JP2015070070A5 - - Google Patents

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Publication number
JP2015070070A5
JP2015070070A5 JP2013202123A JP2013202123A JP2015070070A5 JP 2015070070 A5 JP2015070070 A5 JP 2015070070A5 JP 2013202123 A JP2013202123 A JP 2013202123A JP 2013202123 A JP2013202123 A JP 2013202123A JP 2015070070 A5 JP2015070070 A5 JP 2015070070A5
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JP
Japan
Prior art keywords
insulating film
light receiving
semiconductor substrate
film
receiving surface
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JP2013202123A
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English (en)
Japanese (ja)
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JP2015070070A (ja
JP6465545B2 (ja
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Priority claimed from JP2013202123A external-priority patent/JP6465545B2/ja
Priority to JP2013202123A priority Critical patent/JP6465545B2/ja
Priority to TW103129422A priority patent/TWI648845B/zh
Priority to KR20140121980A priority patent/KR20150035397A/ko
Priority to CN201410481987.3A priority patent/CN104517981B/zh
Priority to CN201610624836.8A priority patent/CN106206635B/zh
Priority to CN201810329870.1A priority patent/CN108717940B/zh
Priority to US14/491,375 priority patent/US9337226B2/en
Priority to CN201810329761.XA priority patent/CN108470744B/zh
Priority to CN202010310317.0A priority patent/CN111564461B/zh
Priority to CN201910948015.3A priority patent/CN110797359B/zh
Priority to CN201810330102.8A priority patent/CN108735767A/zh
Publication of JP2015070070A publication Critical patent/JP2015070070A/ja
Priority to US15/079,834 priority patent/US9502454B2/en
Publication of JP2015070070A5 publication Critical patent/JP2015070070A5/ja
Priority to US15/299,220 priority patent/US9893105B2/en
Priority to KR1020170180732A priority patent/KR102183352B1/ko
Priority to US15/865,057 priority patent/US10461110B2/en
Application granted granted Critical
Publication of JP6465545B2 publication Critical patent/JP6465545B2/ja
Priority to US16/567,620 priority patent/US10950644B2/en
Priority to KR1020200136418A priority patent/KR102311825B1/ko
Priority to US17/145,488 priority patent/US11557623B2/en
Priority to KR1020210116015A priority patent/KR102490635B1/ko
Priority to US17/991,184 priority patent/US11862652B2/en
Priority to KR1020230002622A priority patent/KR102664494B1/ko
Priority to US18/235,997 priority patent/US12166058B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013202123A 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器 Expired - Fee Related JP6465545B2 (ja)

Priority Applications (22)

Application Number Priority Date Filing Date Title
JP2013202123A JP6465545B2 (ja) 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器
TW103129422A TWI648845B (zh) 2013-09-27 2014-08-26 影像拾取元件及其製造方法，以及電子裝置
KR20140121980A KR20150035397A (ko) 2013-09-27 2014-09-15 촬상 소자 및 그 제조 방법 및 전자 기기
CN201810330102.8A CN108735767A (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201610624836.8A CN106206635B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201810329870.1A CN108717940B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201410481987.3A CN104517981B (zh) 2013-09-27 2014-09-19 图像拾取元件、制造图像拾取元件的方法以及电子设备
US14/491,375 US9337226B2 (en) 2013-09-27 2014-09-19 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
CN201810329761.XA CN108470744B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN202010310317.0A CN111564461B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201910948015.3A CN110797359B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
US15/079,834 US9502454B2 (en) 2013-09-27 2016-03-24 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
US15/299,220 US9893105B2 (en) 2013-09-27 2016-10-20 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020170180732A KR102183352B1 (ko) 2013-09-27 2017-12-27 촬상 소자 및 그 제조 방법 및 전자 기기
US15/865,057 US10461110B2 (en) 2013-09-27 2018-01-08 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
US16/567,620 US10950644B2 (en) 2013-09-27 2019-09-11 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020200136418A KR102311825B1 (ko) 2013-09-27 2020-10-21 촬상 소자 및 그 제조 방법 및 전자 기기
US17/145,488 US11557623B2 (en) 2013-09-27 2021-01-11 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020210116015A KR102490635B1 (ko) 2013-09-27 2021-09-01 촬상 소자 및 그 제조 방법 및 전자 기기
US17/991,184 US11862652B2 (en) 2013-09-27 2022-11-21 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020230002622A KR102664494B1 (ko) 2013-09-27 2023-01-09 촬상 소자 및 그 제조 방법 및 전자 기기
US18/235,997 US12166058B2 (en) 2013-09-27 2023-08-21 Image pickup element, method of manufacturing image pickup element, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013202123A JP6465545B2 (ja) 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器

Publications (3)

Publication Number Publication Date
JP2015070070A JP2015070070A (ja) 2015-04-13
JP2015070070A5 true JP2015070070A5 (enExample) 2016-04-14
JP6465545B2 JP6465545B2 (ja) 2019-02-06

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JP2013202123A Expired - Fee Related JP6465545B2 (ja) 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器

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US (8) US9337226B2 (enExample)
JP (1) JP6465545B2 (enExample)
KR (5) KR20150035397A (enExample)
CN (7) CN110797359B (enExample)
TW (1) TWI648845B (enExample)

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