JP2008509560A5 - - Google Patents
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- Publication number
- JP2008509560A5 JP2008509560A5 JP2007524954A JP2007524954A JP2008509560A5 JP 2008509560 A5 JP2008509560 A5 JP 2008509560A5 JP 2007524954 A JP2007524954 A JP 2007524954A JP 2007524954 A JP2007524954 A JP 2007524954A JP 2008509560 A5 JP2008509560 A5 JP 2008509560A5
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- insert
- flange
- face plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/910,269 US7628863B2 (en) | 2004-08-03 | 2004-08-03 | Heated gas box for PECVD applications |
| US10/910,269 | 2004-08-03 | ||
| PCT/US2005/027612 WO2006017596A2 (en) | 2004-08-03 | 2005-08-03 | Heated gas box for pecvd applications |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008509560A JP2008509560A (ja) | 2008-03-27 |
| JP2008509560A5 true JP2008509560A5 (enExample) | 2011-07-28 |
| JP4889640B2 JP4889640B2 (ja) | 2012-03-07 |
Family
ID=35448162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007524954A Expired - Lifetime JP4889640B2 (ja) | 2004-08-03 | 2005-08-03 | 処理領域で基板に化学気相堆積を行うためのチャンバ |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7628863B2 (enExample) |
| EP (1) | EP1797216A2 (enExample) |
| JP (1) | JP4889640B2 (enExample) |
| KR (1) | KR100870792B1 (enExample) |
| CN (1) | CN1993495A (enExample) |
| SG (1) | SG155179A1 (enExample) |
| TW (1) | TWI318422B (enExample) |
| WO (1) | WO2006017596A2 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4236882B2 (ja) * | 2001-08-01 | 2009-03-11 | 東京エレクトロン株式会社 | ガス処理装置およびガス処理方法 |
| US7628863B2 (en) * | 2004-08-03 | 2009-12-08 | Applied Materials, Inc. | Heated gas box for PECVD applications |
| US8216374B2 (en) * | 2005-12-22 | 2012-07-10 | Applied Materials, Inc. | Gas coupler for substrate processing chamber |
| US9157151B2 (en) * | 2006-06-05 | 2015-10-13 | Applied Materials, Inc. | Elimination of first wafer effect for PECVD films |
| US20080050932A1 (en) * | 2006-08-23 | 2008-02-28 | Applied Materials, Inc. | Overall defect reduction for PECVD films |
| US8444926B2 (en) * | 2007-01-30 | 2013-05-21 | Applied Materials, Inc. | Processing chamber with heated chamber liner |
| JP5347294B2 (ja) * | 2007-09-12 | 2013-11-20 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
| FR2930561B1 (fr) * | 2008-04-28 | 2011-01-14 | Altatech Semiconductor | Dispositif et procede de traitement chimique en phase vapeur. |
| US7699935B2 (en) | 2008-06-19 | 2010-04-20 | Applied Materials, Inc. | Method and system for supplying a cleaning gas into a process chamber |
| US9441295B2 (en) * | 2010-05-14 | 2016-09-13 | Solarcity Corporation | Multi-channel gas-delivery system |
| US8502689B2 (en) | 2010-09-23 | 2013-08-06 | Applied Materials, Inc. | System and method for voltage-based plasma excursion detection |
| US8587321B2 (en) | 2010-09-24 | 2013-11-19 | Applied Materials, Inc. | System and method for current-based plasma excursion detection |
| JP2015536043A (ja) * | 2012-09-26 | 2015-12-17 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 基板処理システムにおける温度制御 |
| JP6242095B2 (ja) * | 2013-06-28 | 2017-12-06 | 株式会社日立国際電気 | クリーニング方法、半導体装置の製造方法、基板処理装置及びプログラム |
| US9972740B2 (en) | 2015-06-07 | 2018-05-15 | Tesla, Inc. | Chemical vapor deposition tool and process for fabrication of photovoltaic structures |
| US10741428B2 (en) * | 2016-04-11 | 2020-08-11 | Applied Materials, Inc. | Semiconductor processing chamber |
| US10428426B2 (en) * | 2016-04-22 | 2019-10-01 | Applied Materials, Inc. | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime |
| US9748434B1 (en) | 2016-05-24 | 2017-08-29 | Tesla, Inc. | Systems, method and apparatus for curing conductive paste |
| US9954136B2 (en) | 2016-08-03 | 2018-04-24 | Tesla, Inc. | Cassette optimized for an inline annealing system |
| US10115856B2 (en) | 2016-10-31 | 2018-10-30 | Tesla, Inc. | System and method for curing conductive paste using induction heating |
| KR102719710B1 (ko) | 2018-12-12 | 2024-10-22 | 삼성디스플레이 주식회사 | 증착 장치 |
| US11242600B2 (en) * | 2020-06-17 | 2022-02-08 | Applied Materials, Inc. | High temperature face plate for deposition application |
| CN113130354A (zh) * | 2021-04-09 | 2021-07-16 | 长鑫存储技术有限公司 | 半导体生产装置 |
| CN115821232A (zh) * | 2022-12-21 | 2023-03-21 | 拓荆科技股份有限公司 | 一种可流动性薄膜沉积设备气体流向系统 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2173274B (en) * | 1985-04-04 | 1989-02-01 | Boc Group Plc | Improvements in inhalation apparatus |
| US5300322A (en) * | 1992-03-10 | 1994-04-05 | Martin Marietta Energy Systems, Inc. | Molybdenum enhanced low-temperature deposition of crystalline silicon nitride |
| KR100238626B1 (ko) * | 1992-07-28 | 2000-02-01 | 히가시 데쓰로 | 플라즈마 처리장치 |
| US5800686A (en) * | 1993-04-05 | 1998-09-01 | Applied Materials, Inc. | Chemical vapor deposition chamber with substrate edge protection |
| JP3360098B2 (ja) * | 1995-04-20 | 2002-12-24 | 東京エレクトロン株式会社 | 処理装置のシャワーヘッド構造 |
| US5772773A (en) * | 1996-05-20 | 1998-06-30 | Applied Materials, Inc. | Co-axial motorized wafer lift |
| KR100492258B1 (ko) * | 1996-10-11 | 2005-09-02 | 가부시키가이샤 에바라 세이사꾸쇼 | 반응가스분출헤드 |
| US6090442A (en) * | 1997-04-14 | 2000-07-18 | University Technology Corporation | Method of growing films on substrates at room temperatures using catalyzed binary reaction sequence chemistry |
| US6079356A (en) * | 1997-12-02 | 2000-06-27 | Applied Materials, Inc. | Reactor optimized for chemical vapor deposition of titanium |
| JP4021593B2 (ja) * | 1998-09-25 | 2007-12-12 | 株式会社東芝 | 半導体装置およびその製造方法 |
| JP2001168092A (ja) * | 1999-01-08 | 2001-06-22 | Toshiba Corp | 半導体装置およびその製造方法 |
| KR100302609B1 (ko) * | 1999-05-10 | 2001-09-13 | 김영환 | 온도가변 가스 분사 장치 |
| US6153261A (en) * | 1999-05-28 | 2000-11-28 | Applied Materials, Inc. | Dielectric film deposition employing a bistertiarybutylaminesilane precursor |
| US6586343B1 (en) * | 1999-07-09 | 2003-07-01 | Applied Materials, Inc. | Method and apparatus for directing constituents through a processing chamber |
| KR100390822B1 (ko) * | 1999-12-28 | 2003-07-10 | 주식회사 하이닉스반도체 | 이미지센서에서의 암전류 감소 방법 |
| US6500266B1 (en) * | 2000-01-18 | 2002-12-31 | Applied Materials, Inc. | Heater temperature uniformity qualification tool |
| US6518626B1 (en) * | 2000-02-22 | 2003-02-11 | Micron Technology, Inc. | Method of forming low dielectric silicon oxynitride spacer films highly selective of etchants |
| US6271054B1 (en) * | 2000-06-02 | 2001-08-07 | International Business Machines Corporation | Method for reducing dark current effects in a charge couple device |
| JP4717179B2 (ja) * | 2000-06-21 | 2011-07-06 | 日本電気株式会社 | ガス供給装置及び処理装置 |
| JP4567148B2 (ja) | 2000-06-23 | 2010-10-20 | 東京エレクトロン株式会社 | 薄膜形成装置 |
| US6582522B2 (en) * | 2000-07-21 | 2003-06-24 | Applied Materials, Inc. | Emissivity-change-free pumping plate kit in a single wafer chamber |
| JP4815724B2 (ja) * | 2000-09-08 | 2011-11-16 | 東京エレクトロン株式会社 | シャワーヘッド構造及び成膜装置 |
| JP2002129334A (ja) * | 2000-10-26 | 2002-05-09 | Applied Materials Inc | 気相堆積装置のクリーニング方法及び気相堆積装置 |
| US6528430B2 (en) * | 2001-05-01 | 2003-03-04 | Samsung Electronics Co., Ltd. | Method of forming silicon containing thin films by atomic layer deposition utilizing Si2C16 and NH3 |
| JP4720019B2 (ja) * | 2001-05-18 | 2011-07-13 | 東京エレクトロン株式会社 | 冷却機構及び処理装置 |
| US6566246B1 (en) * | 2001-05-21 | 2003-05-20 | Novellus Systems, Inc. | Deposition of conformal copper seed layers by control of barrier layer morphology |
| JP4121269B2 (ja) * | 2001-11-27 | 2008-07-23 | 日本エー・エス・エム株式会社 | セルフクリーニングを実行するプラズマｃｖｄ装置及び方法 |
| US6559074B1 (en) * | 2001-12-12 | 2003-05-06 | Applied Materials, Inc. | Method of forming a silicon nitride layer on a substrate |
| US6777352B2 (en) * | 2002-02-11 | 2004-08-17 | Applied Materials, Inc. | Variable flow deposition apparatus and method in semiconductor substrate processing |
| US6946033B2 (en) * | 2002-09-16 | 2005-09-20 | Applied Materials Inc. | Heated gas distribution plate for a processing chamber |
| US20040052969A1 (en) * | 2002-09-16 | 2004-03-18 | Applied Materials, Inc. | Methods for operating a chemical vapor deposition chamber using a heated gas distribution plate |
| US6954585B2 (en) * | 2002-12-03 | 2005-10-11 | Tokyo Electron Limited | Substrate processing method and apparatus |
| US20040118519A1 (en) * | 2002-12-20 | 2004-06-24 | Applied Materials, Inc. | Blocker plate bypass design to improve clean rate at the edge of the chamber |
| JP4265409B2 (ja) * | 2003-02-13 | 2009-05-20 | 三菱マテリアル株式会社 | Ｓｉ−Ｓｉ結合を有する有機Ｓｉ含有化合物を用いたＳｉ含有薄膜の形成方法 |
| US20050150452A1 (en) * | 2004-01-14 | 2005-07-14 | Soovo Sen | Process kit design for deposition chamber |
| US20050196971A1 (en) * | 2004-03-05 | 2005-09-08 | Applied Materials, Inc. | Hardware development to reduce bevel deposition |
| US7628863B2 (en) * | 2004-08-03 | 2009-12-08 | Applied Materials, Inc. | Heated gas box for PECVD applications |
| US20060093756A1 (en) * | 2004-11-03 | 2006-05-04 | Nagarajan Rajagopalan | High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films |
-
2004
- 2004-08-03 US US10/910,269 patent/US7628863B2/en not_active Expired - Lifetime
-
2005
- 2005-08-03 TW TW094126404A patent/TWI318422B/zh not_active IP Right Cessation
- 2005-08-03 KR KR1020077003453A patent/KR100870792B1/ko not_active Expired - Lifetime
- 2005-08-03 JP JP2007524954A patent/JP4889640B2/ja not_active Expired - Lifetime
- 2005-08-03 CN CNA2005800262516A patent/CN1993495A/zh active Pending
- 2005-08-03 SG SG200905172-3A patent/SG155179A1/en unknown
- 2005-08-03 EP EP05779323A patent/EP1797216A2/en not_active Withdrawn
- 2005-08-03 WO PCT/US2005/027612 patent/WO2006017596A2/en not_active Ceased
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