JP2015523309A5 - - Google Patents

Download PDF

Info

Publication number
JP2015523309A5
JP2015523309A5 JP2015515135A JP2015515135A JP2015523309A5 JP 2015523309 A5 JP2015523309 A5 JP 2015523309A5 JP 2015515135 A JP2015515135 A JP 2015515135A JP 2015515135 A JP2015515135 A JP 2015515135A JP 2015523309 A5 JP2015523309 A5 JP 2015523309A5
Authority
JP
Japan
Prior art keywords
burner
gas
flow plate
inlet
channels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015515135A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015523309A (ja
JP6149311B2 (ja
Filing date
Publication date
Priority claimed from US13/484,466 external-priority patent/US8857216B2/en
Application filed filed Critical
Publication of JP2015523309A publication Critical patent/JP2015523309A/ja
Publication of JP2015523309A5 publication Critical patent/JP2015523309A5/ja
Application granted granted Critical
Publication of JP6149311B2 publication Critical patent/JP6149311B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015515135A 2012-05-31 2013-05-29 バーナモジュール、ガラス板を形成する方法、及びこの方法により形成されたガラス板 Expired - Fee Related JP6149311B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/484,466 2012-05-31
US13/484,466 US8857216B2 (en) 2012-05-31 2012-05-31 Burner modules, methods of forming glass sheets, and glass sheets formed thereby
PCT/US2013/043022 WO2013181206A1 (en) 2012-05-31 2013-05-29 Burner modules, methods of forming glass sheets, and glass sheets formed thereby

Publications (3)

Publication Number Publication Date
JP2015523309A JP2015523309A (ja) 2015-08-13
JP2015523309A5 true JP2015523309A5 (enExample) 2016-06-02
JP6149311B2 JP6149311B2 (ja) 2017-06-21

Family

ID=49670591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515135A Expired - Fee Related JP6149311B2 (ja) 2012-05-31 2013-05-29 バーナモジュール、ガラス板を形成する方法、及びこの方法により形成されたガラス板

Country Status (7)

Country Link
US (1) US8857216B2 (enExample)
EP (1) EP2858957B1 (enExample)
JP (1) JP6149311B2 (enExample)
KR (1) KR20150022856A (enExample)
CN (1) CN104768882B (enExample)
TW (1) TWI570077B (enExample)
WO (1) WO2013181206A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9199870B2 (en) 2012-05-22 2015-12-01 Corning Incorporated Electrostatic method and apparatus to form low-particulate defect thin glass sheets
CN106573831B (zh) 2014-08-12 2020-04-21 康宁股份有限公司 用于减少显示器玻璃静电放电的有机表面处理
US10570048B2 (en) 2015-02-13 2020-02-25 Corning Incorporated Silica-containing sheet and related system and methods
ES2712508T3 (es) * 2016-09-15 2019-05-13 Ingo Hilgenberg Quemador para generación de una llama alargada
US10745804B2 (en) * 2017-01-31 2020-08-18 Ofs Fitel, Llc Parallel slit torch for making optical fiber preform

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1998300A (en) * 1930-12-16 1935-04-16 Ackermann Hugo Gas burner
US2418208A (en) * 1943-11-04 1947-04-01 Air Reduction Gas torch
US2719581A (en) * 1952-02-13 1955-10-04 Selas Corp Of America Welding torch
JPH05263939A (ja) * 1991-12-03 1993-10-12 Ulvac Japan Ltd ナイフエッジ型メタルシールフランジ
GB9312634D0 (en) * 1993-06-18 1993-08-04 Tsl Group Plc Improvements in vitreous silica manufacture
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
EP1044172A4 (en) * 1997-12-19 2005-01-19 Corning Inc BURNER AND PROCESS FOR PRODUCING METAL OXIDE SUES
EP1144913A4 (en) * 1998-12-17 2004-12-15 Corning Inc DISTRIBUTION DEVICE FOR BURNERS FOR USE IN A GAS PHASE DEPOSITION METHOD
US6736633B1 (en) * 1998-12-17 2004-05-18 Corning Incorporated Burner manifold apparatus for use in a chemical vapor deposition process
US6328807B1 (en) 1999-12-14 2001-12-11 Corning Incorporated Chuck heater for improved planar deposition process
AU2001268246A1 (en) 2000-08-10 2002-02-25 Corning Incorporated Method for depositing a glass layer on a substrate
AU2001288712A1 (en) * 2000-10-03 2002-04-15 Corning Incorporated Method and apparatus for manufacturing optical fiber preforms using a large diameter bait rod
US6743011B2 (en) * 2001-12-19 2004-06-01 Corning Incorporated Multi-layer burner module, adapter, and assembly therefor
ATE448178T1 (de) * 2002-12-20 2009-11-15 Prysmian Spa Brenner für die chemische gasphasenabscheidung von glas
US7726967B2 (en) 2004-06-23 2010-06-01 Char-Broil, Llc Radiant burner
US8137469B2 (en) 2005-12-14 2012-03-20 Corning Incorporated Method and apparatus for making fused silica
CN200968605Y (zh) * 2006-09-01 2007-10-31 西安热工研究院有限公司 一种中心风可调直流燃烧器
WO2008121271A1 (en) * 2007-03-30 2008-10-09 Corning Incorporated Three dimensional micro-fabricated burners
US7677058B2 (en) * 2007-05-07 2010-03-16 Corning Incorporated Process and apparatus for making glass sheet
US8062733B2 (en) 2009-05-15 2011-11-22 Corning Incorporated Roll-to-roll glass material attributes and fingerprint
US8359884B2 (en) * 2009-07-17 2013-01-29 Corning Incorporated Roll-to-roll glass: touch-free process and multilayer approach
FI126760B (fi) 2010-01-11 2017-05-15 Glaston Services Ltd Oy Menetelmä ja laite lasilevyjen kannattamiseksi ja kuumentamiseksi kuumalla kaasutyynyllä
JP5259804B2 (ja) * 2011-11-08 2013-08-07 シャープ株式会社 気相成長装置及び気相成長方法

Similar Documents

Publication Publication Date Title
TWI836110B (zh) 溫度控制總成、及控制氣相反應器之溫度控制總成的溫度之方法
JP2015523309A5 (enExample)
CN102762764B (zh) 具有减少的工具痕迹的用于均匀薄膜沉积的平行板反应器
CN103388132B (zh) 气体喷淋头、其制造方法及薄膜生长反应器
JP2011522130A5 (enExample)
CN106463344B (zh) 喷头设计
RU2010134972A (ru) Газовая горелка
CN102828167B (zh) 一种排气方法、装置及基片处理设备
WO2011094143A3 (en) Apparatus for controlling temperature uniformity of a showerhead
RU2010154416A (ru) Горелка для осаждения в результате сгорания и/или относящиеся к ним способы
CN116334590A (zh) 反应腔室的进气机构、反应腔室及外延生长设备
CN104561938B (zh) 一种浮法在线常压化学气相沉积镀膜反应器
CN105502287B (zh) 带表面多孔化微凸台阵列结构催化剂载体的制氢微重整器
CN100340512C (zh) 浮法玻璃在线镀膜装置
WO2020098335A1 (zh) 一种进气装置及干燥单元
JP2014062323A (ja) ガス噴射装置及びこれに用いられるインジェクターパイプ
TWI652371B (zh) 設有輕量化出氣板之cvd反應器進氣機構
JP2020522669A (ja) バーナー及びバーナーを含むガス給湯器
JP2012067977A5 (enExample)
CN203559124U (zh) 一种纵横交错沟槽式多气体独立通道的喷淋结构
CN109681871B (zh) 燃烧器和具有其的热水器
CN106609360A (zh) 一种加热掺杂气体的喷淋结构
RU2013125361A (ru) Труба предварительного смешивания топлива с обработанной поверхностью
JP2014185816A (ja) 熱源機
CN106609361A (zh) 一种多气体多区域的喷淋结构