JP2011522130A5 - - Google Patents

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Publication number
JP2011522130A5
JP2011522130A5 JP2011512105A JP2011512105A JP2011522130A5 JP 2011522130 A5 JP2011522130 A5 JP 2011522130A5 JP 2011512105 A JP2011512105 A JP 2011512105A JP 2011512105 A JP2011512105 A JP 2011512105A JP 2011522130 A5 JP2011522130 A5 JP 2011522130A5
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JP
Japan
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gas
flow
mbar
diameter
total pressure
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JP2011512105A
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English (en)
Japanese (ja)
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JP2011522130A (ja
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Priority claimed from DE102008026974A external-priority patent/DE102008026974A1/de
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Publication of JP2011522130A publication Critical patent/JP2011522130A/ja
Publication of JP2011522130A5 publication Critical patent/JP2011522130A5/ja
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JP2011512105A 2008-06-03 2009-06-03 重合パラキシリレンまたは置換パラキシリレンの薄い層を堆積させるための堆積方法および堆積装置 Pending JP2011522130A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008026974A DE102008026974A1 (de) 2008-06-03 2008-06-03 Verfahren und Vorrichtung zum Abscheiden dünner Schichten aus polymeren Para-Xylylene oder substituiertem Para-Xylylene
DE102008026974.3 2008-06-03
PCT/EP2009/056768 WO2009147156A1 (de) 2008-06-03 2009-06-03 Verfahren und vorrichtung zum abscheiden dünner schichten aus polymeren para-xylylene oder substituiertem para-xylylene

Publications (2)

Publication Number Publication Date
JP2011522130A JP2011522130A (ja) 2011-07-28
JP2011522130A5 true JP2011522130A5 (enExample) 2012-07-12

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ID=41203865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011512105A Pending JP2011522130A (ja) 2008-06-03 2009-06-03 重合パラキシリレンまたは置換パラキシリレンの薄い層を堆積させるための堆積方法および堆積装置

Country Status (9)

Country Link
US (1) US20110293832A1 (enExample)
EP (1) EP2293883B1 (enExample)
JP (1) JP2011522130A (enExample)
KR (1) KR101967778B1 (enExample)
CN (1) CN102056679B (enExample)
DE (1) DE102008026974A1 (enExample)
RU (1) RU2481901C2 (enExample)
TW (1) TWI463031B (enExample)
WO (1) WO2009147156A1 (enExample)

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DE102010000480A1 (de) 2010-02-19 2011-08-25 Aixtron Ag, 52134 Vorrichtung zum Abscheiden einer organischen Schicht, insbesondere einer Polymerschicht mit einem Aerosolerzeuger sowie ein hierzu geeigneter Aerosolerzeuger
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US10743421B2 (en) * 2016-06-17 2020-08-11 Hzo, Inc. Mixing dimers for moisture resistant materials
CN108355855B (zh) * 2018-03-23 2020-05-29 德淮半导体有限公司 增粘剂涂布装置
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WO2020251696A1 (en) 2019-06-10 2020-12-17 Applied Materials, Inc. Processing system for forming layers
US11788190B2 (en) 2019-07-05 2023-10-17 Asm Ip Holding B.V. Liquid vaporizer
GB201913140D0 (en) * 2019-09-12 2019-10-30 Ucl Business Plc Methods and apparatuses for fabricating polymeric conformal coatings, parts coated with polymeric conformal coatings, and optical apparatus
US11946136B2 (en) 2019-09-20 2024-04-02 Asm Ip Holding B.V. Semiconductor processing device
KR102433553B1 (ko) * 2020-07-30 2022-08-18 연세대학교 산학협력단 폴리머 증착기 및 폴리머 증착 방법
CN114277359B (zh) * 2021-12-28 2023-11-28 新美光(苏州)半导体科技有限公司 进气管道、化学气相沉积炉及向其通入前驱体的方法
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