TW200717808A - Flexible thin film transistor substrate and method of fabricating the same - Google Patents

Flexible thin film transistor substrate and method of fabricating the same

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Publication number
TW200717808A
TW200717808A TW094136884A TW94136884A TW200717808A TW 200717808 A TW200717808 A TW 200717808A TW 094136884 A TW094136884 A TW 094136884A TW 94136884 A TW94136884 A TW 94136884A TW 200717808 A TW200717808 A TW 200717808A
Authority
TW
Taiwan
Prior art keywords
thin film
film transistor
flexible thin
fabricating
transistor substrate
Prior art date
Application number
TW094136884A
Other languages
Chinese (zh)
Other versions
TWI287298B (en
Inventor
dong-xing Wu
Cheng-Chung Chiang
Yung-Pei Chen
rui-hua Hong
Original Assignee
Univ Nat Chunghsing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Chunghsing filed Critical Univ Nat Chunghsing
Priority to TW94136884A priority Critical patent/TWI287298B/en
Publication of TW200717808A publication Critical patent/TW200717808A/en
Application granted granted Critical
Publication of TWI287298B publication Critical patent/TWI287298B/en

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  • Thin Film Transistor (AREA)

Abstract

The invention provides a flexible thin film transistor substrate and method of fabricating the same. The method includes first depositing a lift film made of organic material on the glass carrier and capable of being directly peeled from the glass carrier board; then forming at least an inorganic layer film on the lift film by the sequence of forming an inorganic layer film and an organic layer film with inorganic material and organic material selectively;; next forming amorphous silicon thin film transistor or polysilicon thin film transistor; and finally, peeling off the lift film with thin film transistor from the glass carrier directly to thus manufacture flexible thin film transistor substrate. The invention has better chemical durability, heat stability, airtight characteristic, waterproof characteristic and high transmissibility in comparison with using plastics as carrier substrate, and has better flexibility than metal or glass.
TW94136884A 2005-10-21 2005-10-21 Flexible thin film transistor substrate and method of fabricating the same TWI287298B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94136884A TWI287298B (en) 2005-10-21 2005-10-21 Flexible thin film transistor substrate and method of fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94136884A TWI287298B (en) 2005-10-21 2005-10-21 Flexible thin film transistor substrate and method of fabricating the same

Publications (2)

Publication Number Publication Date
TW200717808A true TW200717808A (en) 2007-05-01
TWI287298B TWI287298B (en) 2007-09-21

Family

ID=39460274

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94136884A TWI287298B (en) 2005-10-21 2005-10-21 Flexible thin film transistor substrate and method of fabricating the same

Country Status (1)

Country Link
TW (1) TWI287298B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI505410B (en) * 2008-12-30 2015-10-21 Ind Tech Res Inst Substrate structures applied in flexible electrical devices and fabrication method thereof
US9457551B2 (en) 2011-02-25 2016-10-04 Innocom Technology (Shenzhen) Co., Ltd. Method for manufacturing display

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI419091B (en) 2009-02-10 2013-12-11 Ind Tech Res Inst Appratus for a transferrable flexible electronic device and method for fabricating a flexible electronic device
TWI467771B (en) 2011-01-20 2015-01-01 Innolux Corp Thin film transistor substrate and display apparatus using the same and manufacturing method thereof
TWI539414B (en) 2011-09-21 2016-06-21 友達光電股份有限公司 Fabricating method of flexible display
TWI492373B (en) 2012-08-09 2015-07-11 Au Optronics Corp Method for fabricating flexible display module
TWI532162B (en) 2013-06-25 2016-05-01 友達光電股份有限公司 Flexible display panel and manufacturing method thereof
TW201526718A (en) 2013-12-17 2015-07-01 Chunghwa Picture Tubes Ltd Flexible device substrate and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI505410B (en) * 2008-12-30 2015-10-21 Ind Tech Res Inst Substrate structures applied in flexible electrical devices and fabrication method thereof
US9833977B2 (en) 2008-12-30 2017-12-05 Industrial Technology Research Institute Substrate structures applied in flexible electrical devices and fabrication method thereof
US9457551B2 (en) 2011-02-25 2016-10-04 Innocom Technology (Shenzhen) Co., Ltd. Method for manufacturing display

Also Published As

Publication number Publication date
TWI287298B (en) 2007-09-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees