JP2013247363A - 電荷誘導層を有するｉｉｉ族窒化物トランジスタ - Google Patents

電荷誘導層を有するｉｉｉ族窒化物トランジスタ Download PDF

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Publication number
JP2013247363A
JP2013247363A JP2013108851A JP2013108851A JP2013247363A JP 2013247363 A JP2013247363 A JP 2013247363A JP 2013108851 A JP2013108851 A JP 2013108851A JP 2013108851 A JP2013108851 A JP 2013108851A JP 2013247363 A JP2013247363 A JP 2013247363A
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layer
charge
barrier layer
gate
forming
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JP2013108851A
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Japanese (ja)
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JP2013247363A5 (enExample
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Chang Soo Suh
スー スー、チャン
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Qorvo US Inc
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Triquint Semiconductor Inc
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Publication of JP2013247363A publication Critical patent/JP2013247363A/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/015—Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/518—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their lengths or sectional shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/8503—Nitride Group III-V materials, e.g. AlN or GaN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/256—Source or drain electrodes for field-effect devices for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs

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  • Junction Field-Effect Transistors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP2013108851A 2012-05-25 2013-05-23 電荷誘導層を有するｉｉｉ族窒化物トランジスタ Pending JP2013247363A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/481,198 US20130313561A1 (en) 2012-05-25 2012-05-25 Group iii-nitride transistor with charge-inducing layer
US13/481,198 2012-05-25

Publications (2)

Publication Number Publication Date
JP2013247363A true JP2013247363A (ja) 2013-12-09
JP2013247363A5 JP2013247363A5 (enExample) 2016-05-26

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US (1) US20130313561A1 (enExample)
JP (1) JP2013247363A (enExample)
DE (1) DE102013008512A1 (enExample)
TW (1) TW201407780A (enExample)

Cited By (4)

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JP2015536570A (ja) * 2012-11-16 2015-12-21 マサチューセッツ インスティテュート オブ テクノロジー 半導体構造およびリセス形成のエッチング技術
JP2016207890A (ja) * 2015-04-24 2016-12-08 トヨタ自動車株式会社 ヘテロ接合半導体装置
JP2018517280A (ja) * 2015-03-30 2018-06-28 日本テキサス・インスツルメンツ株式会社 ノーマリーオフｉｉｉ‐窒化物トランジスタ
JP2020178068A (ja) * 2019-04-19 2020-10-29 株式会社東芝 半導体装置

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CN108604596A (zh) * 2015-07-17 2018-09-28 剑桥电子有限公司 用于半导体装置的场板结构
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US10062776B2 (en) * 2016-02-05 2018-08-28 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure and manufacturing method thereof
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US10991817B2 (en) * 2016-07-01 2021-04-27 Intel Corporation Group III-N transistors including source to channel heterostructure design
US10068976B2 (en) * 2016-07-21 2018-09-04 Taiwan Semiconductor Manufacturing Co., Ltd. Enhancement mode field-effect transistor with a gate dielectric layer recessed on a composite barrier layer for high static performance
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US11380806B2 (en) * 2017-09-28 2022-07-05 Intel Corporation Variable capacitance device with multiple two-dimensional electron gas (2DEG) layers
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CN110034186B (zh) * 2018-01-12 2021-03-16 中国科学院苏州纳米技术与纳米仿生研究所 基于复合势垒层结构的iii族氮化物增强型hemt及其制作方法
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015536570A (ja) * 2012-11-16 2015-12-21 マサチューセッツ インスティテュート オブ テクノロジー 半導体構造およびリセス形成のエッチング技術
JP2018517280A (ja) * 2015-03-30 2018-06-28 日本テキサス・インスツルメンツ株式会社 ノーマリーオフｉｉｉ‐窒化物トランジスタ
JP2021044556A (ja) * 2015-03-30 2021-03-18 日本テキサス・インスツルメンツ合同会社 ノーマリーオフｉｉｉ−窒化物トランジスタ
JP7434679B2 (ja) 2015-03-30 2024-02-21 テキサス インスツルメンツ インコーポレイテッド ノーマリーオフｉｉｉ－窒化物トランジスタ
JP2016207890A (ja) * 2015-04-24 2016-12-08 トヨタ自動車株式会社 ヘテロ接合半導体装置
JP2020178068A (ja) * 2019-04-19 2020-10-29 株式会社東芝 半導体装置
JP7448314B2 (ja) 2019-04-19 2024-03-12 株式会社東芝 半導体装置

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TW201407780A (zh) 2014-02-16
US20130313561A1 (en) 2013-11-28

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