JP2012195302A5 - - Google Patents
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- Publication number
- JP2012195302A5 JP2012195302A5 JP2012134079A JP2012134079A JP2012195302A5 JP 2012195302 A5 JP2012195302 A5 JP 2012195302A5 JP 2012134079 A JP2012134079 A JP 2012134079A JP 2012134079 A JP2012134079 A JP 2012134079A JP 2012195302 A5 JP2012195302 A5 JP 2012195302A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- gas
- organic light
- emitting device
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 22
- 239000010410 layer Substances 0.000 claims 78
- 239000007789 gas Substances 0.000 claims 45
- 238000004519 manufacturing process Methods 0.000 claims 16
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 8
- 238000001312 dry etching Methods 0.000 claims 8
- 229910052710 silicon Inorganic materials 0.000 claims 8
- 239000010703 silicon Substances 0.000 claims 8
- 238000001039 wet etching Methods 0.000 claims 7
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 claims 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims 4
- 239000011368 organic material Substances 0.000 claims 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 2
- 229910052688 Gadolinium Inorganic materials 0.000 claims 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- 229910010413 TiO 2 Inorganic materials 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 239000011575 calcium Substances 0.000 claims 2
- 229910052791 calcium Inorganic materials 0.000 claims 2
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 2
- 239000011133 lead Substances 0.000 claims 2
- 229910052744 lithium Inorganic materials 0.000 claims 2
- 239000011777 magnesium Substances 0.000 claims 2
- 229910052749 magnesium Inorganic materials 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000012044 organic layer Substances 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 229910052700 potassium Inorganic materials 0.000 claims 2
- 239000011591 potassium Substances 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 229910052708 sodium Inorganic materials 0.000 claims 2
- 239000011734 sodium Substances 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 239000011135 tin Substances 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052727 yttrium Inorganic materials 0.000 claims 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2006-0069978 | 2006-07-25 | ||
| KR1020060069978A KR100859084B1 (ko) | 2006-07-25 | 2006-07-25 | 유기발광소자 및 그의 제조방법 |
| KR1020060069979A KR100884185B1 (ko) | 2006-07-25 | 2006-07-25 | 유기발광소자 및 그의 제조방법 |
| KR10-2006-0069979 | 2006-07-25 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009521697A Division JP5650402B2 (ja) | 2006-07-25 | 2007-07-25 | 有機発光素子の製造方法およびこれによって製造された有機発光素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012195302A JP2012195302A (ja) | 2012-10-11 |
| JP2012195302A5 true JP2012195302A5 (enExample) | 2013-01-17 |
| JP5646547B2 JP5646547B2 (ja) | 2014-12-24 |
Family
ID=38981685
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009521697A Active JP5650402B2 (ja) | 2006-07-25 | 2007-07-25 | 有機発光素子の製造方法およびこれによって製造された有機発光素子 |
| JP2012134079A Active JP5646547B2 (ja) | 2006-07-25 | 2012-06-13 | 有機発光素子の製造方法およびこれによって製造された有機発光素子 |
| JP2014165301A Pending JP2015008145A (ja) | 2006-07-25 | 2014-08-14 | 有機発光素子の製造方法およびこれによって製造された有機発光素子 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009521697A Active JP5650402B2 (ja) | 2006-07-25 | 2007-07-25 | 有機発光素子の製造方法およびこれによって製造された有機発光素子 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014165301A Pending JP2015008145A (ja) | 2006-07-25 | 2014-08-14 | 有機発光素子の製造方法およびこれによって製造された有機発光素子 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7935977B2 (enExample) |
| EP (1) | EP2044637B1 (enExample) |
| JP (3) | JP5650402B2 (enExample) |
| WO (1) | WO2008013402A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3303361B2 (ja) | 1992-10-20 | 2002-07-22 | 石川島播磨重工業株式会社 | 繊維強化超耐熱合金 |
| KR101310917B1 (ko) * | 2008-07-17 | 2013-09-25 | 엘지디스플레이 주식회사 | 유기전계발광표시장치와 이의 제조방법 |
| US8598039B2 (en) | 2008-08-20 | 2013-12-03 | Acm Research (Shanghai) Inc. | Barrier layer removal method and apparatus |
| WO2012140887A1 (ja) * | 2011-04-14 | 2012-10-18 | パナソニック株式会社 | 不揮発性記憶素子およびその製造方法 |
| US8962384B2 (en) * | 2012-01-20 | 2015-02-24 | Micron Technology, Inc. | Memory cells having heaters with angled sidewalls |
| JP6136578B2 (ja) * | 2013-05-29 | 2017-05-31 | ソニー株式会社 | 表示装置および表示装置の製造方法ならびに電子機器 |
| KR102111625B1 (ko) * | 2013-06-28 | 2020-05-18 | 삼성디스플레이 주식회사 | 터치센서 내장형 표시장치 및 그의 제조방법 |
| JP6211947B2 (ja) * | 2013-07-31 | 2017-10-11 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
| JP6114670B2 (ja) * | 2013-09-19 | 2017-04-12 | 株式会社ジャパンディスプレイ | 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 |
| EP3018725B1 (en) | 2013-09-30 | 2019-11-06 | LG Display Co., Ltd. | Method for manufacturing organic light-emitting device |
| KR20150037708A (ko) | 2013-09-30 | 2015-04-08 | 주식회사 엘지화학 | 유기 발광 소자 |
| JP6302553B2 (ja) * | 2013-09-30 | 2018-03-28 | エルジー ディスプレイ カンパニー リミテッド | 積層体およびその製造方法 |
| JP2016219125A (ja) | 2015-05-15 | 2016-12-22 | ソニー株式会社 | 発光素子及び表示装置 |
| JP6957294B2 (ja) * | 2017-09-28 | 2021-11-02 | キヤノン株式会社 | 表示装置、電子機器、及び表示装置の製造方法 |
| KR102639567B1 (ko) | 2018-05-14 | 2024-02-23 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
| US10777562B1 (en) | 2019-03-14 | 2020-09-15 | Micron Technology, Inc. | Integrated circuity, DRAM circuitry, methods used in forming integrated circuitry, and methods used in forming DRAM circuitry |
| KR102806401B1 (ko) | 2019-03-29 | 2025-05-13 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조방법 |
| CN110071121B (zh) * | 2019-04-17 | 2020-09-08 | 武汉华星光电半导体显示技术有限公司 | 显示面板及显示装置 |
| US11839093B2 (en) | 2019-05-14 | 2023-12-05 | Kopin Corporation | Image rendering in organic light emitting diode (OLED) displays, apparatuses, systems, and methods |
| KR102896748B1 (ko) | 2019-06-19 | 2025-12-05 | 삼성디스플레이 주식회사 | 표시 패널 |
| KR102637057B1 (ko) * | 2019-09-24 | 2024-02-14 | 엘지디스플레이 주식회사 | 디스플레이 장치 |
| US20230301139A1 (en) * | 2020-09-04 | 2023-09-21 | Applied Materials, Inc. | Inorganic silicon-containing overhang structures of oled subpixels |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4690880A (en) * | 1984-07-20 | 1987-09-01 | Canon Kabushiki Kaisha | Pattern forming method |
| JPS6284520A (ja) * | 1985-10-07 | 1987-04-18 | Sharp Corp | 絶縁膜への開孔形成方法 |
| JPS6465846A (en) * | 1987-09-07 | 1989-03-13 | Matsushita Electric Industrial Co Ltd | Fine processing |
| JPH04236423A (ja) * | 1991-01-21 | 1992-08-25 | Fujitsu Ltd | 半導体装置の製造方法 |
| WO1995028000A2 (en) * | 1994-04-07 | 1995-10-19 | Philips Electronics N.V. | Method of manufacturing a semiconductor device with a multilayer wiring structure containing narrow vias |
| US5795793A (en) * | 1994-09-01 | 1998-08-18 | International Rectifier Corporation | Process for manufacture of MOS gated device with reduced mask count |
| JP4142117B2 (ja) * | 1995-10-06 | 2008-08-27 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネル及びその製造方法 |
| TW417074B (en) * | 1996-09-06 | 2001-01-01 | Matsushita Electric Industrial Co Ltd | Display device |
| JP3428397B2 (ja) * | 1997-10-14 | 2003-07-22 | 松下電器産業株式会社 | 有機エレクトロルミネセンス素子及びその製造方法 |
| US6013538A (en) * | 1997-11-24 | 2000-01-11 | The Trustees Of Princeton University | Method of fabricating and patterning OLEDs |
| CN1140886C (zh) * | 1998-03-12 | 2004-03-03 | 精工爱普生株式会社 | 有源矩阵发射装置及其制造方法 |
| JP2000277252A (ja) * | 1999-03-29 | 2000-10-06 | Matsushita Electric Ind Co Ltd | 有機電場発光パネルとその製造方法 |
| JP3609660B2 (ja) * | 1999-08-12 | 2005-01-12 | 株式会社ルネサステクノロジ | 半導体装置の製造方法及び半導体装置 |
| JP2001264441A (ja) * | 2000-01-14 | 2001-09-26 | Seiko Instruments Inc | カロリーメーターとその製造方法 |
| JP3755727B2 (ja) * | 2000-02-21 | 2006-03-15 | 富士電機ホールディングス株式会社 | 有機薄膜発光ディスプレイパネルおよびその製造方法 |
| US7427529B2 (en) | 2000-06-06 | 2008-09-23 | Simon Fraser University | Deposition of permanent polymer structures for OLED fabrication |
| JP2001351779A (ja) * | 2000-06-07 | 2001-12-21 | Tdk Corp | 有機ｅｌ素子の製造方法、および有機ｅｌ素子 |
| KR100462210B1 (ko) | 2000-06-30 | 2004-12-16 | 한국타이어 주식회사 | 내구성을 향상시킨 자동차용 타이어 |
| JP2002075654A (ja) * | 2000-08-28 | 2002-03-15 | Fuji Xerox Co Ltd | 有機電界発光素子 |
| TW463522B (en) * | 2000-11-07 | 2001-11-11 | Helix Technology Inc | Manufacturing method for organic light emitting diode |
| JP4632337B2 (ja) * | 2000-11-10 | 2011-02-16 | 株式会社半導体エネルギー研究所 | 発光装置 |
| US20030090201A1 (en) * | 2001-11-13 | 2003-05-15 | Kuan-Chang Peng | Organic electro-luminescence device |
| JP3807318B2 (ja) * | 2002-01-31 | 2006-08-09 | 株式会社豊田自動織機 | 有機ｅｌ表示装置 |
| JP2003258094A (ja) * | 2002-03-05 | 2003-09-12 | Sanyo Electric Co Ltd | 配線構造、その製造方法、および表示装置 |
| US6797129B2 (en) * | 2002-06-03 | 2004-09-28 | Eastman Kodak Company | Organic light-emitting device structure using metal cathode sputtering |
| WO2004084590A1 (ja) * | 2003-03-17 | 2004-09-30 | Fujitsu Limited | 有機エレクトロルミネッセンス表示装置及びその製造方法 |
| JP4170138B2 (ja) * | 2003-04-28 | 2008-10-22 | 三菱電機株式会社 | 有機電界発光素子およびその製造方法 |
| DE10340926A1 (de) * | 2003-09-03 | 2005-03-31 | Technische Universität Ilmenau Abteilung Forschungsförderung und Technologietransfer | Verfahren zur Herstellung von elektronischen Bauelementen |
| JP2005088123A (ja) * | 2003-09-17 | 2005-04-07 | Denso Corp | 半導体装置の製造方法 |
| JP2005101268A (ja) * | 2003-09-25 | 2005-04-14 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| TWI220240B (en) * | 2003-09-30 | 2004-08-11 | Au Optronics Corp | Full-color organic electroluminescent device (OLED) display and method of fabricating the same |
| JP4062237B2 (ja) * | 2003-11-05 | 2008-03-19 | 株式会社デンソー | 有機ｅｌ表示装置 |
| JP4457711B2 (ja) * | 2004-03-18 | 2010-04-28 | セイコーエプソン株式会社 | 有機ｅｌ装置の製造方法、有機ｅｌ装置および電子機器 |
| KR20060026776A (ko) * | 2004-09-21 | 2006-03-24 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그의 제조 방법 |
| KR100699998B1 (ko) * | 2004-09-23 | 2007-03-26 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그의 제조 방법 |
| US7450295B2 (en) * | 2006-03-02 | 2008-11-11 | Qualcomm Mems Technologies, Inc. | Methods for producing MEMS with protective coatings using multi-component sacrificial layers |
-
2007
- 2007-07-25 EP EP07768870.3A patent/EP2044637B1/en active Active
- 2007-07-25 US US12/309,614 patent/US7935977B2/en active Active
- 2007-07-25 WO PCT/KR2007/003570 patent/WO2008013402A1/en not_active Ceased
- 2007-07-25 JP JP2009521697A patent/JP5650402B2/ja active Active
-
2012
- 2012-06-13 JP JP2012134079A patent/JP5646547B2/ja active Active
-
2014
- 2014-08-14 JP JP2014165301A patent/JP2015008145A/ja active Pending