CN106404277A - 具有发射电流及偏压电位控制的电离计 - Google Patents

具有发射电流及偏压电位控制的电离计 Download PDF

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Publication number
CN106404277A
CN106404277A CN201610282044.7A CN201610282044A CN106404277A CN 106404277 A CN106404277 A CN 106404277A CN 201610282044 A CN201610282044 A CN 201610282044A CN 106404277 A CN106404277 A CN 106404277A
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CN
China
Prior art keywords
pressure
ionization gauge
emission current
current
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610282044.7A
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English (en)
Chinese (zh)
Inventor
赖利·K·卡麦可
杰西·A·韦伯
约翰·H·亨利
麦可·N·史考特
葛拉多·A·布鲁克尔
肯尼斯·D·凡安特卫普
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MKS Instruments Inc
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MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of CN106404277A publication Critical patent/CN106404277A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Solid Thermionic Cathode (AREA)
CN201610282044.7A 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计 Pending CN106404277A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19268408P 2008-09-19 2008-09-19
US61/192,684 2008-09-19
CN2009801370982A CN102159929A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2009801370982A Division CN102159929A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Publications (1)

Publication Number Publication Date
CN106404277A true CN106404277A (zh) 2017-02-15

Family

ID=42039815

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201610282044.7A Pending CN106404277A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计
CN2009801370982A Pending CN102159929A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Family Applications After (1)

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CN2009801370982A Pending CN102159929A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Country Status (6)

Country Link
US (2) US8947098B2 (https=)
EP (2) EP2326931B1 (https=)
JP (3) JP2012503199A (https=)
CN (2) CN106404277A (https=)
DK (2) DK2326931T3 (https=)
WO (1) WO2010033427A1 (https=)

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US8928329B2 (en) * 2011-07-26 2015-01-06 Mks Instruments, Inc. Cold cathode gauge fast response signal circuit
EP2800960B1 (en) * 2012-02-08 2018-10-31 MKS Instruments, Inc. Ionization gauge for high pressure operation
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
JP6227836B2 (ja) * 2015-03-23 2017-11-08 株式会社アルバック 三極管型電離真空計
US9726566B2 (en) * 2015-04-29 2017-08-08 Honeywell International Inc. Vacuum pressure gauge
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
US10242855B1 (en) * 2016-09-21 2019-03-26 The United States of America as requested by the Secretary of the Air Force Detector, system and method for droplet and/or cluster beam spectroscopy
JP6815283B2 (ja) * 2017-06-09 2021-01-20 アズビル株式会社 静電容量型圧力センサ
US10928265B2 (en) * 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
JP7314000B2 (ja) * 2019-09-19 2023-07-25 キヤノンアネルバ株式会社 電子発生装置および電離真空計
WO2023114166A1 (en) * 2021-12-16 2023-06-22 Inficon, Inc. Ion source assembly with multiple elliptical filaments

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Also Published As

Publication number Publication date
CN102159929A (zh) 2011-08-17
EP2326931B1 (en) 2019-04-24
US20150108993A1 (en) 2015-04-23
JP6341970B2 (ja) 2018-06-13
JP6031502B2 (ja) 2016-11-24
JP2012503199A (ja) 2012-02-02
US9383286B2 (en) 2016-07-05
JP2017015738A (ja) 2017-01-19
EP2326931A4 (en) 2012-08-08
EP3517921A1 (en) 2019-07-31
JP2015062035A (ja) 2015-04-02
DK2326931T3 (da) 2019-07-22
DK3517921T3 (da) 2021-01-18
US8947098B2 (en) 2015-02-03
US20110163754A1 (en) 2011-07-07
WO2010033427A1 (en) 2010-03-25
EP2326931A1 (en) 2011-06-01
EP3517921B1 (en) 2020-11-04

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Application publication date: 20170215