ATE448178T1 - Brenner für die chemische gasphasenabscheidung von glas - Google Patents

Brenner für die chemische gasphasenabscheidung von glas

Info

Publication number
ATE448178T1
ATE448178T1 AT02798354T AT02798354T ATE448178T1 AT E448178 T1 ATE448178 T1 AT E448178T1 AT 02798354 T AT02798354 T AT 02798354T AT 02798354 T AT02798354 T AT 02798354T AT E448178 T1 ATE448178 T1 AT E448178T1
Authority
AT
Austria
Prior art keywords
burner
glass
vapor deposition
chemical vapor
central nozzle
Prior art date
Application number
AT02798354T
Other languages
English (en)
Inventor
Carlo Cognolato
Francesco Mole
Andrea Demergazzi
Franco Veronelli
Original Assignee
Prysmian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prysmian Spa filed Critical Prysmian Spa
Application granted granted Critical
Publication of ATE448178T1 publication Critical patent/ATE448178T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D99/00—Subject matter not provided for in other groups of this subclass
    • F23D99/002—Burners specially adapted for specific applications
    • F23D99/004—Burners specially adapted for specific applications for use in particular heating operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/16—Non-circular ports, e.g. square or oval
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/21—Burners specially adapted for a particular use
    • F23D2900/21005—Burners specially adapted for a particular use for flame deposition, e.g. flame hydrolysis deposition [FHD]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Gas Burners (AREA)
  • Glass Compositions (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
AT02798354T 2002-12-20 2002-12-20 Brenner für die chemische gasphasenabscheidung von glas ATE448178T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2002/014614 WO2004056714A1 (en) 2002-12-20 2002-12-20 Burner for chemical vapour deposition of glass

Publications (1)

Publication Number Publication Date
ATE448178T1 true ATE448178T1 (de) 2009-11-15

Family

ID=32668674

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02798354T ATE448178T1 (de) 2002-12-20 2002-12-20 Brenner für die chemische gasphasenabscheidung von glas

Country Status (10)

Country Link
US (1) US8567218B2 (de)
EP (1) EP1572593B1 (de)
JP (1) JP2006510561A (de)
CN (1) CN1694849B (de)
AT (1) ATE448178T1 (de)
AU (1) AU2002363890A1 (de)
BR (1) BR0215967B1 (de)
DE (1) DE60234393D1 (de)
DK (1) DK1572593T3 (de)
WO (1) WO2004056714A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004277257A (ja) * 2003-03-18 2004-10-07 Sumitomo Electric Ind Ltd 多孔質ガラス微粒子堆積体の製造法及びガラス微粒子合成用バーナ
US8440256B2 (en) * 2007-12-17 2013-05-14 Guardian Industries Corp. Combustion deposition of metal oxide coatings deposited via infrared burners
US8563097B2 (en) 2007-12-17 2013-10-22 Guardian Industries Corp. Remote combustion deposition burner and/or related methods
CN101481789B (zh) * 2008-01-11 2012-03-21 财团法人工业技术研究院 镀膜系统及其隔离装置
JP4750867B2 (ja) * 2009-02-24 2011-08-17 信越化学工業株式会社 多孔質ガラス母材製造用バーナ及び多孔質ガラス母材の製造方法
US9637820B2 (en) 2009-12-28 2017-05-02 Guardian Industries Corp. Flame guard and exhaust system for large area combustion deposition line, and associated methods
JP2011230936A (ja) * 2010-04-23 2011-11-17 Shin-Etsu Chemical Co Ltd 多孔質ガラス母材製造用バーナ
US8567214B2 (en) * 2010-06-28 2013-10-29 Asahi Glass Company, Limited Method for producing glass body and method for producing optical member for EUV lithography
CN101914762B (zh) * 2010-08-31 2013-03-06 广东省中科宏微半导体设备有限公司 一种用于金属有机物化学气相沉积设备的进气喷头结构
US8857216B2 (en) 2012-05-31 2014-10-14 Corning Incorporated Burner modules, methods of forming glass sheets, and glass sheets formed thereby
CN105271699B (zh) * 2015-11-16 2019-02-22 江苏通鼎光棒有限公司 一种用于沉积ovd疏松体的装置及其应用
CN109928611B (zh) * 2017-12-18 2024-01-30 中天科技精密材料有限公司 燃烧器及具有该燃烧器的光纤预制棒加工装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2121948A (en) * 1935-05-11 1938-06-28 Western Electric Co Burner
US2775482A (en) * 1952-10-02 1956-12-25 Berthoud & Cie Means for distributing liquids very finely
US3003312A (en) * 1957-08-19 1961-10-10 Thompson Ramo Wooldridge Inc Exhaust nozzle for jet engines
US3565346A (en) * 1968-07-11 1971-02-23 Texas Instruments Inc Method and apparatus for forming an article of high purity metal oxide
US3572591A (en) * 1969-02-24 1971-03-30 Precision Valve Corp Aerosol powder marking device
US4292290A (en) * 1980-04-16 1981-09-29 Cabot Corporation Process for the production of finely-divided metal and metalloid oxides
CA1284921C (en) * 1984-02-27 1991-06-18 Hiroyuki Suda Method, apparatus and burner for fabricating an optical fiber preform
AU583588B2 (en) * 1985-02-06 1989-05-04 Sumitomo Electric Industries, Ltd. Gas reaction apparatus and multi-wall pipe type burner therefor
US5174803A (en) * 1988-08-30 1992-12-29 At&T Bell Laboratories Apparatus for heating glassy tubes
JPH04160026A (ja) * 1990-10-23 1992-06-03 Fujikura Ltd ガラス微粒子生成用バーナ
JPH04228440A (ja) 1990-12-27 1992-08-18 Sumitomo Electric Ind Ltd ガラス体の製造方法
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
JPH1081534A (ja) 1996-09-04 1998-03-31 Furukawa Electric Co Ltd:The コアバーナ及びコア母材製造方法
EP0978487A3 (de) 1998-08-07 2001-02-21 Corning Incorporated Brenner mit abgedichtetem Kopf und ohne Vormischung für die Abscheidung von Quarzglas
KR20010079889A (ko) 1998-09-22 2001-08-22 알프레드 엘. 미첼슨 용융 실리카 유리의 보울을 생성하는 버너
US6363746B1 (en) * 2000-03-15 2002-04-02 Corning Incorporated Method and apparatus for making multi-component glass soot
DE10018857C1 (de) * 2000-04-14 2001-11-29 Heraeus Quarzglas Vorrichtung zur Herstellung eines Quarzglaskörpers
JP3910806B2 (ja) * 2001-06-06 2007-04-25 古河電気工業株式会社 光ファイバ母材の製造方法
US6910352B2 (en) * 2002-04-24 2005-06-28 Corning Incorporated Deposition of high fluorine content silica soot

Also Published As

Publication number Publication date
US20060162389A1 (en) 2006-07-27
EP1572593A1 (de) 2005-09-14
BR0215967A (pt) 2005-09-13
EP1572593B1 (de) 2009-11-11
AU2002363890A1 (en) 2004-07-14
DE60234393D1 (de) 2009-12-24
BR0215967B1 (pt) 2011-09-20
CN1694849B (zh) 2010-04-28
CN1694849A (zh) 2005-11-09
US8567218B2 (en) 2013-10-29
JP2006510561A (ja) 2006-03-30
WO2004056714A1 (en) 2004-07-08
DK1572593T3 (da) 2010-03-29

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