JP5901142B2 - 水素またはヘリウム用の検出計及び水素またはヘリウムの検出方法並びにリークディテクタ - Google Patents
水素またはヘリウム用の検出計及び水素またはヘリウムの検出方法並びにリークディテクタ Download PDFInfo
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- JP5901142B2 JP5901142B2 JP2011111104A JP2011111104A JP5901142B2 JP 5901142 B2 JP5901142 B2 JP 5901142B2 JP 2011111104 A JP2011111104 A JP 2011111104A JP 2011111104 A JP2011111104 A JP 2011111104A JP 5901142 B2 JP5901142 B2 JP 5901142B2
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- filament
- helium
- hydrogen
- test body
- detector
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- 239000001307 helium Substances 0.000 title claims description 70
- 229910052734 helium Inorganic materials 0.000 title claims description 70
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims description 68
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims description 52
- 239000001257 hydrogen Substances 0.000 title claims description 52
- 229910052739 hydrogen Inorganic materials 0.000 title claims description 52
- 238000001514 detection method Methods 0.000 title description 8
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 238000012360 testing method Methods 0.000 description 69
- 239000007789 gas Substances 0.000 description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000010953 base metal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- KFVPJMZRRXCXAO-UHFFFAOYSA-N [He].[O] Chemical compound [He].[O] KFVPJMZRRXCXAO-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- -1 helium ions Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Examining Or Testing Airtightness (AREA)
Description
Ie=a×CHe−b (本実験の測定結果から回帰直線を得たときのa=0.5579、b=0.04である)・・・(式1)
の関係があることが判った。このようにヘリウム濃度とエミッション電流との相関が予め判っていれば、本実施形態のものがヘリウム用の検出計Mとして利用できることが判る。なお、上記においては、ヘリウムを例に説明したが、水素においても同様に検出できることが確認された。
Claims (1)
- 金属製のフィラメントとグリッドとを試験体に装着した後、この試験体内部を減圧し、
フィラメントに直流電流を通電してこのフィラメントを点灯させて熱電子を放出させると共に、フィラメントより高い電位をグリッドに与え、
前記フィラメントの径が平均自由工程より大きくなる圧力範囲にてフィラメントとグリッドとの間で測定したエミッション電流から水素またはヘリウムを検出することを特徴とする水素またはヘリウムの検出方法。
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JP2011111104A JP5901142B2 (ja) | 2011-05-18 | 2011-05-18 | 水素またはヘリウム用の検出計及び水素またはヘリウムの検出方法並びにリークディテクタ |
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JP2011111104A JP5901142B2 (ja) | 2011-05-18 | 2011-05-18 | 水素またはヘリウム用の検出計及び水素またはヘリウムの検出方法並びにリークディテクタ |
Publications (2)
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JP2012242198A JP2012242198A (ja) | 2012-12-10 |
JP5901142B2 true JP5901142B2 (ja) | 2016-04-06 |
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CN110261044A (zh) * | 2019-06-29 | 2019-09-20 | 广东利元亨智能装备股份有限公司 | 气密性检测设备 |
CN113984304B (zh) * | 2021-12-28 | 2022-04-29 | 河南氢枫能源技术有限公司 | 一种氢能设备测试系统和测试方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3139746A (en) * | 1961-05-10 | 1964-07-07 | Nat Res Corp | Gas density measuring |
JP3069544B2 (ja) * | 1997-12-19 | 2000-07-24 | 有限会社山本真空研究所 | 熱陰極電離真空計 |
JP2005259606A (ja) * | 2004-03-12 | 2005-09-22 | Anelva Corp | 熱電子放出用フィラメント |
EP1890124A4 (en) * | 2005-05-09 | 2012-08-22 | Ampere Inc | IONISIERUNGSUNTERDRUCKMESSVORRICHTUNG |
JP2007250425A (ja) * | 2006-03-17 | 2007-09-27 | Mitsubishi Heavy Ind Ltd | 熱電子発生装置、フィラメント寿命予測方法、及びフィラメント寿命延長方法 |
CN106404277A (zh) * | 2008-09-19 | 2017-02-15 | Mks仪器公司 | 具有发射电流及偏压电位控制的电离计 |
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