JP2013175496A - 基板洗浄方法 - Google Patents
基板洗浄方法 Download PDFInfo
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- JP2013175496A JP2013175496A JP2012037395A JP2012037395A JP2013175496A JP 2013175496 A JP2013175496 A JP 2013175496A JP 2012037395 A JP2012037395 A JP 2012037395A JP 2012037395 A JP2012037395 A JP 2012037395A JP 2013175496 A JP2013175496 A JP 2013175496A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 347
- 239000000758 substrate Substances 0.000 title claims abstract description 312
- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000012530 fluid Substances 0.000 claims abstract description 89
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 69
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 62
- 229910052802 copper Inorganic materials 0.000 claims abstract description 62
- 239000010949 copper Substances 0.000 claims abstract description 62
- 239000000126 substance Substances 0.000 claims abstract description 31
- 238000001035 drying Methods 0.000 claims abstract description 26
- 230000007935 neutral effect Effects 0.000 claims abstract description 15
- 229910021642 ultra pure water Inorganic materials 0.000 claims abstract description 9
- 239000012498 ultrapure water Substances 0.000 claims abstract description 9
- 239000012212 insulator Substances 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 1
- 239000001569 carbon dioxide Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 60
- 238000005498 polishing Methods 0.000 abstract description 31
- 230000007797 corrosion Effects 0.000 abstract description 28
- 238000005260 corrosion Methods 0.000 abstract description 28
- 230000007246 mechanism Effects 0.000 description 41
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
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- 229910052751 metal Inorganic materials 0.000 description 5
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- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
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- 235000012431 wafers Nutrition 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
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- 230000003746 surface roughness Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】中性乃至アルカリ性薬液を洗浄液に使用したスクラブ洗浄で基板表面の一次洗浄を行い、純水または超純水にCO2ガスを溶解させた炭酸水を2流体ノズルから基板表面に向けて噴出させて該表面を非接触で洗浄する2流体ジェット洗浄で基板表面の仕上げ洗浄を行い、しかる後、中性乃至アルカリ性薬液を洗浄液に使用したスクラブ洗浄で基板表面の最終仕上げ洗浄を行って乾燥させる。
【選択図】図15
Description
これにより、銅配線の2流体ジェット洗浄に使用される炭酸水による腐食を有効に抑制できる。
図5は、本発明の基板洗浄方法が使用される研磨装置の全体構成を示す平面図である。図5に示すように、研磨装置は、略矩形状のハウジング10と、多数の半導体ウエハ等の基板をストックする基板カセットが載置されるロードポート12を備えている。ロードポート12は、ハウジング10に隣接して配置されている。ロードポート12には、オープンカセット、SMIF(Standard Manufacturing Interface)ポッド、またはFOUP(Front Opening Unified Pod)を搭載することができる。SMIF、FOUPは、内部に基板カセットを収納し、隔壁で覆うことにより、外部空間とは独立した環境を保つことができる密閉容器である。
まず、モータ415により基板Wおよび回転カバー450を一体に回転させる。この状態で、フロントノズル454およびバックノズル463から純水を基板Wの表面(上面)および裏面(下面)に供給し、基板Wの全面を純水でリンスする。基板Wに供給された純水は、遠心力により基板Wの表面および裏面全体に広がり、これにより基板Wの全体がリンスされる。回転する基板Wから振り落とされた純水は、回転カバー450に捕らえられ、液体排出孔451に流れ込む。基板Wのリンス処理の間、2つの流体ノズル460,461は、基板Wから離れた所定の待機位置にある。
16 第1洗浄ユニット
18 第2洗浄ユニット
20 乾燥ユニット
30 制御部
40 洗浄槽
42 支持軸
44 揺動アーム
46 2流体ノズル
54 モータ
60 ペンシル型洗浄具
460,461 流体ノズル
307,308 ロール洗浄部材
500 支持軸
502 揺動アーム
504 モータ
506 制御部
Claims (3)
- 中性乃至アルカリ性薬液を洗浄液に使用したスクラブ洗浄で基板表面の一次洗浄を行い、
純水または超純水にCO2ガスを溶解させた炭酸水を2流体ノズルから基板表面に向けて噴出させて該表面を非接触で洗浄する2流体ジェット洗浄で基板表面の仕上げ洗浄を行い、しかる後、
中性乃至アルカリ性薬液を洗浄液に使用したスクラブ洗浄で基板表面の最終仕上げ洗浄を行って乾燥させることを特徴とする基板洗浄方法。 - 前記一次洗浄は、ロール洗浄部材を基板表面に擦り付けて該表面を洗浄するロールスクラブ洗浄で、前記最終仕上げ洗浄は、ペンシル型洗浄部材を基板表面に擦り付けて該表面を洗浄するペンシルスクラブ洗浄であることを特徴とする請求項1に記載の基板処理方法。
- 前記基板表面には、絶縁体の内部に表面を露出させて埋込んだ銅からなる銅配線が形成されていることを特徴とする請求項1または2に記載の基板洗浄方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012037395A JP5866227B2 (ja) | 2012-02-23 | 2012-02-23 | 基板洗浄方法 |
TW101134106A TWI525686B (zh) | 2012-02-23 | 2012-09-18 | 基板洗淨方法 |
KR1020120121073A KR20130097053A (ko) | 2012-02-23 | 2012-10-30 | 기판 세정 방법 |
US13/758,226 US9142399B2 (en) | 2012-02-23 | 2013-02-04 | Substrate cleaning method |
Applications Claiming Priority (1)
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JP2012037395A JP5866227B2 (ja) | 2012-02-23 | 2012-02-23 | 基板洗浄方法 |
Publications (3)
Publication Number | Publication Date |
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JP2013175496A true JP2013175496A (ja) | 2013-09-05 |
JP2013175496A5 JP2013175496A5 (ja) | 2015-10-15 |
JP5866227B2 JP5866227B2 (ja) | 2016-02-17 |
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JP2012037395A Active JP5866227B2 (ja) | 2012-02-23 | 2012-02-23 | 基板洗浄方法 |
Country Status (4)
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US (1) | US9142399B2 (ja) |
JP (1) | JP5866227B2 (ja) |
KR (1) | KR20130097053A (ja) |
TW (1) | TWI525686B (ja) |
Cited By (12)
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KR20150039681A (ko) * | 2013-10-03 | 2015-04-13 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 세정 장치 및 기판 처리 장치 |
JP2015099852A (ja) * | 2013-11-19 | 2015-05-28 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
JP2015099851A (ja) * | 2013-11-19 | 2015-05-28 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
JP2015103647A (ja) * | 2013-11-25 | 2015-06-04 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
JP2016082195A (ja) * | 2014-10-22 | 2016-05-16 | Towa株式会社 | 切断装置及び切断方法 |
JP2016092190A (ja) * | 2014-11-04 | 2016-05-23 | 株式会社東芝 | 半導体装置の製造方法 |
US10090189B2 (en) | 2013-11-19 | 2018-10-02 | Ebara Corporation | Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle |
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Also Published As
Publication number | Publication date |
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US9142399B2 (en) | 2015-09-22 |
JP5866227B2 (ja) | 2016-02-17 |
TWI525686B (zh) | 2016-03-11 |
TW201335987A (zh) | 2013-09-01 |
KR20130097053A (ko) | 2013-09-02 |
US20130220368A1 (en) | 2013-08-29 |
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