JP2012503199A5 - - Google Patents

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Publication number
JP2012503199A5
JP2012503199A5 JP2011527884A JP2011527884A JP2012503199A5 JP 2012503199 A5 JP2012503199 A5 JP 2012503199A5 JP 2011527884 A JP2011527884 A JP 2011527884A JP 2011527884 A JP2011527884 A JP 2011527884A JP 2012503199 A5 JP2012503199 A5 JP 2012503199A5
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JP
Japan
Prior art keywords
pressure
cathode
ionization
vacuum gauge
emission current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011527884A
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English (en)
Japanese (ja)
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JP2012503199A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2009/056612 external-priority patent/WO2010033427A1/en
Publication of JP2012503199A publication Critical patent/JP2012503199A/ja
Publication of JP2012503199A5 publication Critical patent/JP2012503199A5/ja
Pending legal-status Critical Current

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JP2011527884A 2008-09-19 2009-09-11 放出電流およびバイアス電圧を制御する電離真空計 Pending JP2012503199A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19268408P 2008-09-19 2008-09-19
US61/192,684 2008-09-19
PCT/US2009/056612 WO2010033427A1 (en) 2008-09-19 2009-09-11 Ionization gauge with emission current and bias potential control

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014266942A Division JP6031502B2 (ja) 2008-09-19 2014-12-29 電離真空計および圧力測定方法

Publications (2)

Publication Number Publication Date
JP2012503199A JP2012503199A (ja) 2012-02-02
JP2012503199A5 true JP2012503199A5 (https=) 2012-10-25

Family

ID=42039815

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2011527884A Pending JP2012503199A (ja) 2008-09-19 2009-09-11 放出電流およびバイアス電圧を制御する電離真空計
JP2014266942A Active JP6031502B2 (ja) 2008-09-19 2014-12-29 電離真空計および圧力測定方法
JP2016207564A Active JP6341970B2 (ja) 2008-09-19 2016-10-24 電離真空計および圧力測定方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2014266942A Active JP6031502B2 (ja) 2008-09-19 2014-12-29 電離真空計および圧力測定方法
JP2016207564A Active JP6341970B2 (ja) 2008-09-19 2016-10-24 電離真空計および圧力測定方法

Country Status (6)

Country Link
US (2) US8947098B2 (https=)
EP (2) EP2326931B1 (https=)
JP (3) JP2012503199A (https=)
CN (2) CN102159929A (https=)
DK (2) DK3517921T3 (https=)
WO (1) WO2010033427A1 (https=)

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JP6815283B2 (ja) * 2017-06-09 2021-01-20 アズビル株式会社 静電容量型圧力センサ
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