JP6465545B2 - 撮像素子およびその製造方法ならびに電子機器 - Google Patents

撮像素子およびその製造方法ならびに電子機器 Download PDF

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Publication number
JP6465545B2
JP6465545B2 JP2013202123A JP2013202123A JP6465545B2 JP 6465545 B2 JP6465545 B2 JP 6465545B2 JP 2013202123 A JP2013202123 A JP 2013202123A JP 2013202123 A JP2013202123 A JP 2013202123A JP 6465545 B2 JP6465545 B2 JP 6465545B2
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Prior art keywords
insulating film
semiconductor substrate
film
oxide
light receiving
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Expired - Fee Related
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JP2013202123A
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English (en)
Japanese (ja)
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JP2015070070A (ja
JP2015070070A5 (enExample
Inventor
周治 萬田
周治 萬田
晋 檜山
晋 檜山
康幸 志賀
康幸 志賀
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Sony Corp
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Sony Corp
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Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2013202123A priority Critical patent/JP6465545B2/ja
Priority to TW103129422A priority patent/TWI648845B/zh
Priority to KR20140121980A priority patent/KR20150035397A/ko
Priority to CN201610624836.8A priority patent/CN106206635B/zh
Priority to CN201810330102.8A priority patent/CN108735767A/zh
Priority to CN201810329870.1A priority patent/CN108717940B/zh
Priority to CN201410481987.3A priority patent/CN104517981B/zh
Priority to US14/491,375 priority patent/US9337226B2/en
Priority to CN201810329761.XA priority patent/CN108470744B/zh
Priority to CN202010310317.0A priority patent/CN111564461B/zh
Priority to CN201910948015.3A priority patent/CN110797359B/zh
Publication of JP2015070070A publication Critical patent/JP2015070070A/ja
Priority to US15/079,834 priority patent/US9502454B2/en
Publication of JP2015070070A5 publication Critical patent/JP2015070070A5/ja
Priority to US15/299,220 priority patent/US9893105B2/en
Priority to KR1020170180732A priority patent/KR102183352B1/ko
Priority to US15/865,057 priority patent/US10461110B2/en
Publication of JP6465545B2 publication Critical patent/JP6465545B2/ja
Application granted granted Critical
Priority to US16/567,620 priority patent/US10950644B2/en
Priority to KR1020200136418A priority patent/KR102311825B1/ko
Priority to US17/145,488 priority patent/US11557623B2/en
Priority to KR1020210116015A priority patent/KR102490635B1/ko
Priority to US17/991,184 priority patent/US11862652B2/en
Priority to KR1020230002622A priority patent/KR102664494B1/ko
Priority to US18/235,997 priority patent/US12166058B2/en
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182—Colour image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/199—Back-illuminated image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8057—Optical shielding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/813—Electronic components shared by multiple pixels, e.g. one amplifier shared by two pixels

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  • Solid State Image Pick-Up Elements (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
JP2013202123A 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器 Expired - Fee Related JP6465545B2 (ja)

Priority Applications (22)

Application Number Priority Date Filing Date Title
JP2013202123A JP6465545B2 (ja) 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器
TW103129422A TWI648845B (zh) 2013-09-27 2014-08-26 影像拾取元件及其製造方法，以及電子裝置
KR20140121980A KR20150035397A (ko) 2013-09-27 2014-09-15 촬상 소자 및 그 제조 방법 및 전자 기기
CN201810330102.8A CN108735767A (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201610624836.8A CN106206635B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201810329870.1A CN108717940B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201410481987.3A CN104517981B (zh) 2013-09-27 2014-09-19 图像拾取元件、制造图像拾取元件的方法以及电子设备
US14/491,375 US9337226B2 (en) 2013-09-27 2014-09-19 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
CN201810329761.XA CN108470744B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN202010310317.0A CN111564461B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
CN201910948015.3A CN110797359B (zh) 2013-09-27 2014-09-19 摄像装置和电子设备
US15/079,834 US9502454B2 (en) 2013-09-27 2016-03-24 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
US15/299,220 US9893105B2 (en) 2013-09-27 2016-10-20 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020170180732A KR102183352B1 (ko) 2013-09-27 2017-12-27 촬상 소자 및 그 제조 방법 및 전자 기기
US15/865,057 US10461110B2 (en) 2013-09-27 2018-01-08 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
US16/567,620 US10950644B2 (en) 2013-09-27 2019-09-11 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020200136418A KR102311825B1 (ko) 2013-09-27 2020-10-21 촬상 소자 및 그 제조 방법 및 전자 기기
US17/145,488 US11557623B2 (en) 2013-09-27 2021-01-11 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020210116015A KR102490635B1 (ko) 2013-09-27 2021-09-01 촬상 소자 및 그 제조 방법 및 전자 기기
US17/991,184 US11862652B2 (en) 2013-09-27 2022-11-21 Image pickup element, method of manufacturing image pickup element, and electronic apparatus
KR1020230002622A KR102664494B1 (ko) 2013-09-27 2023-01-09 촬상 소자 및 그 제조 방법 및 전자 기기
US18/235,997 US12166058B2 (en) 2013-09-27 2023-08-21 Image pickup element, method of manufacturing image pickup element, and electronic apparatus

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Application Number Priority Date Filing Date Title
JP2013202123A JP6465545B2 (ja) 2013-09-27 2013-09-27 撮像素子およびその製造方法ならびに電子機器

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JP2015070070A JP2015070070A (ja) 2015-04-13
JP2015070070A5 JP2015070070A5 (enExample) 2016-04-14
JP6465545B2 true JP6465545B2 (ja) 2019-02-06

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US (8) US9337226B2 (enExample)
JP (1) JP6465545B2 (enExample)
KR (5) KR20150035397A (enExample)
CN (7) CN110797359B (enExample)
TW (1) TWI648845B (enExample)

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