JP2013069679A - 透明導電性フィルムの製造方法 - Google Patents
透明導電性フィルムの製造方法 Download PDFInfo
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- JP2013069679A JP2013069679A JP2012194616A JP2012194616A JP2013069679A JP 2013069679 A JP2013069679 A JP 2013069679A JP 2012194616 A JP2012194616 A JP 2012194616A JP 2012194616 A JP2012194616 A JP 2012194616A JP 2013069679 A JP2013069679 A JP 2013069679A
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- film
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- transparent conductive
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- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000010410 layer Substances 0.000 claims abstract description 82
- 238000010438 heat treatment Methods 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims abstract description 39
- 229910052738 indium Inorganic materials 0.000 claims abstract description 22
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000002131 composite material Substances 0.000 claims abstract description 21
- 239000012790 adhesive layer Substances 0.000 claims abstract description 14
- 238000010030 laminating Methods 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 53
- 239000004020 conductor Substances 0.000 claims description 18
- 238000004904 shortening Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 112
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 21
- 238000002425 crystallisation Methods 0.000 description 8
- 230000008025 crystallization Effects 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000004804 winding Methods 0.000 description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 7
- 229910001887 tin oxide Inorganic materials 0.000 description 7
- 229910003437 indium oxide Inorganic materials 0.000 description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- 238000002203 pretreatment Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 230000037303 wrinkles Effects 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 239000002313 adhesive film Substances 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000004383 yellowing Methods 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920003050 poly-cycloolefin Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Electric Cables (AREA)
- Physical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
Abstract
【解決手段】本発明に係る透明導電性フィルムの製造方法は、厚みが10〜50μmのフィルム基材の第1の面に、インジウム系複合酸化物で形成された非晶質層を積層する第1工程と、上記非晶質層が積層されたフィルム基材を、繰り出しローラーにより搬送し巻き取りローラーに巻き取る途中で、このフィルム基材を160℃以上に加熱し、上記非晶質層を結晶化して透明導電体層を形成する第2工程と、上記フィルム基材の第2の面に、粘着剤層を形成する第3工程と、を備えている。
【選択図】図2
Description
2 透明導電体層
3 粘着剤層
10 繰り出しローラー
20 巻き取りローラー
30 加熱室
Claims (4)
- 厚みが10〜50μmのフィルム基材の第1の面に、インジウム系複合酸化物で形成された非晶質層を積層する第1工程と、
前記非晶質層が積層されたフィルム基材を、繰り出しローラーにより搬送し巻き取りローラーに巻き取る途中で、当該フィルム基材を160℃以上に加熱し、前記非晶質層を結晶化して透明導電体層を形成する第2工程と、
前記フィルム基材の第2の面に、粘着剤層を形成する第3工程と、
を備えている、透明導電性フィルムの製造方法。 - 前記第2工程では、前記フィルム基材を180〜220℃で加熱する、請求項1に記載の透明導電性フィルムの製造方法。
- 前記第2工程では、前記フィルム基材に加熱室を通過させることで加熱を行う、請求項1または2に記載の透明導電性フィルムの製造方法。
- 前記第2工程では、前記加熱室内の温度が180〜220℃であり、当該加熱室を通過する時間が30秒〜5分である、請求項3に記載の透明導電性フィルムの製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012194616A JP2013069679A (ja) | 2011-09-07 | 2012-09-04 | 透明導電性フィルムの製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011195214 | 2011-09-07 | ||
JP2011195214 | 2011-09-07 | ||
JP2012194616A JP2013069679A (ja) | 2011-09-07 | 2012-09-04 | 透明導電性フィルムの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013069679A true JP2013069679A (ja) | 2013-04-18 |
Family
ID=47752218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012194616A Pending JP2013069679A (ja) | 2011-09-07 | 2012-09-04 | 透明導電性フィルムの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9059369B2 (ja) |
JP (1) | JP2013069679A (ja) |
KR (1) | KR101363154B1 (ja) |
CN (1) | CN103000299B (ja) |
TW (1) | TWI494951B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015153417A (ja) * | 2014-05-21 | 2015-08-24 | 日本写真印刷株式会社 | タッチセンサ |
JP2022052582A (ja) * | 2020-09-23 | 2022-04-04 | プラスコート株式会社 | 透明導電性フィルムの製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63454A (ja) * | 1986-06-20 | 1988-01-05 | Konica Corp | 透明導電性フイルムの製造方法 |
JPH0266809A (ja) * | 1988-08-31 | 1990-03-06 | Nitto Denko Corp | 透明導電性積層体 |
JPH02166279A (ja) * | 1988-12-21 | 1990-06-26 | Matsushita Electric Ind Co Ltd | フィルムの温度処理方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH063454A (ja) * | 1992-06-23 | 1994-01-11 | Olympus Optical Co Ltd | 内部増幅型固体撮像素子 |
JPH10140373A (ja) * | 1997-02-04 | 1998-05-26 | Canon Inc | 酸化亜鉛薄膜の製造方法、それを用いた半導体素子基板及び光起電力素子 |
US6225010B1 (en) * | 1997-11-19 | 2001-05-01 | Mitsubishi Denki Kabushiki Kaisha | Lithium ion secondary battery and manufacture thereof |
JP4096529B2 (ja) * | 2001-06-28 | 2008-06-04 | 富士ゼロックス株式会社 | アニール装置 |
WO2003012799A1 (fr) * | 2001-07-31 | 2003-02-13 | Toyo Boseki Kabushiki Kaisha | Film conducteur transparent et procede de fabrication associe, feuille conductrice transparente et ecran tactile |
JP4569740B2 (ja) * | 2002-02-20 | 2010-10-27 | 日産化学工業株式会社 | 有機導電性材料及び導電性ワニス |
JP4342775B2 (ja) * | 2002-07-31 | 2009-10-14 | 日東電工株式会社 | 透明導電性フィルム用表面保護フィルム及びその製造方法並びに表面保護フィルム付き透明導電性フィルム |
JP2004149845A (ja) * | 2002-10-30 | 2004-05-27 | Sony Corp | 走行式真空成膜装置 |
JP2004136659A (ja) * | 2003-08-25 | 2004-05-13 | Oji Paper Co Ltd | 透明導電性薄膜付き透明プラスチックフィルムの製造方法、および透明導電性薄膜付き透明プラスチックフィルムの作製用基材 |
JP2005144858A (ja) * | 2003-11-14 | 2005-06-09 | Nitto Denko Corp | 透明導電性フィルムの製造方法 |
KR101186894B1 (ko) * | 2004-05-07 | 2012-10-02 | 닛토덴코 가부시키가이샤 | 터치패널용 도전성 필름 및 터치패널용 도전성 필름제조방법 |
JP4721359B2 (ja) * | 2006-09-12 | 2011-07-13 | 日東電工株式会社 | 透明導電性積層体及びそれを備えたタッチパネル |
JP5256459B2 (ja) * | 2006-09-29 | 2013-08-07 | Dowaエレクトロニクス株式会社 | 透明導電膜及びその製造方法 |
JP5506011B2 (ja) | 2007-03-02 | 2014-05-28 | 日東電工株式会社 | 粘着剤層付き透明導電性フィルムおよびその製造方法 |
-
2012
- 2012-09-04 JP JP2012194616A patent/JP2013069679A/ja active Pending
- 2012-09-05 KR KR1020120098431A patent/KR101363154B1/ko active IP Right Grant
- 2012-09-07 TW TW101132837A patent/TWI494951B/zh not_active IP Right Cessation
- 2012-09-07 US US13/606,780 patent/US9059369B2/en not_active Expired - Fee Related
- 2012-09-07 CN CN201210330181.5A patent/CN103000299B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63454A (ja) * | 1986-06-20 | 1988-01-05 | Konica Corp | 透明導電性フイルムの製造方法 |
JPH0266809A (ja) * | 1988-08-31 | 1990-03-06 | Nitto Denko Corp | 透明導電性積層体 |
JPH02166279A (ja) * | 1988-12-21 | 1990-06-26 | Matsushita Electric Ind Co Ltd | フィルムの温度処理方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015153417A (ja) * | 2014-05-21 | 2015-08-24 | 日本写真印刷株式会社 | タッチセンサ |
JP2022052582A (ja) * | 2020-09-23 | 2022-04-04 | プラスコート株式会社 | 透明導電性フィルムの製造方法 |
JP7245537B2 (ja) | 2020-09-23 | 2023-03-24 | プラスコート株式会社 | 透明導電性フィルムの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20130027434A (ko) | 2013-03-15 |
KR101363154B1 (ko) | 2014-02-13 |
CN103000299A (zh) | 2013-03-27 |
CN103000299B (zh) | 2015-07-22 |
TWI494951B (zh) | 2015-08-01 |
TW201324542A (zh) | 2013-06-16 |
US20130056149A1 (en) | 2013-03-07 |
US9059369B2 (en) | 2015-06-16 |
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