0.000 claims 2
- 230000001590 oxidative effect Effects 0.000 claims 2
- 239000011863 silicon-based powder Substances 0.000 claims 2
- 239000002904 solvent Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 229910001963 alkali metal nitrate Inorganic materials 0.000 claims 1
- DVARTQFDIMZBAA-UHFFFAOYSA-O ammonium nitrate Chemical class [NH4+].[O-][N+]([O-])=O DVARTQFDIMZBAA-UHFFFAOYSA-O 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 239000011530 conductive current collector Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910001512 metal fluoride Inorganic materials 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229910021426 porous silicon Inorganic materials 0.000 claims 1
- 150000003839 salts Chemical class 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1122315.3A GB201122315D0 (en) | 2011-12-23 | 2011-12-23 | Etched silicon structures, method of forming etched silicon structures and uses thereof |
| GB1122315.3 | 2011-12-23 | ||
| PCT/GB2012/053241 WO2013093504A2 (en) | 2011-12-23 | 2012-12-21 | Etched silicon structures, method of forming etched silicon structures and uses thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015509283A JP2015509283A (ja) | 2015-03-26 |
| JP2015509283A5 true JP2015509283A5 (cg-RX-API-DMAC7.html) | 2016-02-12 |
Family
ID=45573043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014548204A Pending JP2015509283A (ja) | 2011-12-23 | 2012-12-21 | エッチングされたシリコン、エッチングされたシリコン構造を形成する方法及びその使用 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20140335411A1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2794954A2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2015509283A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20140113929A (cg-RX-API-DMAC7.html) |
| GB (2) | GB201122315D0 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013093504A2 (cg-RX-API-DMAC7.html) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201205178D0 (en) * | 2012-03-23 | 2012-05-09 | Nexeon Ltd | Etched silicon structures, method of forming etched silicon structures and uses thereof |
| JP6028969B2 (ja) * | 2012-08-24 | 2016-11-24 | 国立大学法人大阪大学 | 結晶基板に孔を形成する方法、並びに結晶基板内に配線や配管を有する機能性デバイス |
| US20150380583A1 (en) * | 2013-01-30 | 2015-12-31 | Advanced Silicon Group, Inc. | Necklaces of silicon nanowires |
| WO2015023760A1 (en) * | 2013-08-14 | 2015-02-19 | Board Of Regents, The University Of Texas System | Methods of fabricating silicon nanowires and devices containing silicon nanowires |
| US20160208404A1 (en) * | 2013-08-30 | 2016-07-21 | Hewlett-Packard Development Company, L.P. | Substrate Etch |
| US9695515B2 (en) | 2013-08-30 | 2017-07-04 | Hewlett-Packard Development Company, L.P. | Substrate etch |
| WO2015030803A1 (en) * | 2013-08-30 | 2015-03-05 | Hewlett-Packard Development Company, Lp | Substrate etch |
| WO2015065395A1 (en) * | 2013-10-30 | 2015-05-07 | Hewlett-Packard Development Company, L.P. | Nonparallel island etching |
| CN105682769A (zh) * | 2013-10-30 | 2016-06-15 | 惠普发展公司，有限责任合伙企业 | 岛蚀刻的过滤通道 |
| KR101588577B1 (ko) * | 2014-06-11 | 2016-01-28 | 한국표준과학연구원 | 대면적의 수직 정렬된 갈륨비소 반도체 나노선 어레이 제작 공정 |
| JP6311508B2 (ja) * | 2014-07-14 | 2018-04-18 | 住友金属鉱山株式会社 | 非水電解質二次電池用負極活物質及びその製造方法 |
| KR101620981B1 (ko) * | 2014-11-11 | 2016-05-16 | 연세대학교 산학협력단 | 기판 식각 방법 |
| US10707526B2 (en) | 2015-03-27 | 2020-07-07 | New Dominion Enterprises Inc. | All-inorganic solvents for electrolytes |
| KR101671627B1 (ko) * | 2015-05-06 | 2016-11-01 | 경희대학교 산학협력단 | 그래핀을 촉매로 한 실리콘의 화학적 식각 방법 |
| JP6193321B2 (ja) * | 2015-09-01 | 2017-09-06 | 株式会社東芝 | エッチング方法、物品の製造方法、及びエッチング装置 |
| CN109072451B (zh) | 2016-03-18 | 2021-08-03 | 麻省理工学院 | 纳米多孔半导体材料及其制造 |
| US10507466B2 (en) * | 2016-04-27 | 2019-12-17 | International Business Machines Corporation | Metal assisted chemical etching for fabricating high aspect ratio and straight silicon nanopillar arrays for sorting applications |
| US10707531B1 (en) | 2016-09-27 | 2020-07-07 | New Dominion Enterprises Inc. | All-inorganic solvents for electrolytes |
| KR101960589B1 (ko) * | 2017-02-20 | 2019-03-21 | 연세대학교 산학협력단 | 벌크 패턴의 습식 형성 방법 및 이를 위한 식각 조성물 |
| US10610621B2 (en) * | 2017-03-21 | 2020-04-07 | International Business Machines Corporation | Antibacterial medical implant surface |
| JP6363245B2 (ja) * | 2017-03-24 | 2018-07-25 | 株式会社東芝 | エッチング方法、物品及び半導体装置の製造方法、並びにエッチング液 |
| KR101809985B1 (ko) * | 2017-03-30 | 2017-12-18 | 와이엠티 주식회사 | 다공성 구리박의 제조방법 및 이를 이용한 다공성 구리박 |
| KR102824535B1 (ko) * | 2017-11-28 | 2025-06-23 | 더 보드 오브 리젠츠 오브 더 유니버시티 오브 텍사스 시스템 | 촉매 유도 패턴 전사 기술 |
| JP2019140225A (ja) | 2018-02-09 | 2019-08-22 | 株式会社東芝 | エッチング方法、半導体チップの製造方法及び物品の製造方法 |
| WO2019195719A1 (en) | 2018-04-05 | 2019-10-10 | Massachusetts Institute Of Technology | Porous and nanoporous semiconductor materials and manufacture thereof |
| KR102582119B1 (ko) * | 2018-12-26 | 2023-09-25 | 한국전기연구원 | 실리콘 나노선을 구비한 이차전지용 음극 활물질 및 그 제조 방법 |
| FR3095721B1 (fr) * | 2019-05-02 | 2022-01-07 | Commissariat Energie Atomique | Dispositif de stockage et procédé de fabrication |
| US11024842B2 (en) | 2019-06-27 | 2021-06-01 | Graphenix Development, Inc. | Patterned anodes for lithium-based energy storage devices |
| KR102622412B1 (ko) | 2019-07-05 | 2024-01-09 | 삼성전자주식회사 | 관통 홀을 포함하는 반도체 패키지 및 이의 제조 방법 |
| CA3280652A1 (en) | 2019-08-13 | 2025-10-30 | Graphenix Development, Inc. | Anodes for lithium-based energy storage devices, and methods for making same |
| CA3148530A1 (en) | 2019-08-20 | 2021-02-25 | Graphenix Development, Inc. | Structured anodes for lithium-based energy storage devices |
| WO2021188452A1 (en) * | 2020-03-16 | 2021-09-23 | 1366 Technologies, Inc. | High temperature acid etch for silicon |
| DE102020124532A1 (de) * | 2020-09-21 | 2022-03-24 | Technische Universität Hamburg-Harburg | Hierarchisch poröse struktur und prozess zur herstellung derselbigen |
| JP7516200B2 (ja) * | 2020-10-09 | 2024-07-16 | 株式会社東芝 | エッチング方法、半導体チップの製造方法及び物品の製造方法 |
| CN113252737B (zh) * | 2021-05-08 | 2023-09-12 | 华北水利水电大学 | 一种多孔硅气敏传感器及其制造方法 |
| CN115472813A (zh) * | 2022-09-23 | 2022-12-13 | 昆明理工大学 | 一种锂离子电池多孔硅/金属/碳纳米材料复合负极材料的制备方法 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9919479D0 (en) * | 1999-08-17 | 1999-10-20 | Imperial College | Island arrays |
| WO2004000017A2 (en) * | 2002-06-21 | 2003-12-31 | Montana State University | The use of endophytic fungi to treat plants |
| GB2395059B (en) | 2002-11-05 | 2005-03-16 | Imp College Innovations Ltd | Structured silicon anode |
| US8178165B2 (en) * | 2005-01-21 | 2012-05-15 | The Regents Of The University Of California | Method for fabricating a long-range ordered periodic array of nano-features, and articles comprising same |
| WO2007081381A2 (en) * | 2005-05-10 | 2007-07-19 | The Regents Of The University Of California | Spinodally patterned nanostructures |
| KR100878433B1 (ko) * | 2005-05-18 | 2009-01-13 | 삼성전기주식회사 | 발광소자의 오믹컨택층 제조방법 및 이를 이용한발광소자의 제조방법 |
| GB0601318D0 (en) * | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | Method of etching a silicon-based material |
| GB0713898D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | A method of fabricating structured particles composed of silcon or a silicon-based material and their use in lithium rechargeable batteries |
| JP2009109395A (ja) * | 2007-10-31 | 2009-05-21 | Fujifilm Corp | 微細構造体の作製方法、微細構造体、ラマン分光用デバイス、ラマン分光装置、分析装置、検出装置、および質量分析装置 |
| CN105506590B (zh) * | 2008-03-07 | 2018-01-23 | 国立研究开发法人科学技术振兴机构 | 复合材料及其制造方法和制造装置 |
| US20090236317A1 (en) * | 2008-03-21 | 2009-09-24 | Midwest Research Institute | Anti-reflection etching of silicon surfaces catalyzed with ionic metal solutions |
| WO2009137241A2 (en) | 2008-04-14 | 2009-11-12 | Bandgap Engineering, Inc. | Process for fabricating nanowire arrays |
| GB0817936D0 (en) * | 2008-09-30 | 2008-11-05 | Intrinsiq Materials Global Ltd | Porous materials |
| GB2464158B (en) * | 2008-10-10 | 2011-04-20 | Nexeon Ltd | A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries |
| GB0821186D0 (en) * | 2008-11-19 | 2008-12-24 | Intrinsiq Materials Global Ltd | Gum compositions |
| US8278191B2 (en) * | 2009-03-31 | 2012-10-02 | Georgia Tech Research Corporation | Methods and systems for metal-assisted chemical etching of substrates |
| JP5322173B2 (ja) * | 2009-09-07 | 2013-10-23 | 国立大学法人 宮崎大学 | 微細流路の形成方法 |
| CN102687313A (zh) * | 2009-11-11 | 2012-09-19 | 安普雷斯股份有限公司 | 用于电极制造的中间层 |
| GB0922063D0 (en) * | 2009-12-17 | 2010-02-03 | Intrinsiq Materials Global Ltd | Porous silicon |
| EP2545585A2 (en) * | 2010-03-09 | 2013-01-16 | Board of Regents of the University of Texas System | Porous and non-porous nanostructures |
| KR101195546B1 (ko) * | 2010-05-07 | 2012-10-29 | 국립대학법인 울산과학기술대학교 산학협력단 | 실리콘 나노 와이어의 제조방법 및 이를 이용한 리튬 이차 전지의 제조방법 |
| US20120094192A1 (en) * | 2010-10-14 | 2012-04-19 | Ut-Battelle, Llc | Composite nanowire compositions and methods of synthesis |
| JP6185841B2 (ja) * | 2010-10-22 | 2017-08-23 | アンプリウス、インコーポレイテッド | 電極物質複合構造体、電極およびリチウムイオン電池、ならびに、電極の製造方法 |
| TW201302600A (zh) * | 2011-07-04 | 2013-01-16 | Univ Nat Taiwan Science Tech | 矽奈米線陣列之製作方法 |
| GB201117279D0 (en) * | 2011-10-06 | 2011-11-16 | Nexeon Ltd | Etched silicon structures, method of forming etched silicon structures and uses thereof |
| GB201205178D0 (en) * | 2012-03-23 | 2012-05-09 | Nexeon Ltd | Etched silicon structures, method of forming etched silicon structures and uses thereof |
-
2011
- 2011-12-23 GB GBGB1122315.3A patent/GB201122315D0/en not_active Ceased
-
2012
- 2012-12-21 EP EP12819004.8A patent/EP2794954A2/en not_active Withdrawn
- 2012-12-21 JP JP2014548204A patent/JP2015509283A/ja active Pending
- 2012-12-21 GB GB1223188.2A patent/GB2499701B/en not_active Expired - Fee Related
- 2012-12-21 US US14/367,582 patent/US20140335411A1/en not_active Abandoned
- 2012-12-21 WO PCT/GB2012/053241 patent/WO2013093504A2/en not_active Ceased
- 2012-12-21 KR KR1020147018405A patent/KR20140113929A/ko not_active Withdrawn
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