JP2013541191A5 - - Google Patents
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- Publication number
- JP2013541191A5 JP2013541191A5 JP2013526346A JP2013526346A JP2013541191A5 JP 2013541191 A5 JP2013541191 A5 JP 2013541191A5 JP 2013526346 A JP2013526346 A JP 2013526346A JP 2013526346 A JP2013526346 A JP 2013526346A JP 2013541191 A5 JP2013541191 A5 JP 2013541191A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- gate insulating
- polymer
- group
- polycycloolefin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 61
- 229920000642 polymer Polymers 0.000 claims 61
- 239000000203 mixture Substances 0.000 claims 25
- 229920003050 poly-cycloolefin Polymers 0.000 claims 25
- 238000000151 deposition Methods 0.000 claims 10
- 239000002318 adhesion promoter Substances 0.000 claims 8
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000000178 monomer Substances 0.000 claims 7
- 150000001875 compounds Chemical class 0.000 claims 6
- 239000003431 cross linking reagent Substances 0.000 claims 6
- 229910052739 hydrogen Inorganic materials 0.000 claims 6
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 claims 6
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims 6
- 125000000332 coumarinyl group Chemical group O1C(=O)C(=CC2=CC=CC=C12)* 0.000 claims 5
- 239000002904 solvent Substances 0.000 claims 5
- 229940114081 cinnamate Drugs 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 229920002554 vinyl polymer Polymers 0.000 claims 4
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Natural products C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 claims 3
- 239000004593 Epoxy Substances 0.000 claims 3
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 125000000524 functional group Chemical group 0.000 claims 3
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 3
- 125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 claims 3
- 238000006467 substitution reaction Methods 0.000 claims 3
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims 2
- 150000003923 2,5-pyrrolediones Chemical group 0.000 claims 2
- 239000004971 Cross linker Substances 0.000 claims 2
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 claims 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 claims 2
- 238000004132 cross linking Methods 0.000 claims 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 claims 2
- 239000003989 dielectric material Substances 0.000 claims 2
- 125000003700 epoxy group Chemical group 0.000 claims 2
- 229910052731 fluorine Inorganic materials 0.000 claims 2
- 125000005647 linker group Chemical group 0.000 claims 2
- 125000005439 maleimidyl group Chemical group C1(C=CC(N1*)=O)=O 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000011241 protective layer Substances 0.000 claims 2
- 125000006850 spacer group Chemical group 0.000 claims 2
- 125000004642 (C1-C12) alkoxy group Chemical group 0.000 claims 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 claims 1
- 229960000956 coumarin Drugs 0.000 claims 1
- 235000001671 coumarin Nutrition 0.000 claims 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims 1
- 150000002118 epoxides Chemical class 0.000 claims 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 1
- 230000005669 field effect Effects 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- 125000001072 heteroaryl group Chemical group 0.000 claims 1
- 125000005553 heteroaryloxy group Chemical group 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 claims 1
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000002161 passivation Methods 0.000 claims 1
- 125000000538 pentafluorophenyl group Chemical group FC1=C(F)C(F)=C(*)C(F)=C1F 0.000 claims 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 claims 1
- 230000006641 stabilisation Effects 0.000 claims 1
- 238000011105 stabilization Methods 0.000 claims 1
- 239000003381 stabilizer Substances 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10009118.0 | 2010-09-02 | ||
| EP10009118 | 2010-09-02 | ||
| US37979910P | 2010-09-03 | 2010-09-03 | |
| US61/379,799 | 2010-09-03 | ||
| PCT/EP2011/004282 WO2012028279A1 (en) | 2010-09-02 | 2011-08-26 | Gate insulator layer for electronic devices |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017027227A Division JP6334020B2 (ja) | 2010-09-02 | 2017-02-16 | 電子デバイス用のゲート絶縁層 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013541191A JP2013541191A (ja) | 2013-11-07 |
| JP2013541191A5 true JP2013541191A5 (enExample) | 2014-10-16 |
| JP6097216B2 JP6097216B2 (ja) | 2017-03-15 |
Family
ID=44534260
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013526346A Active JP6097216B2 (ja) | 2010-09-02 | 2011-08-26 | 電子デバイス用のゲート絶縁層 |
| JP2017027227A Active JP6334020B2 (ja) | 2010-09-02 | 2017-02-16 | 電子デバイス用のゲート絶縁層 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017027227A Active JP6334020B2 (ja) | 2010-09-02 | 2017-02-16 | 電子デバイス用のゲート絶縁層 |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US9175123B2 (enExample) |
| EP (2) | EP2611841B1 (enExample) |
| JP (2) | JP6097216B2 (enExample) |
| KR (1) | KR101842735B1 (enExample) |
| CN (3) | CN103261250B (enExample) |
| DE (1) | DE112011102917T5 (enExample) |
| GB (1) | GB2497451A (enExample) |
| RU (1) | RU2013114414A (enExample) |
| SG (1) | SG187955A1 (enExample) |
| TW (1) | TWI618723B (enExample) |
| WO (1) | WO2012028279A1 (enExample) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5886189B2 (ja) * | 2009-05-25 | 2016-03-16 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | 架橋可能な誘電体、並びにその製造方法及び使用方法 |
| CN103261250B (zh) * | 2010-09-02 | 2016-11-09 | 默克专利股份有限公司 | 用于电子器件的栅绝缘层 |
| SG188297A1 (en) | 2010-09-02 | 2013-04-30 | Merck Patent Gmbh | Interlayer for electronic devices |
| US9082981B1 (en) | 2012-01-16 | 2015-07-14 | Polyera Corporation | Curable polymeric materials and related electronic devices |
| WO2013120581A1 (en) * | 2012-02-15 | 2013-08-22 | Merck Patent Gmbh | Planarization layer for organic electronic devices |
| KR102082019B1 (ko) * | 2012-04-25 | 2020-04-14 | 메르크 파텐트 게엠베하 | 유기 전자 소자용 뱅크 구조체 |
| US9171961B2 (en) * | 2012-07-11 | 2015-10-27 | Polyera Corporation | Coating materials for oxide thin film transistors |
| US9450187B2 (en) * | 2012-09-04 | 2016-09-20 | Merck Patent Gmbh | Process of surface modification of dielectric structures in organic electronic devices to increase surface energy |
| JP6499966B2 (ja) * | 2012-09-21 | 2019-04-10 | メルク パテント ゲーエムベーハー | 有機半導体電子デバイス |
| WO2014052256A1 (en) | 2012-09-25 | 2014-04-03 | Promerus, Llc | Maleimide containing cycloolefinic polymers and applications thereof |
| KR20150082557A (ko) * | 2012-11-08 | 2015-07-15 | 메르크 파텐트 게엠베하 | 뱅크 구조물을 갖는 유기 전자 디바이스의 제조 방법, 이에 의해 제조된 뱅크 구조물 및 전자 디바이스 |
| US9035287B2 (en) * | 2013-02-01 | 2015-05-19 | Polyera Corporation | Polymeric materials for use in metal-oxide-semiconductor field-effect transistors |
| CN105324408B (zh) * | 2013-06-27 | 2018-06-22 | 巴斯夫欧洲公司 | 作为电介质的复分解聚合物 |
| US9356248B2 (en) * | 2013-08-16 | 2016-05-31 | Palo Alto Research Center Incorporated | Organic thin-film transistor |
| KR101718941B1 (ko) | 2013-09-30 | 2017-03-22 | 주식회사 엘지화학 | 광반응기를 갖는 고리형 올레핀 화합물 및 광반응성 중합체 |
| US9978944B2 (en) | 2014-03-12 | 2018-05-22 | Promerus, Llc | Organic electronic compositions and device thereof |
| JP6118287B2 (ja) * | 2014-03-26 | 2017-04-19 | 富士フイルム株式会社 | 半導体素子及び半導体素子の絶縁層形成用組成物 |
| WO2015170577A1 (ja) * | 2014-05-08 | 2015-11-12 | 富士フイルム株式会社 | 半導体素子及び絶縁層形成用組成物 |
| TWI659046B (zh) | 2015-05-06 | 2019-05-11 | Sumitomo Bakelite Co., Ltd. | 作爲永久介電材料的順丁烯二醯亞胺及環烯烴單體之聚合物 |
| US10147895B2 (en) | 2015-07-13 | 2018-12-04 | Flexterra, Inc. | Curable polymeric materials and their use for fabricating electronic devices |
| EP3345971A4 (en) * | 2015-08-31 | 2019-04-17 | Zeon Corporation | RESIN COMPOSITION |
| DE102015119939A1 (de) * | 2015-11-18 | 2017-05-18 | ALTANA Aktiengesellschaft | Vernetzbare polymere Materialien für dielektrische Schichten in elektronischen Bauteilen |
| TWI684826B (zh) | 2015-11-30 | 2020-02-11 | 日商住友電木股份有限公司 | 可光成像組成物、硬化產物形成方法、硬化產物及包含該硬化產物的光電子或微電子裝置 |
| KR102465353B1 (ko) * | 2015-12-02 | 2022-11-10 | 삼성전자주식회사 | 전계 효과 트랜지스터 및 이를 포함하는 반도체 소자 |
| WO2017140404A1 (en) * | 2016-02-17 | 2017-08-24 | Merck Patent Gmbh | Formulation of an organic functional material |
| EP3433884B1 (en) | 2016-03-22 | 2023-01-11 | Promerus, LLC | Diazirine containing organic electronic compositions and device thereof |
| US10879474B2 (en) * | 2016-05-18 | 2020-12-29 | Promerus, Llc | Organic dielectric layer and organic electronic device |
| TWI732994B (zh) | 2017-02-09 | 2021-07-11 | 日商住友電木股份有限公司 | 光配向膜形成用組成物及由其衍生之ｌｃｄ器件 |
| WO2019130336A1 (en) * | 2017-12-27 | 2019-07-04 | Indian Institute Of Technology, Guwahati | Method for the fabrication of solution process, ultra-low operating voltage, stable organic field effect transistor |
| WO2019130337A1 (en) * | 2017-12-27 | 2019-07-04 | Indian Institute Of Technology, Guwahati | Method for the fabrication of ultralow voltage operated, reduced bias stress, multi-layer dielectric system comprising n-type organic field effect transistors |
| EP3740523B1 (en) | 2018-01-19 | 2024-07-31 | Flexterra, Inc. | Organic dielectric materials and devices including them |
| KR20210028205A (ko) | 2018-06-28 | 2021-03-11 | 메르크 파텐트 게엠베하 | 전자 디바이스의 제조 방법 |
| TWI794520B (zh) * | 2018-06-29 | 2023-03-01 | 日商住友電木股份有限公司 | 作為 3d 列印材料之聚環烯烴單體及由能夠產生光酸之化合物活化之催化劑 |
| US11059938B2 (en) | 2018-10-05 | 2021-07-13 | Industrial Technology Research Institute | Film composition and a film prepared thereby |
| CN109698276A (zh) * | 2018-12-27 | 2019-04-30 | 广州天极电子科技有限公司 | 一种薄膜晶体管器件及其制备方法 |
| WO2020165270A1 (en) | 2019-02-12 | 2020-08-20 | The University Of Southampton | Device comprising piezoelectrically active layer and method for producing such device |
| WO2020243381A1 (en) | 2019-05-31 | 2020-12-03 | Promerus, Llc | Fast photocurable polycycloolefin compositions as optical or 3d printing materials |
| CN111848930B (zh) * | 2020-07-30 | 2021-07-13 | 清华大学 | 可溶性聚苯并呋喃及其制备方法与在合成5-取代苯并呋喃的应用 |
| JP7547899B2 (ja) | 2020-09-28 | 2024-09-10 | 住友ベークライト株式会社 | ワニスおよび樹脂膜 |
| KR102476024B1 (ko) * | 2021-01-19 | 2022-12-08 | 한국화학연구원 | 유기절연체 형성용 조성물 및 이를 포함하는 유기 절연체 및 박막 트랜지스터 |
| DE102021125407A1 (de) | 2021-09-30 | 2023-03-30 | Polymer Competence Center Leoben Gmbh | Verfahren zur Herstellung eines Dielektrikums für einen Kondensator und Verfahren zur Herstellung eines Kondensators und Kondensator |
| CN114316215B (zh) * | 2022-01-27 | 2023-07-04 | 安徽建筑大学 | 一种自交联成炭本征阻燃聚双环戊二烯工程材料及其制备方法 |
| JP2023116922A (ja) * | 2022-02-10 | 2023-08-23 | 住友ベークライト株式会社 | ポリノルボルネンの製造方法、ポリノルボルネン含有溶液、ポリノルボルネン粉末、感光性樹脂組成物、および半導体装置 |
| TW202334271A (zh) * | 2022-02-18 | 2023-09-01 | 美商普羅梅勒斯有限公司 | Romp本體聚合及陽離子聚合型組成物用雙觸媒體系 |
| CN116217805B (zh) * | 2023-01-07 | 2024-08-02 | 中北大学 | 一种降冰片烯基三铵类阳离子聚合物及其制备方法和应用 |
| TW202530282A (zh) * | 2023-09-11 | 2025-08-01 | 美商普羅梅勒斯有限公司 | 微流體裝置用多環烯烴聚合物製ｕｖ－奈米壓印微影裝置 |
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| SG188297A1 (en) * | 2010-09-02 | 2013-04-30 | Merck Patent Gmbh | Interlayer for electronic devices |
| CN103261250B (zh) * | 2010-09-02 | 2016-11-09 | 默克专利股份有限公司 | 用于电子器件的栅绝缘层 |
-
2011
- 2011-08-26 CN CN201180042505.9A patent/CN103261250B/zh active Active
- 2011-08-26 CN CN201510255696.7A patent/CN105038069B/zh active Active
- 2011-08-26 RU RU2013114414/04A patent/RU2013114414A/ru not_active Application Discontinuation
- 2011-08-26 DE DE112011102917T patent/DE112011102917T5/de not_active Withdrawn
- 2011-08-26 KR KR1020137008514A patent/KR101842735B1/ko active Active
- 2011-08-26 SG SG2013013982A patent/SG187955A1/en unknown
- 2011-08-26 WO PCT/EP2011/004282 patent/WO2012028279A1/en not_active Ceased
- 2011-08-26 EP EP11749739.6A patent/EP2611841B1/en active Active
- 2011-08-26 GB GB1303582.9A patent/GB2497451A/en not_active Withdrawn
- 2011-08-26 JP JP2013526346A patent/JP6097216B2/ja active Active
- 2011-08-26 EP EP13004590.9A patent/EP2676979B1/en active Active
- 2011-08-26 CN CN201510255678.9A patent/CN104877292A/zh active Pending
- 2011-09-01 TW TW100131548A patent/TWI618723B/zh active
- 2011-09-01 US US13/223,884 patent/US9175123B2/en active Active
-
2015
- 2015-08-11 US US14/823,066 patent/US9647222B2/en not_active Expired - Fee Related
-
2017
- 2017-02-16 JP JP2017027227A patent/JP6334020B2/ja active Active
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