TW200717808A - Flexible thin film transistor substrate and method of fabricating the same - Google Patents
Flexible thin film transistor substrate and method of fabricating the sameInfo
- Publication number
- TW200717808A TW200717808A TW094136884A TW94136884A TW200717808A TW 200717808 A TW200717808 A TW 200717808A TW 094136884 A TW094136884 A TW 094136884A TW 94136884 A TW94136884 A TW 94136884A TW 200717808 A TW200717808 A TW 200717808A
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- film transistor
- flexible thin
- fabricating
- transistor substrate
- Prior art date
Links
Landscapes
- Thin Film Transistor (AREA)
Abstract
The invention provides a flexible thin film transistor substrate and method of fabricating the same. The method includes first depositing a lift film made of organic material on the glass carrier and capable of being directly peeled from the glass carrier board; then forming at least an inorganic layer film on the lift film by the sequence of forming an inorganic layer film and an organic layer film with inorganic material and organic material selectively;; next forming amorphous silicon thin film transistor or polysilicon thin film transistor; and finally, peeling off the lift film with thin film transistor from the glass carrier directly to thus manufacture flexible thin film transistor substrate. The invention has better chemical durability, heat stability, airtight characteristic, waterproof characteristic and high transmissibility in comparison with using plastics as carrier substrate, and has better flexibility than metal or glass.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94136884A TWI287298B (en) | 2005-10-21 | 2005-10-21 | Flexible thin film transistor substrate and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94136884A TWI287298B (en) | 2005-10-21 | 2005-10-21 | Flexible thin film transistor substrate and method of fabricating the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200717808A true TW200717808A (en) | 2007-05-01 |
TWI287298B TWI287298B (en) | 2007-09-21 |
Family
ID=39460274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94136884A TWI287298B (en) | 2005-10-21 | 2005-10-21 | Flexible thin film transistor substrate and method of fabricating the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI287298B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI505410B (en) * | 2008-12-30 | 2015-10-21 | Ind Tech Res Inst | Substrate structures applied in flexible electrical devices and fabrication method thereof |
US9457551B2 (en) | 2011-02-25 | 2016-10-04 | Innocom Technology (Shenzhen) Co., Ltd. | Method for manufacturing display |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI419091B (en) | 2009-02-10 | 2013-12-11 | Ind Tech Res Inst | Appratus for a transferrable flexible electronic device and method for fabricating a flexible electronic device |
TWI467771B (en) | 2011-01-20 | 2015-01-01 | Innolux Corp | Thin film transistor substrate and display apparatus using the same and manufacturing method thereof |
TWI539414B (en) | 2011-09-21 | 2016-06-21 | 友達光電股份有限公司 | Fabricating method of flexible display |
TWI492373B (en) | 2012-08-09 | 2015-07-11 | Au Optronics Corp | Method for fabricating flexible display module |
TWI532162B (en) | 2013-06-25 | 2016-05-01 | 友達光電股份有限公司 | Flexible display panel and manufacturing method thereof |
TW201526718A (en) | 2013-12-17 | 2015-07-01 | Chunghwa Picture Tubes Ltd | Flexible device substrate and manufacturing method thereof |
-
2005
- 2005-10-21 TW TW94136884A patent/TWI287298B/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI505410B (en) * | 2008-12-30 | 2015-10-21 | Ind Tech Res Inst | Substrate structures applied in flexible electrical devices and fabrication method thereof |
US9833977B2 (en) | 2008-12-30 | 2017-12-05 | Industrial Technology Research Institute | Substrate structures applied in flexible electrical devices and fabrication method thereof |
US9457551B2 (en) | 2011-02-25 | 2016-10-04 | Innocom Technology (Shenzhen) Co., Ltd. | Method for manufacturing display |
Also Published As
Publication number | Publication date |
---|---|
TWI287298B (en) | 2007-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |