JP2011248366A5 - - Google Patents

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Publication number
JP2011248366A5
JP2011248366A5 JP2011126713A JP2011126713A JP2011248366A5 JP 2011248366 A5 JP2011248366 A5 JP 2011248366A5 JP 2011126713 A JP2011126713 A JP 2011126713A JP 2011126713 A JP2011126713 A JP 2011126713A JP 2011248366 A5 JP2011248366 A5 JP 2011248366A5
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JP
Japan
Prior art keywords
projection objective
optical element
stop
edge
beam path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011126713A
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English (en)
Japanese (ja)
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JP2011248366A (ja
JP5622664B2 (ja
Filing date
Publication date
Priority claimed from DE102010021539.2A external-priority patent/DE102010021539B4/de
Application filed filed Critical
Publication of JP2011248366A publication Critical patent/JP2011248366A/ja
Publication of JP2011248366A5 publication Critical patent/JP2011248366A5/ja
Application granted granted Critical
Publication of JP5622664B2 publication Critical patent/JP5622664B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011126713A 2010-05-19 2011-05-19 絞りを有する投影対物系 Expired - Fee Related JP5622664B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010021539.2A DE102010021539B4 (de) 2010-05-19 2010-05-19 Projektionsobjektiv mit Blenden
DE102010021539.2 2010-05-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014124134A Division JP5982429B2 (ja) 2010-05-19 2014-06-17 絞りを有する投影対物系

Publications (3)

Publication Number Publication Date
JP2011248366A JP2011248366A (ja) 2011-12-08
JP2011248366A5 true JP2011248366A5 (enExample) 2013-11-21
JP5622664B2 JP5622664B2 (ja) 2014-11-12

Family

ID=44900450

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2011126713A Expired - Fee Related JP5622664B2 (ja) 2010-05-19 2011-05-19 絞りを有する投影対物系
JP2014124134A Expired - Fee Related JP5982429B2 (ja) 2010-05-19 2014-06-17 絞りを有する投影対物系
JP2016151327A Expired - Fee Related JP6545644B2 (ja) 2010-05-19 2016-08-01 絞りを有する投影対物系

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2014124134A Expired - Fee Related JP5982429B2 (ja) 2010-05-19 2014-06-17 絞りを有する投影対物系
JP2016151327A Expired - Fee Related JP6545644B2 (ja) 2010-05-19 2016-08-01 絞りを有する投影対物系

Country Status (6)

Country Link
US (1) US8488104B2 (enExample)
JP (3) JP5622664B2 (enExample)
KR (1) KR101526638B1 (enExample)
CN (1) CN102253464B (enExample)
DE (1) DE102010021539B4 (enExample)
TW (3) TWI631369B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101590743B1 (ko) * 2005-06-02 2016-02-01 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 대물 렌즈
DE102010021539B4 (de) * 2010-05-19 2014-10-09 Carl Zeiss Smt Gmbh Projektionsobjektiv mit Blenden
DE102012206153A1 (de) 2012-04-16 2013-10-17 Carl Zeiss Smt Gmbh Optisches System einer mikrolithographischen Projektionsbelichtungsanlage
DE102017204619A1 (de) 2016-04-05 2017-10-05 Carl Zeiss Smt Gmbh Projektionsbelichtungsverfahren, Projektionsobjektiv und Projektionsbelichtungsanlage für die Mikrolithographie
DE102017211902A1 (de) 2017-07-12 2018-08-02 Carl Zeiss Smt Gmbh Projektionsobjektiv für eine Projektionsbelichtungsanlage für die Mikrolithographie
JP7197354B2 (ja) * 2018-12-28 2022-12-27 Hoya株式会社 レンズユニット及びレンズユニットの製造方法
DE102019209884A1 (de) * 2019-07-04 2021-01-07 Carl Zeiss Smt Gmbh Blende, optisches system und lithographieanlage
DE102021214140A1 (de) * 2021-12-10 2023-06-15 Carl Zeiss Smt Gmbh Fassung für eine linse, anordnung, lithographieanlage sowie verfahren
EP4540645A1 (de) * 2022-06-17 2025-04-23 TRUMPF Lasersystems for Semiconductor Manufacturing GmbH Vorrichtung zum korrigieren eines astigmatismus eines laserstrahls
DE102025100345A1 (de) * 2025-01-08 2025-12-04 Carl Zeiss Smt Gmbh Verfahren

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DE102010021539B4 (de) * 2010-05-19 2014-10-09 Carl Zeiss Smt Gmbh Projektionsobjektiv mit Blenden

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