JP2012524400A - Led基板処理 - Google Patents
Led基板処理 Download PDFInfo
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- JP2012524400A JP2012524400A JP2012505959A JP2012505959A JP2012524400A JP 2012524400 A JP2012524400 A JP 2012524400A JP 2012505959 A JP2012505959 A JP 2012505959A JP 2012505959 A JP2012505959 A JP 2012505959A JP 2012524400 A JP2012524400 A JP 2012524400A
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- 239000000758 substrate Substances 0.000 title claims abstract description 280
- 238000012545 processing Methods 0.000 title claims abstract description 100
- 238000000034 method Methods 0.000 claims abstract description 37
- 230000008569 process Effects 0.000 claims abstract description 23
- 239000004065 semiconductor Substances 0.000 claims description 56
- 230000003287 optical effect Effects 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 19
- 238000005286 illumination Methods 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 11
- 238000004616 Pyrometry Methods 0.000 claims description 7
- 239000002019 doping agent Substances 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 7
- 238000009529 body temperature measurement Methods 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 abstract description 15
- 230000008901 benefit Effects 0.000 abstract description 11
- 230000035484 reaction time Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 239000000523 sample Substances 0.000 description 6
- 229910002601 GaN Inorganic materials 0.000 description 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000005274 electronic transitions Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
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- 238000007493 shaping process Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
本出願は、2009年4月20日に出願した、米国特許仮出願第61/171,020号の利益を主張し、その出願は、すべての目的のためにその全体が参照により本明細書中に組み込まれている。
図5は、円盤形状の基板505を処理するための処理チャンバ500を含んでいる基板処理システムを示し、基板を12インチ(300ミリメートル(mm))直径シリコン(Si)ウェーハとすることができる。
Claims (25)
- 第1の発光ダイオードおよび第2の発光ダイオードを備えた複数の発光ダイオードであって、前記複数の発光ダイオードが少なくとも200℃まで半導体基板の第1の表面を加熱する、複数の発光ダイオード
を備え、
前記第1の発光ダイオードが第1の複数の光エネルギーのパルスを放出し、前記第2の発光ダイオードが第2の複数の光エネルギーのパルスを放出する、
基板処理システム。 - 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、1秒以下である持続期間を有する、請求項1に記載の基板処理システム。
- 前記複数の発光ダイオードが、前記半導体基板を実質的に均一に加熱するパターンに配列される、請求項1に記載の基板処理システム。
- 前記パターンが同心円であり、
各同心円上の前記複数の発光ダイオードの前記エネルギー出力が、前記半導体基板の前記第1の表面を均一に加熱するように変えられることが可能である、
請求項3に記載の基板処理システム。 - 前記パターンが前記半導体基板の外側端部近くで同心円である、請求項1に記載の基板処理システム。
- 前記複数の発光ダイオードからの照明が、前記半導体基板の表面近傍域に変化を生じさせる、請求項1に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、約1ミリ秒から約1秒までの範囲に及ぶ持続期間を有する、請求項1に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、約10マイクロ秒から約1ミリ秒までの範囲に及ぶ持続期間を有する、請求項1に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、500ワット/cm2よりも大きな光学的ピークパワーを有する、請求項1に記載の基板処理システム。
- 前記半導体基板の前記第1の表面の面積が、100cm2よりも大きい、請求項1に記載の基板処理システム。
- 前記複数の発光ダイオードが、1つの透明基板上に形成される、請求項1に記載の基板処理システム。
- 処理チャンバの内部に配置された半導体基板を支持する基板支持アセンブリと、
第1の発光ダイオードアセンブリであって、
第1の発光ダイオードおよび第2の発光ダイオードを備えた複数の発光ダイオードであって、前記複数の発光ダイオードが少なくとも200℃まで前記半導体基板の第1の表面を加熱する、複数の発光ダイオード、を備え、
前記第1の発光ダイオードが第1の複数の光エネルギーのパルスを放出し、前記第2の発光ダイオードが第2の複数の光エネルギーのパルスを放出し、
前記複数の発光ダイオードが、前記半導体基板を実質的に均一に加熱するパターンに配列される、第1の発光ダイオードアセンブリと
を備えた、基板処理システム。 - 前記複数の発光ダイオードが、前記半導体基板の表面近傍域に変化を生じさせる、請求項12に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、約1ミリ秒から約1秒までの範囲に及ぶ持続期間を有する、請求項12に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、200ワット/cm2よりも大きな光学的ピークパワーを有する、請求項12に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、前記半導体基板の内部のドーパントを活性化させる、請求項12に記載の基板処理システム。
- 前記第1の複数の光のパルスおよび前記第2の複数の光のパルスが、前記半導体基板中へと原子を拡散させる、請求項12に記載の基板処理システム。
- 前記半導体基板の第2の表面を照明するために前記半導体基板の第2の表面近くに配置された第2の複数の発光ダイオードを備えた第2の発光ダイオードアセンブリをさらに備えた、請求項12に記載の基板処理システム。
- 処理チャンバの内部に配置された半導体基板を支持する基板支持アセンブリと、
第1の発光ダイオードアセンブリであって、
第1の発光ダイオードおよび第2の発光ダイオードを備えた複数の発光ダイオードであって、前記複数の発光ダイオードが少なくとも200℃まで前記半導体基板の第1の表面を加熱する、複数の発光ダイオード、を備え、
前記第1の発光ダイオードが1つまたは複数の第1の処理波長を備えた第1の複数の光エネルギーのパルスを放出し、前記第2の発光ダイオードが1つまたは複数の第2の処理波長を備えた第2の複数の光エネルギーのパルスを放出し、
前記複数の発光ダイオードが、前記半導体基板を実質的に均一に加熱するパターンに配列される、第1の発光ダイオードアセンブリと、
前記半導体基板の一部の温度を決定するために少なくとも1つの高温測定波長近くの光を検出する少なくとも1つのパイロメータであって、前記少なくとも1つの高温測定波長が1つまたは複数の第1の処理波長および第2の処理波長とは異なる、少なくとも1つのパイロメータと
を備えた基板処理システム。 - 前記1つまたは複数の第1の処理波長および第2の処理波長が約0.75μmより短い波長を備え、前記少なくとも1つの高温測定波長が約0.75μmより長い波長を備える、請求項19に記載の基板処理システム。
- 前記1つまたは複数の第1の処理波長および第2の処理波長が約0.50μmより短い波長を備え、前記少なくとも1つの高温測定波長が約0.50μmより長い波長を備える、請求項19に記載の基板処理システム。
- 半導体基板を処置する方法であって、
半導体基板を用意するステップと、
前記半導体基板を処置するために十分な少なくとも1つの光学的パルスのLEDパルス持続期間およびLEDパルス輝度を選択するステップと、
LEDアセンブリからの少なくとも1つの光の光学的パルスを用いて少なくとも200℃まで前記半導体基板を加熱するステップであって、
前記少なくとも1つの光学的パルスが、1つまたは複数のLED波長を備える、
加熱するステップと
を備えた方法。 - 前記半導体基板の表面から放出された光を受けるステップと、
プロセス監視波長近くの前記放出された光の輝度を決定するステップであって、前記プロセス監視波長が前記1つまたは複数のLED波長とは異なる、決定するステップと
をさらに備えた、請求項22に記載の方法。 - 前記半導体基板を処置するステップが、前記半導体基板をアニールするステップを備える、請求項22に記載の方法。
- 前記半導体基板を処置するステップが、前記半導体基板の内部のドーパントを拡散させるステップを備える、請求項22に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17102009P | 2009-04-20 | 2009-04-20 | |
US61/171,020 | 2009-04-20 | ||
PCT/US2010/031403 WO2010123772A2 (en) | 2009-04-20 | 2010-04-16 | Led substrate processing |
Publications (2)
Publication Number | Publication Date |
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JP2012524400A true JP2012524400A (ja) | 2012-10-11 |
JP2012524400A5 JP2012524400A5 (ja) | 2013-06-06 |
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JP2012505959A Pending JP2012524400A (ja) | 2009-04-20 | 2010-04-16 | Led基板処理 |
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US (1) | US8404499B2 (ja) |
JP (1) | JP2012524400A (ja) |
KR (1) | KR101728796B1 (ja) |
CN (1) | CN102405513B (ja) |
SG (1) | SG174858A1 (ja) |
TW (1) | TWI525668B (ja) |
WO (1) | WO2010123772A2 (ja) |
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JP2017509143A (ja) * | 2014-01-17 | 2017-03-30 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 半導体光源を有する加熱システム |
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JP7461214B2 (ja) | 2020-05-19 | 2024-04-03 | 株式会社Screenホールディングス | 熱処理装置 |
Also Published As
Publication number | Publication date |
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KR101728796B1 (ko) | 2017-04-20 |
US8404499B2 (en) | 2013-03-26 |
CN102405513A (zh) | 2012-04-04 |
WO2010123772A2 (en) | 2010-10-28 |
US20100267174A1 (en) | 2010-10-21 |
TWI525668B (zh) | 2016-03-11 |
CN102405513B (zh) | 2016-05-25 |
TW201103078A (en) | 2011-01-16 |
WO2010123772A3 (en) | 2011-01-13 |
SG174858A1 (en) | 2011-11-28 |
KR20120006553A (ko) | 2012-01-18 |
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