JP2013520844A5 - - Google Patents

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Publication number
JP2013520844A5
JP2013520844A5 JP2012555086A JP2012555086A JP2013520844A5 JP 2013520844 A5 JP2013520844 A5 JP 2013520844A5 JP 2012555086 A JP2012555086 A JP 2012555086A JP 2012555086 A JP2012555086 A JP 2012555086A JP 2013520844 A5 JP2013520844 A5 JP 2013520844A5
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JP
Japan
Prior art keywords
material layer
electrically insulating
insulating material
conductive material
electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012555086A
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English (en)
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JP2013520844A (ja
Filing date
Publication date
Priority claimed from US12/713,252 external-priority patent/US7923313B1/en
Application filed filed Critical
Publication of JP2013520844A publication Critical patent/JP2013520844A/ja
Publication of JP2013520844A5 publication Critical patent/JP2013520844A5/ja
Pending legal-status Critical Current

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Claims (1)

  1. トランジスタを製造する方法であって：
    導電材料層と電気絶縁材料層とを順に含んだ基板を準備する工程と、
    前記電気絶縁材料層上にレジスト材料層を堆積する工程と、
    前記レジスト材料層をパターニングして、前記電気絶縁材料層の一部を露出させる工程と、
    露出された前記電気絶縁材料層を除去して、前記導電材料層の一部を露出させる工程と、
    前記電気絶縁材料層が前記導電材料層からオーバーハングするように、露出された前記導電材料層を除去し、それにより、前記導電材料層及び前記基板の少なくとも一方を、後に適用される指向性堆積プロセスから遮蔽するのに十分な凹部形状を作り出す工程と、
    前記基板と露出された前記電気絶縁材料層及び前記導電材料層とを第２の電気絶縁材料層で共形に被覆する工程と、
    前記第２の電気絶縁材料層を半導体材料層で共形に被覆する工程と、
    前記半導体材料層上に導電材料層を指向性堆積する工程と、
    を有する方法。
JP2012555086A 2010-02-26 2011-02-23 内側にへこんだ形状を含んだトランジスタを製造する方法 Pending JP2013520844A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/713,252 2010-02-26
US12/713,252 US7923313B1 (en) 2010-02-26 2010-02-26 Method of making transistor including reentrant profile
PCT/US2011/025795 WO2011106337A1 (en) 2010-02-26 2011-02-23 Methods of making transistor including reentrant profile

Publications (2)

Publication Number Publication Date
JP2013520844A JP2013520844A (ja) 2013-06-06
JP2013520844A5 true JP2013520844A5 (ja) 2014-02-06

Family

ID=43837090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012555086A Pending JP2013520844A (ja) 2010-02-26 2011-02-23 内側にへこんだ形状を含んだトランジスタを製造する方法

Country Status (7)

Country Link
US (1) US7923313B1 (ja)
EP (1) EP2539925A1 (ja)
JP (1) JP2013520844A (ja)
KR (1) KR20120116510A (ja)
CN (1) CN102770948A (ja)
BR (1) BR112012019898A2 (ja)
WO (1) WO2011106337A1 (ja)

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