JP2011159848A - 固体撮像装置およびその製造方法 - Google Patents
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- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
【解決手段】固体撮像装置1は、入射光を光電変換する受光部20が形成された半導体基板2と、受光部20の入射光が入射する面上に200℃以下で形成された有機化合物として、例えばフッ化ビニリデン系化合物からなる強誘電体層6と、強誘電体層6上に形成された透明電極7とを備え、透明電極7側に負、半導体基板2側に正となる電圧を印加することにより、強誘電体層6が強誘電体を発現する。
【選択図】図2
Description
図1は、本発明の実施の形態に係る固体撮像装置における撮像画素部と周辺回路部の平面レイアウトを示す模式図である。
次に、固体撮像装置の製造方法の一例について説明する。
図5は、本発明の第2の実施の形態に係る固体撮像装置の概略の構成を示す要部断面図である。本実施の形態は、第1の実施の形態において、絶縁膜8、10を省いたものである。
図6は、本発明の第3の実施の形態に係る固体撮像装置の概略の構成を示す要部断面図である。本実施の形態は、第1の実施の形態において、半導体基板2上に強誘電体層6を形成する前に界面準位低減膜16を形成したものである。
図7は、本発明の第4の実施の形態に係る固体撮像装置の概略の構成を示す要部断面図である。本実施の形態は、第1の実施の形態において、周辺回路部4上の強誘電体層6の部分を選択的に取り除いたものである。
図8は、本発明の第5の実施の形態に係る固体撮像装置の概略の構成を示す要部断面図である。本実施の形態は、第1の実施の形態において、周辺回路部4上の強誘電体層6の部分を選択的に強誘電性を消失させたものである。
図9は、本発明の第6の実施の形態に係る固体撮像装置の概略の構成を示す要部断面図である。本実施の形態は、第1の実施の形態において、周辺回路部4上の透明電極7の部分を選択的に取り除いたものである。
本発明の第7の実施の形態に係る固体撮像装置は、第1の実施の形態と同様に、半導体基板2に受光部20および周辺回路部4を形成した後、半導体基板2上に強誘電体層6を形成し、強誘電体層6上に透明電極7を形成する。続いて周辺回路部4上に存在する透明電極7の部分を取り除いたものである。
Claims (5)
- 入射光を光電変換する受光部と、
前記受光部の前記入射光が入射する面上に形成された有機化合物からなる強誘電体層と、
前記強誘電体層上に形成された透明電極とを備えた固体撮像装置。 - 前記強誘電体層は、フッ化ビニリデン系化合物からなる請求項1に記載の固体撮像装置。
- 前記強誘電体層は、200℃以下で形成が可能な材料からなる請求項1に記載の固体撮像装置。
- 半導体基板に入射光を光電変換する受光部を形成し、
前記受光部の前記入射光が入射する面上に有機化合物からなる強誘電体層を形成し、
前記強誘電体層上に透明電極を形成し、
前記透明電極側に負、前記半導体基板に正となる電圧を印加して前記強誘電体層に強誘電性を付与する固体撮像装置の製造方法。 - 前記強誘電体層への強誘電性の付与は、前記強誘電体層を200℃で加熱した後、降温中に前記透明電極側に負、前記半導体基板に正となる電圧を印加して行う請求項4に記載の固体撮像装置の製造方法。
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JP2010020999A JP2011159848A (ja) | 2010-02-02 | 2010-02-02 | 固体撮像装置およびその製造方法 |
US13/017,467 US8624344B2 (en) | 2010-02-02 | 2011-01-31 | Solid state imaging device and method for manufacturing the same |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015037154A (ja) * | 2013-08-15 | 2015-02-23 | ソニー株式会社 | 撮像素子および撮像装置 |
JP2015072981A (ja) * | 2013-10-02 | 2015-04-16 | 大阪瓦斯株式会社 | 有機層含有全固体型太陽電池 |
WO2015079944A1 (ja) * | 2013-11-29 | 2015-06-04 | ソニー株式会社 | 固体撮像素子およびその製造方法、並びに電子機器 |
Families Citing this family (5)
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FR2980304A1 (fr) * | 2011-09-20 | 2013-03-22 | St Microelectronics Crolles 2 | Procede de fabrication d'un capteur d'image eclaire par la face arriere avec couche antireflet |
KR102117995B1 (ko) | 2013-06-07 | 2020-06-03 | 삼성전자주식회사 | 씨모스 이미지 센서 |
JP2015026708A (ja) * | 2013-07-26 | 2015-02-05 | 株式会社東芝 | 固体撮像装置および固体撮像装置の製造方法 |
US11335721B2 (en) * | 2013-11-06 | 2022-05-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backside illuminated image sensor device with shielding layer |
JP6365839B2 (ja) * | 2013-12-11 | 2018-08-01 | セイコーエプソン株式会社 | 固体撮像装置及び画像取得方法 |
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JP2007096129A (ja) * | 2005-09-29 | 2007-04-12 | Kyoto Univ | 分子トランジスタおよびその製造方法、並びにそれを用いた不揮発性メモリおよび圧電センサ |
JP2008147632A (ja) * | 2006-11-13 | 2008-06-26 | Seiko Epson Corp | 有機強誘電体膜の形成方法、記憶素子の製造方法、記憶装置、および電子機器 |
JP2009218438A (ja) * | 2008-03-11 | 2009-09-24 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
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JPS55155322A (en) * | 1979-05-22 | 1980-12-03 | Sumitomo Electric Ind Ltd | Image memory element |
US4250384A (en) * | 1979-08-24 | 1981-02-10 | Pulvari Charles F | Radiant energy systems, memories and thermal imaging methods and apparatus |
TWI413240B (zh) | 2007-05-07 | 2013-10-21 | Sony Corp | A solid-state imaging device, a manufacturing method thereof, and an image pickup device |
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2010
- 2010-02-02 JP JP2010020999A patent/JP2011159848A/ja active Pending
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007096129A (ja) * | 2005-09-29 | 2007-04-12 | Kyoto Univ | 分子トランジスタおよびその製造方法、並びにそれを用いた不揮発性メモリおよび圧電センサ |
JP2008147632A (ja) * | 2006-11-13 | 2008-06-26 | Seiko Epson Corp | 有機強誘電体膜の形成方法、記憶素子の製造方法、記憶装置、および電子機器 |
JP2009218438A (ja) * | 2008-03-11 | 2009-09-24 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015037154A (ja) * | 2013-08-15 | 2015-02-23 | ソニー株式会社 | 撮像素子および撮像装置 |
JP2015072981A (ja) * | 2013-10-02 | 2015-04-16 | 大阪瓦斯株式会社 | 有機層含有全固体型太陽電池 |
WO2015079944A1 (ja) * | 2013-11-29 | 2015-06-04 | ソニー株式会社 | 固体撮像素子およびその製造方法、並びに電子機器 |
US10009564B2 (en) | 2013-11-29 | 2018-06-26 | Sony Semiconductor Solutions Corporation | Solid-state image capturing element, manufacturing method therefor, and electronic device |
US10536659B2 (en) | 2013-11-29 | 2020-01-14 | Sony Semiconductor Solutions Corporation | Solid-state image capturing element, manufacturing method therefor, and electronic device |
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US20110187912A1 (en) | 2011-08-04 |
US8624344B2 (en) | 2014-01-07 |
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