JP2011520248A5 - - Google Patents
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- JP2011520248A5 JP2011520248A5 JP2011504098A JP2011504098A JP2011520248A5 JP 2011520248 A5 JP2011520248 A5 JP 2011520248A5 JP 2011504098 A JP2011504098 A JP 2011504098A JP 2011504098 A JP2011504098 A JP 2011504098A JP 2011520248 A5 JP2011520248 A5 JP 2011520248A5
- Authority
- JP
- Japan
- Prior art keywords
- flexible substrate
- adhesive layer
- rigid support
- assembly
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims 18
- 239000000853 adhesive Substances 0.000 claims 15
- 230000001070 adhesive Effects 0.000 claims 15
- 239000002184 metal Substances 0.000 claims 5
- 239000004642 Polyimide Substances 0.000 claims 4
- 229920001721 Polyimide Polymers 0.000 claims 4
- 239000011521 glass Substances 0.000 claims 4
- 229920001296 polysiloxane Polymers 0.000 claims 4
- 239000002390 adhesive tape Substances 0.000 claims 3
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 2
- 239000004593 Epoxy Substances 0.000 claims 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims 2
- 238000000354 decomposition reaction Methods 0.000 claims 2
- 125000003700 epoxy group Chemical group 0.000 claims 2
- JOYRKODLDBILNP-UHFFFAOYSA-N ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 2
- -1 polysiloxane Polymers 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 claims 2
- 239000000969 carrier Substances 0.000 claims 1
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000005669 field effect Effects 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
- 238000003672 processing method Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Claims (16)
- フレキシブル基板アセンブリの製造方法であって、
180℃よりも低いガラス転移温度および220℃よりも高い分解温度を有する粘弾性ポリマーを含む接着層を用いて、剛性支持体にフレキシブル基板を取り付ける工程を含む方法。 - 前記取り付ける工程は、
前記剛性支持体の表面に前記接着層を堆積させる工程と、
前記接着層が前記剛性支持体と前記フレキシブル基板の間に存在するように、前記剛性支持体と前記フレキシブル基板とを結合する工程と、
を含む請求項1に記載の方法。 - 前記接着層は、約10〜約1000ppm/℃の範囲の熱膨張率を有し、約27mPaリットル/秒(2×10 -4 トルリットル/秒)未満の割合で脱気される請求項1または2に記載の方法。
- 前記接着層は、ポリイミド、ポリアクリル、アクリル、ウレタン、エポキシ、フェノール、ビスマレイミド、シリコーンまたはシロキサンを含む請求項3に記載の方法。
- 前記接着層は、n−アクリル酸ブチル、ポリシロキサン、ポリシリコーンまたはポリイミドを含む請求項4に記載の方法。
- 前記剛性支持体は、半導体ウェーハ、アルミナ、ガラス、または熱膨張率がフレキシブル基板に適合した材料を含む請求項1−5のいずれか一項に記載の方法。
- 前記フレキシブル基板は、プラスチック基板または金属基板である請求項1−6のいずれか一項に記載の方法。
- 前記フレキシブル基板と剛性キャリヤを接続する前に、
前記接着層上に絶縁層または金属層を直接形成する工程と、
前記絶縁層または前記金属層上に両面接着テープを直接配置する工程と
をさらに含む請求項1−7のいずれか1項に記載の方法。 - 前記フレキシブル基板上にディスプレイアーキテクチャを形成する工程と、
前記フレキシブル基板の表面上に、1または複数の薄膜トランジスタ、有機発光ダイオード、無機発光ダイオード、電極アレイ、電界効果トランジスタ、パッシブ構造およびそれらの組み合わせを形成する工程と、
をさらに含む請求項1−8のいずれか一項に記載の方法。 - フレキシブル基板、剛性支持体、および接着層を備えたアセンブリであって、
前記フレキシブル基板は、該フレキシブル基板と剛性支持体の間において、接着層を用いて前記剛性支持体に取り付けられており、前記接着剤が、180℃よりも低いガラス転移温度および220℃よりも高い分解温度を有する粘弾性ポリマーの接着剤を含む、アセンブリ。 - 前記接着剤は、約10〜約1000ppm/℃の範囲の熱膨張率を有し、約27mPaリットル/秒(2×10 -4 トルリットル/秒)未満の割合で脱気される請求項10に記載のアセンブリ。
- 前記接着層は、ポリイミド、ポリアクリル、アクリル、ウレタン、エポキシ、フェノール、ビスマレイミド、シリコーン、またはシロキサンを含む請求項11に記載のアセンブリ。
- 前記接着層は、n−アクリル酸ブチル、ポリシロキサン、ポリシリコーン、またはポリイミドを含む請求項12に記載のアセンブリ。
- 前記剛性支持体は、半導体ウェーハ、アルミナ、ガラス、または熱膨張率がフレキシブル基板に適合した材料を含む請求項10−13のいずれか一項に記載のアセンブリ。
- 前記接着層上に直接形成された絶縁層または金属層と、
前記絶縁層または前記金属層上に直接形成された両面接着テープとをさらに備え、
前記フレキシブル基板が両面接着テープに接触している請求項10−14のいずれか一項に記載のアセンブリ。 - フレキシブルディスプレイの処理方法であって、
フレキシブルディスプレイを提供する工程と、
請求項1−28のいずれか一項に記載の剛性基板に、前記フレキシブルディスプレイを取り付ける工程であって、前記フレキシブルディスプレイが前記フレキシブル基板である、前記工程と、
を含む方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4322308P | 2008-04-08 | 2008-04-08 | |
US61/043,223 | 2008-04-08 | ||
PCT/US2009/039577 WO2009126544A1 (en) | 2008-04-08 | 2009-04-06 | Assemblies and methods for reducing warp and bow of a flexible substrate during semiconductor processing |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011520248A JP2011520248A (ja) | 2011-07-14 |
JP2011520248A5 true JP2011520248A5 (ja) | 2012-05-24 |
JP5555226B2 JP5555226B2 (ja) | 2014-07-23 |
Family
ID=41011823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011504098A Active JP5555226B2 (ja) | 2008-04-08 | 2009-04-06 | 半導体加工中のフレキシブル基板のwarpおよびbowを減少させるアセンブリおよび方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8685201B2 (ja) |
EP (1) | EP2274162A1 (ja) |
JP (1) | JP5555226B2 (ja) |
KR (1) | KR101517263B1 (ja) |
CN (1) | CN101980861B (ja) |
SG (1) | SG188921A1 (ja) |
TW (1) | TWI488750B (ja) |
WO (1) | WO2009126544A1 (ja) |
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JP2007146121A (ja) * | 2005-11-01 | 2007-06-14 | Hitachi Chem Co Ltd | 粘弾性樹脂組成物、これを用いた金属箔張積層板、プリプレグ、樹脂付き金属箔及び樹脂フィルム。 |
SG172621A1 (en) * | 2006-07-05 | 2011-07-28 | Univ Arizona | Method of temporarily attaching a rigid carrier to a substrate |
KR101125762B1 (ko) * | 2007-04-10 | 2012-03-20 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체용 접착필름 및 이를 이용한 반도체 장치 |
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2009
- 2009-04-06 CN CN200980111340.9A patent/CN101980861B/zh active Active
- 2009-04-06 US US12/921,896 patent/US8685201B2/en active Active
- 2009-04-06 EP EP20090729456 patent/EP2274162A1/en not_active Withdrawn
- 2009-04-06 SG SG2013020243A patent/SG188921A1/en unknown
- 2009-04-06 KR KR1020107022405A patent/KR101517263B1/ko active IP Right Grant
- 2009-04-06 JP JP2011504098A patent/JP5555226B2/ja active Active
- 2009-04-06 WO PCT/US2009/039577 patent/WO2009126544A1/en active Application Filing
- 2009-04-08 TW TW098111721A patent/TWI488750B/zh active
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