JP2014007193A - 基板搬送システム - Google Patents
基板搬送システム Download PDFInfo
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- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
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- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
- B65G15/14—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts the load being conveyed between the belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G19/00—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors
- B65G19/02—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors for articles, e.g. for containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
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Abstract
【解決手段】 可動棚21と、可動棚21を下降させる昇降装置22とを含む基板供給装置2と、気体を上方に吹き出す1以上の吹出口35を含み、吹出口35は昇降装置22により可動棚21を下降させると吹出口35から吹き出る気体の圧力によって可動棚21に支持されている基板が浮上するように構成されている浮上装置3と、搬送コンベア40と、搬送コンベア40に立設された爪部41とを含み、吹出口35から吹き出る気体の圧力によって浮上している基板Wを爪部41が搬送方向に押すよう構成されている搬送装置4と、を備える基板搬送システム。
【選択図】図1
Description
<基板搬送システムの全体構成>
図1は、基板搬送システム100の構成例を示す斜視図である。
基板供給装置2は、基板Wが載置される可動棚(収納ケース)21と、可動棚21を上昇及び下降させる昇降装置(下降装置)22とを備える。
なお、本実施の形態においては可動棚21の搬送方向上流側に、移載部105が備えられている。
図3は、基板搬送システム100の基板浮上構造の一例を示す図であり、基板搬送システム100を後方から見た図である。
搬送装置4は、搬送コンベア(搬送部材)40と、搬送コンベア40に立設された爪部41と、搬送コンベア40を搬送方向に移動させる駆動部42とを有する。
また、本実施の形態において、基板搬送システム100は、更に搬送方向に延びる一対のガイド(規制部)50を備えている。ガイド50は、枠体に取り付けられている短冊状の板体である。一対のガイド50は、互いに対向した姿勢で搬送コンベア40の両側、即ち浮上装置3の両側に配設されている。また、一対のガイド50は、基板供給装置2の搬送方向下流側に隣接して設けられ、その間隔は、基板Wの搬送方向と直交する方向の幅よりも若干大きくなるように設定されている。これによって、一対のガイド50が搬送される基板Wの両側方向(鉛直方向から見て搬送方向と直交する方向)の位置を規制している。このように、搬送コンベア40上の基板の水平方向の位置は、爪部41とガイド50とによって規制されているので、基板保持領域47上から外れることなく、受渡位置Pに搬送される。
図4は、基板搬送システム100の制御系統の構成例を概略的に示すブロック図である。以下、図4を参照しながら、基板搬送システム100の制御系統について説明する。
次に、基板搬送システム100の動作例を説明する。これらの動作は、制御装置5が昇降装置22,浮上装置3,搬送装置4及び移載装置112の各駆動装置を制御することによって遂行される。
上記実施の形態においては、移載装置112がカートリッジ110に収納されている基板Wを可動棚21に移載する構成としたがこれに限られるものではない。これに代えて、作業者が手で差し込んでもよい。また、基板Wが収納されている可動棚21と基板Wが搬出された可動棚21とを交換してもよい。
3 浮上装置
4 搬送装置
5 制御装置
21 可動棚
22 昇降装置
23 側壁
24 基板支持部
24a 傾斜面
25 前面開口
26 後面開口
27 上壁
28 下面開口
31 ケース支持部
32 ボールねじ機構
33 ボールねじ
34 スライダ
35 吹出口
36 装置本体
40 搬送コンベア
41 爪部
42 駆動部
45 スプロケット
46 無端ベルト
47 基板保持領域
50 ガイド
55 制御部
56 記憶部
100 基板搬送システム
105 移載部
110 カートリッジ
111 載置台
112 移載装置
121 後壁
123 基板支持部
124 前面開口
125 後面開口
126 基板支持部
130 基台
131 レール
132 可動基部
133 押込アーム
134 押込板
150 移送装置
Claims (4)
- 互いに対向する一対の側壁と、該側壁に設けられ、複数の基板が水平姿勢で且つ上下方向に間隔をあけて並ぶように該複数の基板の両側の端部を支持する複数対の支持部とを有する収納ケースと、前記収納ケースを下降させる下降装置と、を含む基板供給装置と、
鉛直方向から見て少なくとも前記収納ケースの一対の側壁の間から延出するように前記基板の搬送方向に点在又は延在し、気体を上方に吹き出す1以上の吹出口を含み、該1以上の吹出口は前記下降装置により前記収納ケースを下降させると前記吹出口から吹き出る気体の圧力によって前記支持部に支持されている基板が浮上するように構成されている浮上装置と、
鉛直方向から見て、前記基板供給装置の収納ケースの一対の側壁の間を通過し且つ前記浮上装置の前記基板の搬送方向に点在又は延在する1以上の吹出口に沿うように延在する搬送部材と、該搬送部材に前記基板の前記搬送方向の寸法よりも大きい間隔で立設された複数の爪部と、前記搬送部材を前記搬送方向に移動させる駆動部とを含み、前記爪部が前記吹出口から吹き出る気体の圧力によって浮上している基板の搬送方向上流側の端部を搬送方向に押すよう構成されている搬送装置と、を備える基板搬送システム。 - 前記搬送方向に延びる規制部を備え、前記搬送装置によって搬送される基板の両側方向の位置を前記規制部が規制するよう構成されている、請求項1に記載の基板搬送システム。
- 前記規制部は、前記搬送装置の前記搬送方向に点在又は延在する1以上の吹出口の両側に対向して一対設けられている、請求項2に記載の基板搬送システム。
- 前記搬送装置は前記搬送部材としての無端ベルトを一対備え、該一対の無端ベルトは、それぞれの爪部が駆動部により鉛直方向から見て前記搬送方向と直交する方向に並んだ状態で同期して回転するよう構成されている、請求項1乃至3の何れかに記載の基板搬送システム。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012139883A JP6039260B2 (ja) | 2012-06-21 | 2012-06-21 | 基板搬送システム |
KR1020147036788A KR101707090B1 (ko) | 2012-06-21 | 2013-06-10 | 기판 반송 시스템 |
EP13806319.3A EP2866252B1 (en) | 2012-06-21 | 2013-06-10 | Substrate conveying system |
PCT/JP2013/003636 WO2013190800A1 (ja) | 2012-06-21 | 2013-06-10 | 基板搬送システム |
US14/410,532 US9773691B2 (en) | 2012-06-21 | 2013-06-10 | Substrate conveying system |
CN201380030256.0A CN104364891B (zh) | 2012-06-21 | 2013-06-10 | 基板搬运系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2012139883A JP6039260B2 (ja) | 2012-06-21 | 2012-06-21 | 基板搬送システム |
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JP2014007193A true JP2014007193A (ja) | 2014-01-16 |
JP6039260B2 JP6039260B2 (ja) | 2016-12-07 |
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JP2012139883A Active JP6039260B2 (ja) | 2012-06-21 | 2012-06-21 | 基板搬送システム |
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US (1) | US9773691B2 (ja) |
EP (1) | EP2866252B1 (ja) |
JP (1) | JP6039260B2 (ja) |
KR (1) | KR101707090B1 (ja) |
CN (1) | CN104364891B (ja) |
WO (1) | WO2013190800A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2016036019A1 (ko) * | 2014-09-02 | 2016-03-10 | 비아이 이엠티 주식회사 | 기판 이송장치 |
KR101727125B1 (ko) * | 2016-03-02 | 2017-04-14 | (주)지테크 | 기판 등간격 이송장치 |
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JP2018083700A (ja) * | 2016-11-25 | 2018-05-31 | 日本電産サンキョー株式会社 | 基板供給装置の制御方法、および、基板供給回収装置の制御方法 |
KR102350865B1 (ko) * | 2017-02-23 | 2022-01-13 | 주식회사 원익아이피에스 | 기판처리시스템 및 그에 사용되는 기판교환모듈 |
JP2019067948A (ja) * | 2017-10-02 | 2019-04-25 | 川崎重工業株式会社 | 基板搬送装置 |
CN109920748A (zh) * | 2017-12-12 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | 一种大面积玻璃基板装载机 |
CN108100579A (zh) * | 2017-12-15 | 2018-06-01 | 董桂芳 | 一种led固晶机送料机构及送料方法 |
CN108861353B (zh) * | 2018-07-15 | 2019-11-22 | 徐州诚凯知识产权服务有限公司 | 一种建筑太阳能屋顶电池板输送机 |
CN109335684B (zh) * | 2018-09-28 | 2020-07-31 | 芜湖华宇彩晶科技有限公司 | 一种超声波清洗机的屏幕输送装置 |
EP3660888A1 (en) * | 2018-11-29 | 2020-06-03 | JOT Automation Oy | Conveyor arrangement and method for conveying electronic device |
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KR20150021966A (ko) | 2015-03-03 |
US20150311103A1 (en) | 2015-10-29 |
EP2866252A1 (en) | 2015-04-29 |
JP6039260B2 (ja) | 2016-12-07 |
CN104364891B (zh) | 2017-02-22 |
KR101707090B1 (ko) | 2017-02-15 |
EP2866252B1 (en) | 2019-10-02 |
US9773691B2 (en) | 2017-09-26 |
WO2013190800A1 (ja) | 2013-12-27 |
EP2866252A4 (en) | 2016-02-17 |
CN104364891A (zh) | 2015-02-18 |
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