JP2014036216A5 - - Google Patents

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Publication number
JP2014036216A5
JP2014036216A5 JP2012178640A JP2012178640A JP2014036216A5 JP 2014036216 A5 JP2014036216 A5 JP 2014036216A5 JP 2012178640 A JP2012178640 A JP 2012178640A JP 2012178640 A JP2012178640 A JP 2012178640A JP 2014036216 A5 JP2014036216 A5 JP 2014036216A5
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JP
Japan
Prior art keywords
pressure
flow rate
processing
processing chamber
gas
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Application number
JP2012178640A
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English (en)
Japanese (ja)
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JP2014036216A (ja
JP6061545B2 (ja
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Priority claimed from JP2012178640A external-priority patent/JP6061545B2/ja
Priority to JP2012178640A priority Critical patent/JP6061545B2/ja
Application filed filed Critical
Priority to KR1020130094066A priority patent/KR20140020782A/ko
Priority to TW102128460A priority patent/TWI547993B/zh
Priority to US13/963,695 priority patent/US8791031B2/en
Publication of JP2014036216A publication Critical patent/JP2014036216A/ja
Priority to KR1020150099498A priority patent/KR101614275B1/ko
Publication of JP2014036216A5 publication Critical patent/JP2014036216A5/ja
Publication of JP6061545B2 publication Critical patent/JP6061545B2/ja
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Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012178640A 2012-08-10 2012-08-10 半導体装置の製造方法、基板処理方法および基板処理装置 Expired - Fee Related JP6061545B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012178640A JP6061545B2 (ja) 2012-08-10 2012-08-10 半導体装置の製造方法、基板処理方法および基板処理装置
KR1020130094066A KR20140020782A (ko) 2012-08-10 2013-08-08 반도체 장치의 제조 방법, 기판 처리 방법 및 기판 처리 장치
TW102128460A TWI547993B (zh) 2012-08-10 2013-08-08 A semiconductor device manufacturing method, a substrate processing method, and a substrate processing apparatus
US13/963,695 US8791031B2 (en) 2012-08-10 2013-08-09 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
KR1020150099498A KR101614275B1 (ko) 2012-08-10 2015-07-14 반도체 장치의 제조 방법, 기판 처리 방법 및 기판 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012178640A JP6061545B2 (ja) 2012-08-10 2012-08-10 半導体装置の製造方法、基板処理方法および基板処理装置

Publications (3)

Publication Number Publication Date
JP2014036216A JP2014036216A (ja) 2014-02-24
JP2014036216A5 true JP2014036216A5 (enExample) 2015-09-17
JP6061545B2 JP6061545B2 (ja) 2017-01-18

Family

ID=50066492

Family Applications (1)

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JP2012178640A Expired - Fee Related JP6061545B2 (ja) 2012-08-10 2012-08-10 半導体装置の製造方法、基板処理方法および基板処理装置

Country Status (4)

Country Link
US (1) US8791031B2 (enExample)
JP (1) JP6061545B2 (enExample)
KR (2) KR20140020782A (enExample)
TW (1) TWI547993B (enExample)

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KR101427726B1 (ko) * 2011-12-27 2014-08-07 가부시키가이샤 히다치 고쿠사이 덴키 기판 처리 장치 및 반도체 장치의 제조 방법
US10100407B2 (en) * 2014-12-19 2018-10-16 Lam Research Corporation Hardware and process for film uniformity improvement
KR102487805B1 (ko) * 2015-04-28 2023-01-12 주성엔지니어링(주) 기판 처리 장치 및 기판 처리 방법
JP6606551B2 (ja) * 2015-08-04 2019-11-13 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法および記録媒体
US11332824B2 (en) 2016-09-13 2022-05-17 Lam Research Corporation Systems and methods for reducing effluent build-up in a pumping exhaust system
US10115607B2 (en) * 2016-09-16 2018-10-30 Applied Materials, Inc. Method and apparatus for wafer outgassing control
JP6763274B2 (ja) * 2016-10-14 2020-09-30 東京エレクトロン株式会社 成膜装置、成膜装置のクリーニング方法及び記憶媒体
JP6864705B2 (ja) * 2018-03-29 2021-04-28 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、制御システム及び半導体装置の製造方法
JP6681452B1 (ja) * 2018-10-19 2020-04-15 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置及び半導体装置の製造方法
KR102032923B1 (ko) * 2019-01-07 2019-10-16 무진전자 주식회사 웨이퍼 처리 장치
KR102208815B1 (ko) * 2019-05-10 2021-01-28 주식회사 뉴파워 프라즈마 기판 처리 시스템의 제어 방법
TWI866102B (zh) * 2019-05-28 2024-12-11 日商國際電氣股份有限公司 半導體裝置的製造方法，基板處理裝置及程式
JP7482720B2 (ja) * 2020-08-28 2024-05-14 東京エレクトロン株式会社 クリーニング方法及び処理装置
JP7420777B2 (ja) * 2021-09-21 2024-01-23 株式会社Kokusai Electric 半導体装置の製造方法、基板処理方法、基板処理装置及びプログラム
CN114005767B (zh) * 2021-10-29 2025-10-10 北京北方华创微电子装备有限公司 半导体热处理设备及其排气装置
CN115440633B (zh) * 2022-10-17 2023-07-11 北京北方华创微电子装备有限公司 半导体工艺设备和排气调节机构
US20250122621A1 (en) * 2023-10-13 2025-04-17 Applied Materials, Inc. Process chamber gas flow improvement

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US6142163A (en) * 1996-03-29 2000-11-07 Lam Research Corporation Method and apparatus for pressure control in vacuum processors
US5758680A (en) * 1996-03-29 1998-06-02 Lam Research Corporation Method and apparatus for pressure control in vacuum processors
JP2003209063A (ja) * 2001-11-08 2003-07-25 Tokyo Electron Ltd 熱処理装置および熱処理方法
JP4797068B2 (ja) * 2006-08-04 2011-10-19 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
JP2008235611A (ja) * 2007-03-21 2008-10-02 Tohoku Univ プラズマ処理装置及びプラズマ処理方法
JP5060916B2 (ja) * 2007-11-05 2012-10-31 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法及び基板処理方法
JP2009218262A (ja) * 2008-03-07 2009-09-24 Omron Corp プラズマ反応炉を用いた電子装置の製造方法
JP2010073823A (ja) * 2008-09-17 2010-04-02 Tokyo Electron Ltd 成膜装置、成膜方法、及びコンピュータ可読記憶媒体
JP2011044446A (ja) * 2009-08-19 2011-03-03 Tokyo Electron Ltd 圧力制御機器、圧力制御方法および基板処理装置
JP2011134781A (ja) * 2009-12-22 2011-07-07 Hitachi Kokusai Electric Inc 半導体装置の製造方法および基板処理装置
JP5470149B2 (ja) * 2010-04-23 2014-04-16 株式会社日立国際電気 基板処理装置、半導体装置の製造方法およびクリーニング方法
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