JP2012231130A - パッケージ基板及びその製造方法 - Google Patents
パッケージ基板及びその製造方法 Download PDFInfo
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- JP2012231130A JP2012231130A JP2012088225A JP2012088225A JP2012231130A JP 2012231130 A JP2012231130 A JP 2012231130A JP 2012088225 A JP2012088225 A JP 2012088225A JP 2012088225 A JP2012088225 A JP 2012088225A JP 2012231130 A JP2012231130 A JP 2012231130A
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Abstract
【解決手段】本発明のパッケージ基板は、少なくとも一つの導電性パッドを具備した基板と、前記基板上に形成され、前記導電性パッドを露出させる開口部を有する絶縁層と、前記開口部を介して露出された導電性パッドの上面及び前記絶縁層の側壁に沿って形成される剥離防止層と、少なくとも一つの合金材料からなって前記剥離防止層上に形成されるメタルポストと、前記メタルポスト上に形成される熱拡散防止膜と、を含む。
【選択図】図1
Description
111 導電性パッド
120 絶縁層
121 開口部
125 めっきシード層
126 ドライフィルムパターン
130 剥離防止層
140 メタルポスト
150 熱拡散防止膜
160 はんだバンプ
Claims (12)
- 少なくとも一つの導電性パッドを具備した基板と、
前記基板上に形成され、前記導電性パッドを露出させる開口部を有する絶縁層と、
前記開口部を介して露出された導電性パッドの上面及び前記絶縁層の側壁に沿って形成される剥離防止層と、
少なくとも一つ以上の合金材料からなって前記剥離防止層上に形成されるメタルポストと、
前記メタルポスト上に形成される熱拡散防止膜と、を含むパッケージ基板。 - 前記パッケージ基板は、前記熱拡散防止膜上に形成されるはんだバンプをさらに含む請求項1に記載のパッケージ基板。
- 前記剥離防止層は、前記開口部が形成された前記絶縁層の上面より高く形成され、銅(Cu)を用いた電解銅めっきにより形成される請求項1に記載のパッケージ基板。
- 前記剥離防止層は、銅(Cu)とスズ(Sn)の合金からなり、その銅含量が0.8wt%〜5wt%である請求項3に記載のパッケージ基板。
- 前記熱拡散防止膜は、Au−Ni、Au−Ni合金、Ni、Ni合金、Pd−Ni、Pd−Ni合金、Au−Pd−Ni及びAu−Pd−Ni合金のうち何れか一つの金属材料からなる請求項1に記載のパッケージ基板。
- 少なくとも一つの導電性パッドを具備した基板を準備する段階と、
前記基板上に前記導電性パッドが露出される開口部を有する絶縁層を形成する段階と、
前記開口部を介して露出された導電性パッドの上面及び前記絶縁層の側壁に沿って剥離防止層を形成する段階と、
前記剥離防止層上に電解めっきによりメタルポストを形成する段階と、
前記メタルポスト上に電解又は無電解めっきにより熱拡散防止膜を形成する段階と、を含むパッケージ基板の製造方法。 - 前記熱拡散防止膜を形成する段階の以降には、
前記熱拡散防止膜上にはんだバンプを形成する段階をさらに含む請求項6に記載のパッケージ基板の製造方法。 - 前記剥離防止層を形成する段階の以前には、
前記絶縁層上にめっきシード層を形成する段階と、
前記めっきシード層上にドライフィルムパターンを形成する段階と、をさらに含む請求項6に記載のパッケージ基板の製造方法。 - 前記剥離防止層は、前記絶縁層の上面より高く形成され、前記ドライフィルムパターンと前記めっきシード層との間の界面を塞ぐことができるように形成される請求項8に記載のパッケージ基板の製造方法。
- 前記剥離防止層は、前記めっきシード層を電極とし、電解めっき法によって形成され、スズ(Sn)と銅(Cu)の合金材料からなり、銅含量は0.8wt%〜5wt%である請求項9に記載のパッケージ基板の製造方法。
- 前記熱拡散防止膜は、Au−Ni、Au−Ni合金、Ni、Ni合金、Pd−Ni、Pd−Ni合金、Au−Pd−Ni及びAu−Pd−Ni合金のうち何れか一つの金属材料からなる請求項6に記載のパッケージ基板の製造方法。
- 前記熱拡散防止膜上にはんだバンプを形成する段階の以降には、
前記メタルポストと熱拡散防止膜及びはんだバンプを取り囲んでいる前記ドライフィルムパターンを除去する段階と、
前記ドライフィルムパターンの下面に形成される前記めっきシード層を除去する段階と、をさらに含む請求項8に記載のパッケージ基板の製造方法。
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KR20150031592A (ko) * | 2013-09-16 | 2015-03-25 | 엘지이노텍 주식회사 | 반도체 패키지 |
JP2015057827A (ja) * | 2013-09-16 | 2015-03-26 | エルジー イノテック カンパニー リミテッド | 半導体パッケージ |
JP2021005609A (ja) * | 2019-06-26 | 2021-01-14 | イビデン株式会社 | プリント配線板およびその製造方法 |
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