JP2014112665A - 圧電材料、圧電素子、および電子機器 - Google Patents
圧電材料、圧電素子、および電子機器 Download PDFInfo
- Publication number
- JP2014112665A JP2014112665A JP2013225500A JP2013225500A JP2014112665A JP 2014112665 A JP2014112665 A JP 2014112665A JP 2013225500 A JP2013225500 A JP 2013225500A JP 2013225500 A JP2013225500 A JP 2013225500A JP 2014112665 A JP2014112665 A JP 2014112665A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric material
- piezoelectric element
- electrode
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 181
- 229910052751 metal Inorganic materials 0.000 claims abstract description 47
- 239000002184 metal Substances 0.000 claims abstract description 43
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 29
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims description 73
- 239000000428 dust Substances 0.000 claims description 42
- 238000003384 imaging method Methods 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 29
- 239000013078 crystal Substances 0.000 claims description 28
- 230000007704 transition Effects 0.000 claims description 16
- 238000012546 transfer Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 description 49
- 239000011572 manganese Substances 0.000 description 46
- 238000000034 method Methods 0.000 description 41
- 239000011777 magnesium Substances 0.000 description 40
- 239000011575 calcium Substances 0.000 description 37
- 239000010936 titanium Substances 0.000 description 33
- 239000011135 tin Substances 0.000 description 32
- 238000005245 sintering Methods 0.000 description 29
- 229910052788 barium Inorganic materials 0.000 description 24
- 239000000843 powder Substances 0.000 description 23
- 230000000052 comparative effect Effects 0.000 description 20
- 239000000203 mixture Substances 0.000 description 20
- 239000012071 phase Substances 0.000 description 19
- 229910052719 titanium Inorganic materials 0.000 description 19
- 229910052791 calcium Inorganic materials 0.000 description 18
- 239000000919 ceramic Substances 0.000 description 18
- 229910052726 zirconium Inorganic materials 0.000 description 16
- 239000011230 binding agent Substances 0.000 description 15
- 229910052718 tin Inorganic materials 0.000 description 15
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 14
- 229910002113 barium titanate Inorganic materials 0.000 description 14
- 239000002245 particle Substances 0.000 description 14
- 239000011812 mixed powder Substances 0.000 description 13
- 230000010287 polarization Effects 0.000 description 13
- 239000012298 atmosphere Substances 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 12
- 229910052748 manganese Inorganic materials 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000001301 oxygen Substances 0.000 description 12
- 229910052760 oxygen Inorganic materials 0.000 description 12
- 239000002994 raw material Substances 0.000 description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 11
- 229910052749 magnesium Inorganic materials 0.000 description 11
- 229910021523 barium zirconate Inorganic materials 0.000 description 10
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 238000000465 moulding Methods 0.000 description 9
- 239000002002 slurry Substances 0.000 description 9
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 8
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 8
- 239000004372 Polyvinyl alcohol Substances 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 7
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 7
- 238000009413 insulation Methods 0.000 description 7
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 7
- 229920002451 polyvinyl alcohol Polymers 0.000 description 7
- 229940071182 stannate Drugs 0.000 description 7
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 6
- UOGMEBQRZBEZQT-UHFFFAOYSA-L manganese(2+);diacetate Chemical compound [Mn+2].CC([O-])=O.CC([O-])=O UOGMEBQRZBEZQT-UHFFFAOYSA-L 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 150000002736 metal compounds Chemical class 0.000 description 5
- 230000011514 reflex Effects 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 4
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 4
- GXUARMXARIJAFV-UHFFFAOYSA-L barium oxalate Chemical compound [Ba+2].[O-]C(=O)C([O-])=O GXUARMXARIJAFV-UHFFFAOYSA-L 0.000 description 4
- 229940094800 barium oxalate Drugs 0.000 description 4
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000009694 cold isostatic pressing Methods 0.000 description 4
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000004014 plasticizer Substances 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 229910000019 calcium carbonate Inorganic materials 0.000 description 3
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 3
- 239000000292 calcium oxide Substances 0.000 description 3
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000007606 doctor blade method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000008187 granular material Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000000462 isostatic pressing Methods 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 229940071125 manganese acetate Drugs 0.000 description 3
- 230000028161 membrane depolarization Effects 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 238000004876 x-ray fluorescence Methods 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- SPAGIJMPHSUYSE-UHFFFAOYSA-N Magnesium peroxide Chemical compound [Mg+2].[O-][O-] SPAGIJMPHSUYSE-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- ITHZDDVSAWDQPZ-UHFFFAOYSA-L barium acetate Chemical compound [Ba+2].CC([O-])=O.CC([O-])=O ITHZDDVSAWDQPZ-UHFFFAOYSA-L 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- VSGNNIFQASZAOI-UHFFFAOYSA-L calcium acetate Chemical compound [Ca+2].CC([O-])=O.CC([O-])=O VSGNNIFQASZAOI-UHFFFAOYSA-L 0.000 description 2
- 239000001639 calcium acetate Substances 0.000 description 2
- 229960005147 calcium acetate Drugs 0.000 description 2
- 235000011092 calcium acetate Nutrition 0.000 description 2
- QXDMQSPYEZFLGF-UHFFFAOYSA-L calcium oxalate Chemical compound [Ca+2].[O-]C(=O)C([O-])=O QXDMQSPYEZFLGF-UHFFFAOYSA-L 0.000 description 2
- HNQGTZYKXIXXST-UHFFFAOYSA-N calcium;dioxido(oxo)tin Chemical compound [Ca+2].[O-][Sn]([O-])=O HNQGTZYKXIXXST-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000002772 conduction electron Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000007580 dry-mixing Methods 0.000 description 2
- 230000005621 ferroelectricity Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000001513 hot isostatic pressing Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 2
- 239000001095 magnesium carbonate Substances 0.000 description 2
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 2
- 229910001629 magnesium chloride Inorganic materials 0.000 description 2
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 2
- 239000000347 magnesium hydroxide Substances 0.000 description 2
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 2
- 229960004995 magnesium peroxide Drugs 0.000 description 2
- 239000011656 manganese carbonate Substances 0.000 description 2
- 229940093474 manganese carbonate Drugs 0.000 description 2
- 235000006748 manganese carbonate Nutrition 0.000 description 2
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 2
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- -1 oxide Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000005402 stannate group Chemical group 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000003826 uniaxial pressing Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910004356 Ti Raw Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012612 commercial material Substances 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- MIMDHDXOBDPUQW-UHFFFAOYSA-N dioctyl decanedioate Chemical compound CCCCCCCCOC(=O)CCCCCCCCC(=O)OCCCCCCCC MIMDHDXOBDPUQW-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002847 impedance measurement Methods 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 238000009768 microwave sintering Methods 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
- C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
- C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/634—Polymers
- C04B35/63404—Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C04B35/63416—Polyvinylalcohols [PVA]; Polyvinylacetates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/634—Polymers
- C04B35/63404—Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C04B35/6342—Polyvinylacetals, e.g. polyvinylbutyral [PVB]
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/634—Polymers
- C04B35/63404—Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C04B35/63424—Polyacrylates; Polymethacrylates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3215—Barium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
- C04B2235/3234—Titanates, not containing zirconia
- C04B2235/3236—Alkaline earth titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
- C04B2235/3248—Zirconates or hafnates, e.g. zircon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
- C04B2235/3267—MnO2
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3293—Tin oxides, stannates or oxide forming salts thereof, e.g. indium tin oxide [ITO]
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
- C04B2235/444—Halide containing anions, e.g. bromide, iodate, chlorite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
- C04B2235/449—Organic acids, e.g. EDTA, citrate, acetate, oxalate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6025—Tape casting, e.g. with a doctor blade
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/604—Pressing at temperatures other than sintering temperatures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
- C04B2235/661—Multi-step sintering
- C04B2235/662—Annealing after sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/768—Perovskite structure ABO3
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/346—Titania or titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Composite Materials (AREA)
- Mechanical Engineering (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Geology (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Camera Bodies And Camera Details Or Accessories (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Lens Barrels (AREA)
- Structure And Mechanism Of Cameras (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
【解決手段】 一般式(1)
(Ba1−xCax)a(Ti1−y−zSnyZrz)O3 (1)(1.00≦a≦1.01、0.125≦x≦0.300、0<y≦0.020、0.041≦z≦0.069)
で表わされるペロブスカイト型金属酸化物を主成分とした圧電材料であって、前記金属酸化物にMnが含有されており、前記Mnの含有量が前記金属酸化物100重量部に対して金属換算で0.12重量部以上0.40重量部以下であることを特徴とする圧電材料。
【選択図】 図15
Description
(Ba1−xCax)a(Ti1−y−zSnyZrz)O3 (1)(1.00≦a≦1.01、0.125≦x≦0.300、0<y≦0.020、0.041≦z≦0.069)
で表わされるペロブスカイト型金属酸化物を主成分とした圧電材料であって、前記金属酸化物にMnが含有されており、前記Mnの含有量が前記金属酸化物100重量部に対して金属換算で0.12重量部以上0.40重量部以下であることを特徴とする。
(Ba1−xCax)a(Ti1−y−zSnyZrz)O3 (1)(1.00≦a≦1.01、0.125≦x≦0.300、0<y≦0.020、0.041≦z≦0.069)
で表わされるペロブスカイト型金属酸化物を主成分とした圧電材料であって、前記金属酸化物にMnが含有されており、前記Mnの含有量が前記金属酸化物100重量部に対して金属換算で0.12重量部以上0.40重量部以下であることを特徴とする。
本発明において、ペロブスカイト型金属酸化物とは、岩波理化学辞典 第5版(岩波書店 1998年2月20日発行)に記載されているような、理想的には立方晶構造であるペロブスカイト構造(ペロフスカイト構造とも言う)を持つ金属酸化物を指す。ペロブスカイト構造を持つ金属酸化物は一般にABO3の化学式で表現される。ペロブスカイト型金属酸化物において、元素A、Bは各々イオンの形でAサイト、Bサイトと呼ばれる単位格子の特定の位置を占める。例えば、立方晶系の単位格子であれば、A元素は立方体の頂点、B元素は体心に位置する。O元素は酸素の陰イオンとして立方体の面心位置を占める。
本発明の圧電材料は、前記一般式(1)において、AサイトにおけるBaとCaのモル量とBサイトにおけるTi、ZrおよびSnのモル量の比を示すaは、1.00≦a≦1.01の範囲である。aが1.00より小さいと異常粒成長が生じ易くなり、材料の機械的強度が低下してしまう。一方で、aが1.01より大きくなると粒成長に必要な温度が高くなり過ぎ、一般的な焼成炉で焼結ができなくなる。ここで、「焼結ができない」とは密度が充分な値にならないことや、前記圧電材料内にポアや欠陥が多数存在している状態を指す。より好ましくは1.004≦a≦1.009である。
本発明に係る圧電材料は、前記圧電材料100重量部に対して、副成分としてMgを金属換算で0.10重量部以下含有することが好ましい。前記圧電材料が前記範囲のMgを含有することで、機械的品質係数が向上する。
本発明の圧電材料は、−25℃から100℃において構造相転移点を有さないことが好ましい。
本発明に係る圧電材料は、前記圧電材料を構成する結晶粒の平均円相当径が1μm以上10μm以下であることが好ましい。平均円相当径をこの範囲にすることで、本発明の圧電材料は、良好な圧電特性と機械的強度を有することが可能となる。平均円相当径が1μm未満であると、圧電特性が充分でなくなる恐れがある。一方で、10μmより大きくなると機械的強度が低下する恐れがある。本発明における「円相当径」とは、顕微鏡観察法において一般に言われる「投影面積円相当径」を表し、結晶粒の投影面積と同面積を有する真円の直径を表す。本発明において、この円相当径の測定方法は特に制限されない。例えば圧電材料の表面を偏光顕微鏡や走査型電子顕微鏡で撮影して得られる写真画像を画像処理して求めることができる。対象となる粒子径により最適倍率が異なるため、光学顕微鏡と電子顕微鏡を使い分けても構わない。材料の表面ではなく研磨面や断面の画像から円相当径を求めても良い。
本発明の圧電材料は、前記圧電材料の相対密度が93%以上100%以下であることが好ましい。
本発明に係る圧電材料の製造方法は特に限定されない。
圧電材料を製造する場合は、構成元素を含んだ酸化物、炭酸塩、硝酸塩、蓚酸塩などの固体粉末を常圧下で焼結する一般的な手法を採用することができる。原料としては、Ba化合物、Ca化合物、Ti化合物、Sn化合物、Zr化合物、Mg化合物およびMn化合物といった金属化合物から構成される。
圧電材料の原料粉を造粒する方法は特に限定されないが、造粒粉の粒径をより均一に出来るという観点において、最も好ましい造粒方法はスプレードライ法である。
本発明の一実施形態に係る圧電材料の焼結方法は特に限定されない。
次に、本発明の圧電素子について説明する。
前記圧電素子は一定方向に分極軸が揃っているものであると、より好ましい。分極軸が一定方向に揃っていることで前記圧電素子の圧電定数は大きくなる。
前記圧電素子の圧電定数および機械的品質係数は、市販のインピーダンスアナライザーを用いて得られる共振周波数及び反共振周波数の測定結果から、電子情報技術産業協会規格(JEITA EM−4501)に基づいて、計算により求めることができる。以下、この方法を共振−反共振法と呼ぶ。
次に、本発明の積層圧電素子について説明する。
次に、本発明の液体吐出ヘッドについて説明する。
次に、本発明の液体吐出装置について説明する。本発明の液体吐出装置は、被転写体の載置部と前記液体吐出ヘッドを備えたことを特徴とする。
次に、本発明の超音波モータについて説明する。本発明に係る超音波モータは、前記圧電素子または前記積層圧電素子を配した振動体、前記振動体と接触する移動体とを少なくとも有することを特徴とする。
次に、本発明の光学機器について説明する。本発明の光学機器は、駆動部に前記超音波モータを備えたことを特徴とする。
粒子、粉体、液滴の搬送、除去等で利用される振動装置は、電子機器等で広く使用されている。以下、本発明の振動装置の一つの例として、本発明の圧電素子を用いた塵埃除去装置について説明する。
次に、本発明の撮像装置について説明する。本発明の撮像装置は、前記本発明の塵埃除去装置と撮像素子ユニットとを少なくとも有する撮像装置であって、前記塵埃除去装置の振動板を前記撮像素子ユニットの受光面側に設けた事を特徴とする。図12および図13は本発明の撮像装置の好適な実施形態の一例であるデジタル一眼レフカメラを示す図である。
次に、本発明の電子機器について説明する。本発明の電子機器は、前記圧電素子または前記積層圧電素子を備えた圧電音響部品を配することを特徴とする。
(実施例1の圧電材料)
(Ba1−xCax)a(Ti1−y−zSnyZrz)O3の一般式において、x=0.155、y=0.008、z=0.050、a=1.004で表わすことができる組成((Ba0.845Ca0.155)1.004(Ti0.942Sn0.008Zr0.050)O3)に相当する原料を以下で述べる要領で秤量した。
実施例1で用いたものと同じチタン酸バリウム、チタン酸カルシウム、ジルコン酸カルシウム、スズ酸バリウムを表1に示すモル比になるように秤量した。また、AサイトにおけるBaとCaのモル量とBサイトにおけるTiとSnとZrのモル量との比を示すaを調整するために蓚酸バリウムを表1の値になるように秤量した。これらの秤量粉は、ボールミルを用いて24時間の乾式混合によって混合した。得られた混合粉を造粒するために、混合粉100重量部に対してMn重量が金属換算で表1の重量部になるように酢酸マンガン(II)と、混合粉100重量部に対して3重量部となるPVAバインダーを、それぞれスプレードライヤー装置を用いて混合粉表面に付着させた。なお、実施例20から23には、Mg重量が金属換算でそれぞれ0.0049、0.0099、0.0499、0.0999重量部になるように酸化マグネシウムを混合した。
実施例1から23と同様の工程で、主成分を表1に示すモル比になるように秤量し、ボールミルを用いて乾式混合を24時間行った。得られた混合粉を造粒するために、混合粉100重量部に対してMn重量が金属換算で表1の重量部となる酢酸マンガン(II)と、混合粉100重量部に対して3重量部となるPVAバインダーを、それぞれスプレードライヤー装置を用いて混合粉表面に付着させた。なお、比較例9には副成分としてMgを金属換算で0.4999重量部になるように酸化マグネシウムを混合した。
(実施例1から23の圧電素子)
続いて、実施例1から23の圧電材料を用いて圧電素子を作製した。
次に、比較例1から7の圧電材料を用いて圧電素子を実施例1から23と同様の方法で作製した。
次に圧電素子の耐久性を確認するため、実施例1〜9、比較例3〜4の圧電素子を恒温槽に入れ、25℃→−25℃→50℃→25℃を1サイクルとした温度サイクルを100サイクル繰り返す、サイクル試験を行った。サイクル試験前後の圧電定数d31を評価し、圧電定数の変化率を表5にまとめた。
本発明の積層圧電素子を作製した。
(Ba1−xCax)a(Ti1−y−zSnyZrz)O3の一般式において、x=0.155、y=0.0075、z=0.05、a=1.004で表わすことができる組成((Ba0.845Ca0.155)1.004(Ti0.942Sn0.008Zr0.050)O3)に相当する原料を以下に述べる要領で秤量した。
実施例24と同様の工程で積層圧電素子を作製した。ただし、組成は比較例1と同様のものである。
(実施例1による液体吐出ヘッド)
実施例1の圧電素子を用いて、図3に示される液体吐出ヘッドを作製した。入力した電気信号に追随したインクの吐出が確認された。
実施例1と同じ圧電素子を用いた図3に示される液体吐出ヘッドを用いて、図4に示される液体吐出装置を作製した。入力した電気信号に追随したインクの吐出が被転写体上に確認された。
実施例24と同じ積層圧電素子を用いて、図3に示される液体吐出ヘッドを作製した。入力した電気信号に追随したインクの吐出が確認された。
実施例24と同じ積層圧電素子を用いた図3に示される液体吐出ヘッドを用いて、図4に示される液体吐出装置を作製した。入力した電気信号に追随したインクの吐出が被転写体上に確認された。
実施例11と同じ圧電素子を用いて、図6(a)に示される超音波モータを作製した。交番電圧の印加に応じたモータの回転挙動が確認された。
実施例11と同じ圧電素子を用いた超音波モータを用いて、図8に示される光学機器を作製した。交番電圧の印加に応じたオートフォーカス動作が確認された。
実施例24の積層圧電素子を用いて、図6(b)に示される超音波モータ作製した。交番電圧の印加に応じたモータの回転が確認された。
実施例11と同じ圧電素子を用いて、図9に示される塵埃除去装置を作製した。プラスチック製ビーズを散布し、交番電圧を印加したところ、良好な塵埃除去が確認された。
実施例24と同じ積層圧電素子を用いて、図9に示される塵埃除去装置を作製した。プラスチック製ビーズを散布し、交番電圧を印加したところ、良好な塵埃除去が確認された。
実施例11と同じ圧電素子を用いた塵埃除去装置と撮像素子ユニットを用いて、図13に示される撮像装置を作製した。動作させたところ撮像素子ユニットの表面の塵を良好に除去し、塵欠陥の無い画像が得られた。
実施例11と同じ圧電素子を用いた圧電音響部品を用いて、図14に示される電子機器を作製した。交番電圧の印加に応じたスピーカ動作が確認された。
2 圧電材料部
3 第二の電極
101 圧電素子
102 個別液室
103 振動板
104 液室隔壁
105 吐出口
106 連通孔
107 共通液室
108 バッファ層
1011 第一の電極
1012 圧電材料
1013 第二の電極
201 振動子
202 ロータ
203 出力軸
204 振動子
205 ロータ
206 バネ
2011 弾性体リング
2012 圧電素子
2013 有機系接着剤
2041 金属弾性体
2042 積層圧電素子
310 塵埃除去装置
330 圧電素子
320 振動板
331 圧電材料
332 第1の電極
333 第2の電極
336 第1の電極面
337 第2の電極面
51 第一の電極
53 第二の電極
54 圧電材料層
55 内部電極
501 第一の電極
503 第二の電極
504 圧電材料層
505a 内部電極
505b 内部電極
506a 外部電極
506b 外部電極
601 カメラ本体
602 マウント部
605 ミラーボックス
606 メインミラー
200 シャッタユニット
300 本体シャーシ
400 撮像ユニット
701 前群レンズ
702 後群レンズ(フォーカスレンズ)
711 着脱マウント
712 固定筒
713 直進案内筒
714 前群鏡筒
715 カム環
716 後群鏡筒
717 カムローラ
718 軸ビス
719 ローラ
720 回転伝達環
722 コロ
724 マニュアルフォーカス環
725 超音波モータ
726 波ワッシャ
727 ボールレース
728 フォーカスキー
729 接合部材
732 ワッシャ
733 低摩擦シート
881 液体吐出装置
882 外装
883 外装
884 外装
885 外装
887 外装
890 回復部
891 記録部
892 キャリッジ
896 装置本体
897 自動給送部
898 排出口
899 搬送部
901 光学装置
908 レリーズボタン
909 ストロボ発光部
912 スピーカ
914 マイク
916 補助光部
931 本体
932 ズームレバー
933 電源ボタン
Claims (16)
- 一般式(1)
(Ba1−xCax)a(Ti1−y−zSnyZrz)O3 (1)(1.00≦a≦1.01、0.125≦x≦0.300、0<y≦0.020、0.041≦z≦0.069)
で表わされるペロブスカイト型金属酸化物を主成分とした圧電材料であって、前記金属酸化物にMnが含有されており、前記Mnの含有量が前記金属酸化物100重量部に対して金属換算で0.12重量部以上0.40重量部以下であることを特徴とする圧電材料。 - 前記一般式(1)においてz≦−2y+0.100であることを特徴とする請求項1に記載の圧電材料。
- 前記圧電材料が−25℃から100℃において構造相転移点を有さないことを特徴とする請求項1乃至2のいずれかに記載の圧電材料。
- 前記圧電材料を構成する結晶粒の平均円相当径が1μm以上10μm以下であることを特徴とする請求項1乃至3のいずれかに記載の圧電材料。
- 前記圧電材料の相対密度が93%以上100%以下であることを特徴とする請求項1乃至4のいずれかに記載の圧電材料。
- 前記圧電材料100重量部に対して、副成分としてMgを金属換算で0.10重量部以下含有することを特徴とする請求項1乃至5のいずれかに記載の圧電材料。
- 第一の電極、圧電材料および第二の電極を少なくとも有する圧電素子であって、前記圧電材料が請求項1乃至6のいずれかに記載の圧電材料であることを特徴とする圧電素子。
- 圧電材料層と、内部電極を含む電極層とが交互に積層された積層圧電素子であって、前記圧電材料層が請求項1乃至6のいずれかに記載の圧電材料よりなることを特徴とする積層圧電素子。
- 請求項7に記載の圧電素子または請求項8に記載の積層圧電素子を配した振動部を備えた液室と、前記液室と連通する吐出口を少なくとも有する液体吐出ヘッド。
- 被転写体の載置部と請求項9に記載の液体吐出ヘッドを備えた液体吐出装置。
- 請求項7に記載の圧電素子または請求項8に記載の積層圧電素子を配した振動体と、前記振動体と接触する移動体と、を少なくとも有する超音波モータ。
- 駆動部に請求項11に記載の超音波モータを備えた光学機器。
- 請求項7に記載の圧電素子または請求項8に記載の積層圧電素子を配した振動体を有する振動装置
- 請求項13に記載の振動装置を振動板に配した振動部に備えた塵埃除去装置。
- 請求項14に記載の塵埃除去装置と撮像素子ユニットとを少なくとも有する撮像装置であって、前記塵埃除去装置の振動板を前記撮像素子ユニットの受光面側に設けたを特徴とする撮像装置。
- 請求項7に記載の圧電素子または請求項8に記載の積層圧電素子を備えた圧電音響部品を配した電子機器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013225500A JP6249717B2 (ja) | 2012-11-02 | 2013-10-30 | 圧電材料、圧電素子、および電子機器 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012242782 | 2012-11-02 | ||
JP2012242782 | 2012-11-02 | ||
JP2013225500A JP6249717B2 (ja) | 2012-11-02 | 2013-10-30 | 圧電材料、圧電素子、および電子機器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014112665A true JP2014112665A (ja) | 2014-06-19 |
JP2014112665A5 JP2014112665A5 (ja) | 2016-12-15 |
JP6249717B2 JP6249717B2 (ja) | 2017-12-20 |
Family
ID=49725310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013225500A Active JP6249717B2 (ja) | 2012-11-02 | 2013-10-30 | 圧電材料、圧電素子、および電子機器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9525123B2 (ja) |
EP (1) | EP2897797B1 (ja) |
JP (1) | JP6249717B2 (ja) |
KR (1) | KR101726962B1 (ja) |
CN (1) | CN104768747A (ja) |
TW (1) | TWI545814B (ja) |
WO (1) | WO2014069549A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012141105A1 (ja) * | 2011-04-15 | 2012-10-18 | 株式会社村田製作所 | 圧電体薄膜素子 |
WO2013137369A1 (en) * | 2012-03-16 | 2013-09-19 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic apparatus |
KR101671141B1 (ko) * | 2012-12-21 | 2016-10-31 | 캐논 가부시끼가이샤 | 진동파 구동 장치, 촬상 장치, 광학 기기, 액체 토출 장치 및 전자 기기 |
US9520549B2 (en) * | 2012-12-28 | 2016-12-13 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic apparatus |
JP2015134707A (ja) * | 2013-12-18 | 2015-07-27 | キヤノン株式会社 | 圧電材料、圧電素子および電子機器 |
CN105829265A (zh) * | 2013-12-18 | 2016-08-03 | 佳能株式会社 | 压电材料、压电元件和电子设备 |
KR20160060999A (ko) * | 2014-11-21 | 2016-05-31 | 삼성전기주식회사 | 압전 액추에이터 및 렌즈 모듈 |
JP2017109904A (ja) * | 2015-12-17 | 2017-06-22 | 株式会社村田製作所 | ペロブスカイト型磁器組成物、ペロブスカイト型磁器組成物を含む配合組成物、ペロブスカイト型磁器組成物の製造方法、および積層セラミックコンデンサの製造方法 |
CN106895862A (zh) * | 2017-01-13 | 2017-06-27 | 麦克思商务咨询(深圳)有限公司 | 超声波元件 |
US11201279B2 (en) * | 2017-08-02 | 2021-12-14 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, vibration wave motor, optical apparatus, and electronic apparatus |
CN115925413A (zh) * | 2022-10-11 | 2023-04-07 | 广东奥迪威传感科技股份有限公司 | 压电陶瓷材料及其制备方法和应用 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5361187A (en) * | 1993-03-11 | 1994-11-01 | Ferro Corporation | Ceramic dielectric compositions and capacitors produced therefrom |
JPH09241070A (ja) * | 1996-03-11 | 1997-09-16 | Mitsubishi Materials Corp | 誘電体磁器組成物 |
JP2000277823A (ja) * | 1999-03-24 | 2000-10-06 | Seiko Instruments Inc | 積層圧電振動子およびそれを用いた超音波モータおよび圧電アクチュエータ、ならびに超音波モータおよび圧電アクチュエータを用いた電子機器 |
JP2006287725A (ja) * | 2005-04-01 | 2006-10-19 | Ngk Insulators Ltd | 圧電音響素子及び圧電音響発生装置 |
JP2008085353A (ja) * | 2007-10-19 | 2008-04-10 | Seiko Epson Corp | 圧電体素子及び液体吐出ヘッド |
WO2008068999A1 (ja) * | 2006-12-05 | 2008-06-12 | Murata Manufacturing Co., Ltd. | 誘電体セラミックおよびそれを用いた積層セラミックコンデンサ |
JP2012126636A (ja) * | 2010-11-26 | 2012-07-05 | Canon Inc | 圧電セラミックス、圧電セラミックスの製造方法、圧電素子、液体吐出ヘッド、超音波モータ及び塵埃除去装置 |
JP2012163947A (ja) * | 2011-01-18 | 2012-08-30 | Panasonic Corp | カメラ本体 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0734031B1 (en) * | 1995-03-24 | 2004-06-09 | TDK Corporation | Multilayer varistor |
CN1307666C (zh) | 2001-04-12 | 2007-03-28 | Tdk株式会社 | 多层陶瓷电子元件的制造方法 |
JP3924286B2 (ja) * | 2003-10-31 | 2007-06-06 | Tdk株式会社 | 積層セラミック電子部品の製造方法 |
JP5131595B2 (ja) | 2006-07-07 | 2013-01-30 | 株式会社村田製作所 | 誘電体セラミック、及びセラミック電子部品、並びに積層セラミックコンデンサ |
CN101050118A (zh) | 2007-05-21 | 2007-10-10 | 北京化工大学 | 一种制备钙钛矿陶瓷粉体的方法 |
JP5344456B2 (ja) | 2008-03-11 | 2013-11-20 | 独立行政法人物質・材料研究機構 | 非鉛系圧電材料 |
JP5217997B2 (ja) | 2008-10-20 | 2013-06-19 | Tdk株式会社 | 圧電磁器、振動子及び超音波モータ |
JP5791371B2 (ja) * | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | 圧電材料、圧電素子、液体吐出ヘッドおよび超音波モータ、塵埃除去装置 |
JP6004640B2 (ja) * | 2011-01-07 | 2016-10-12 | キヤノン株式会社 | 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス |
EP2729971B1 (en) | 2011-07-05 | 2017-06-07 | Canon Kabushiki Kaisha | Piezoelectric material |
JP5979992B2 (ja) * | 2011-07-05 | 2016-08-31 | キヤノン株式会社 | 圧電材料 |
CN102531578B (zh) | 2012-01-17 | 2013-06-05 | 聊城大学 | 一种钛酸钡钙-锆钛酸钡-锡钛酸钡三元系无铅压电陶瓷 |
JP5885552B2 (ja) * | 2012-03-21 | 2016-03-15 | キヤノン株式会社 | 振動装置、該振動装置を有する駆動装置、及び光学機器 |
JP6108934B2 (ja) * | 2012-04-24 | 2017-04-05 | キヤノン株式会社 | 圧電セラミックス、圧電素子、超音波モータおよび塵埃除去装置 |
KR101671141B1 (ko) * | 2012-12-21 | 2016-10-31 | 캐논 가부시끼가이샤 | 진동파 구동 장치, 촬상 장치, 광학 기기, 액체 토출 장치 및 전자 기기 |
JP6315883B2 (ja) * | 2012-12-26 | 2018-04-25 | キヤノン株式会社 | 圧電素子、振動波モーター用ステーター |
EP2749550B1 (en) * | 2012-12-28 | 2017-05-17 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic apparatus |
US9520549B2 (en) * | 2012-12-28 | 2016-12-13 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic apparatus |
EP2824091B1 (en) * | 2013-07-12 | 2020-02-19 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic equipment |
JP6362087B2 (ja) * | 2013-07-12 | 2018-07-25 | キヤノン株式会社 | 圧電材料、圧電素子、および電子機器 |
-
2013
- 2013-10-17 TW TW102137504A patent/TWI545814B/zh active
- 2013-10-23 US US14/439,215 patent/US9525123B2/en active Active
- 2013-10-23 WO PCT/JP2013/079475 patent/WO2014069549A1/en active Application Filing
- 2013-10-23 KR KR1020157013548A patent/KR101726962B1/ko active IP Right Grant
- 2013-10-23 EP EP13802122.5A patent/EP2897797B1/en active Active
- 2013-10-23 CN CN201380056974.5A patent/CN104768747A/zh active Pending
- 2013-10-30 JP JP2013225500A patent/JP6249717B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5361187A (en) * | 1993-03-11 | 1994-11-01 | Ferro Corporation | Ceramic dielectric compositions and capacitors produced therefrom |
JPH09241070A (ja) * | 1996-03-11 | 1997-09-16 | Mitsubishi Materials Corp | 誘電体磁器組成物 |
JP2000277823A (ja) * | 1999-03-24 | 2000-10-06 | Seiko Instruments Inc | 積層圧電振動子およびそれを用いた超音波モータおよび圧電アクチュエータ、ならびに超音波モータおよび圧電アクチュエータを用いた電子機器 |
JP2006287725A (ja) * | 2005-04-01 | 2006-10-19 | Ngk Insulators Ltd | 圧電音響素子及び圧電音響発生装置 |
WO2008068999A1 (ja) * | 2006-12-05 | 2008-06-12 | Murata Manufacturing Co., Ltd. | 誘電体セラミックおよびそれを用いた積層セラミックコンデンサ |
JP2008085353A (ja) * | 2007-10-19 | 2008-04-10 | Seiko Epson Corp | 圧電体素子及び液体吐出ヘッド |
JP2012126636A (ja) * | 2010-11-26 | 2012-07-05 | Canon Inc | 圧電セラミックス、圧電セラミックスの製造方法、圧電素子、液体吐出ヘッド、超音波モータ及び塵埃除去装置 |
JP2012163947A (ja) * | 2011-01-18 | 2012-08-30 | Panasonic Corp | カメラ本体 |
Also Published As
Publication number | Publication date |
---|---|
KR101726962B1 (ko) | 2017-04-13 |
TWI545814B (zh) | 2016-08-11 |
EP2897797B1 (en) | 2021-12-22 |
US9525123B2 (en) | 2016-12-20 |
US20150295161A1 (en) | 2015-10-15 |
EP2897797A1 (en) | 2015-07-29 |
WO2014069549A1 (en) | 2014-05-08 |
KR20150080541A (ko) | 2015-07-09 |
TW201419594A (zh) | 2014-05-16 |
CN104768747A (zh) | 2015-07-08 |
JP6249717B2 (ja) | 2017-12-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6567115B2 (ja) | 圧電素子、積層圧電素子、液体吐出ヘッド、液体吐出装置、超音波モータ、光学機器および電子機器 | |
JP6108934B2 (ja) | 圧電セラミックス、圧電素子、超音波モータおよび塵埃除去装置 | |
JP5960305B2 (ja) | 圧電セラミックス、その製造方法、圧電素子、積層圧電素子、液体吐出ヘッド、液体吐出装置、超音波モータ、光学機器、振動装置、塵埃除去装置、撮像装置および電子機器 | |
JP6249717B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6249669B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6202845B2 (ja) | 圧電セラミックス、圧電セラミックスの製造方法、圧電素子および電子機器 | |
JP6362458B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6137888B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6271950B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6180234B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP5911618B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6271949B2 (ja) | 圧電材料、圧電素子および電子機器 | |
JP6380888B2 (ja) | 圧電材料、圧電素子、積層圧電素子、液体吐出ヘッド、液体吐出装置、超音波モータ、光学機器、振動装置、塵埃除去装置、撮像装置、および電子機器 | |
JP6312424B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP6362459B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP2015135957A (ja) | 圧電素子、積層圧電素子、液体吐出装置、超音波モータ | |
JP6562713B2 (ja) | 圧電材料、圧電素子、圧電素子の製造方法、および電子機器 | |
JP2015135958A (ja) | 圧電材料、圧電素子、および電子機器 | |
JP2016006858A (ja) | 圧電材料、圧電素子、圧電素子の製造方法、および電子機器 | |
JP2016006859A (ja) | 圧電材料、圧電素子、および電子機器 | |
JP2016197718A (ja) | 圧電材料、圧電材料の製造方法、圧電素子および電子機器 | |
JP2015134707A (ja) | 圧電材料、圧電素子および電子機器 | |
JP6265656B2 (ja) | 圧電材料、圧電素子、および電子機器 | |
JP2014062035A (ja) | 圧電材料、圧電素子、および電子機器 | |
JP5968412B2 (ja) | 圧電材料、圧電素子および電子機器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161028 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20161028 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170725 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170727 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170921 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171024 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171121 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6249717 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |